JPS61142867U - - Google Patents

Info

Publication number
JPS61142867U
JPS61142867U JP2409385U JP2409385U JPS61142867U JP S61142867 U JPS61142867 U JP S61142867U JP 2409385 U JP2409385 U JP 2409385U JP 2409385 U JP2409385 U JP 2409385U JP S61142867 U JPS61142867 U JP S61142867U
Authority
JP
Japan
Prior art keywords
rotating shaft
shutter
guide groove
sputtering
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2409385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2409385U priority Critical patent/JPS61142867U/ja
Publication of JPS61142867U publication Critical patent/JPS61142867U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Physical Vapour Deposition (AREA)
JP2409385U 1985-02-20 1985-02-20 Pending JPS61142867U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2409385U JPS61142867U (enrdf_load_stackoverflow) 1985-02-20 1985-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2409385U JPS61142867U (enrdf_load_stackoverflow) 1985-02-20 1985-02-20

Publications (1)

Publication Number Publication Date
JPS61142867U true JPS61142867U (enrdf_load_stackoverflow) 1986-09-03

Family

ID=30517926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2409385U Pending JPS61142867U (enrdf_load_stackoverflow) 1985-02-20 1985-02-20

Country Status (1)

Country Link
JP (1) JPS61142867U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS6388861U (enrdf_load_stackoverflow)
JPS6198240A (ja) メカニカルストツパ装置
JPS61142867U (enrdf_load_stackoverflow)
JPS6336307Y2 (enrdf_load_stackoverflow)
JPS619708U (ja) ル−バ装置
JPS61119707U (enrdf_load_stackoverflow)
JPS5843631U (ja) 回転ヘツド装置
JPH02102653U (enrdf_load_stackoverflow)
JPS6245421U (enrdf_load_stackoverflow)
JPS62126637U (enrdf_load_stackoverflow)
JPS6399035U (enrdf_load_stackoverflow)
JPS6324734U (enrdf_load_stackoverflow)
JPH031737U (enrdf_load_stackoverflow)
JPS60173724U (ja) 軸継手装置
JPS6452538U (enrdf_load_stackoverflow)
JPS5963670U (ja) サ−ボ付モ−タ−
JPS6260923U (enrdf_load_stackoverflow)
JPS5886303U (ja) ドラムバ−カ−
JPS62111795U (enrdf_load_stackoverflow)
JPH01157432U (enrdf_load_stackoverflow)
JPS629272U (enrdf_load_stackoverflow)
JPS5894905U (ja) 回転駆動装置
JPS58176234U (ja) オ−トリバ−ス式テ−ププレ−ヤ
JPS5889641U (ja) 摩擦伝動装置の過負荷検出装置
JPS58160432U (ja) 切替装置