JPS61142451U - - Google Patents

Info

Publication number
JPS61142451U
JPS61142451U JP2666485U JP2666485U JPS61142451U JP S61142451 U JPS61142451 U JP S61142451U JP 2666485 U JP2666485 U JP 2666485U JP 2666485 U JP2666485 U JP 2666485U JP S61142451 U JPS61142451 U JP S61142451U
Authority
JP
Japan
Prior art keywords
wafer
carrier
lifting plate
mounting table
holding groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2666485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2666485U priority Critical patent/JPS61142451U/ja
Publication of JPS61142451U publication Critical patent/JPS61142451U/ja
Pending legal-status Critical Current

Links

JP2666485U 1985-02-26 1985-02-26 Pending JPS61142451U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2666485U JPS61142451U (enrdf_load_stackoverflow) 1985-02-26 1985-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2666485U JPS61142451U (enrdf_load_stackoverflow) 1985-02-26 1985-02-26

Publications (1)

Publication Number Publication Date
JPS61142451U true JPS61142451U (enrdf_load_stackoverflow) 1986-09-03

Family

ID=30522886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2666485U Pending JPS61142451U (enrdf_load_stackoverflow) 1985-02-26 1985-02-26

Country Status (1)

Country Link
JP (1) JPS61142451U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009073544A (ja) * 2007-09-22 2009-04-09 Konica Minolta Opto Inc 基板取り出し治具及び記録媒体用ガラス基板の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009073544A (ja) * 2007-09-22 2009-04-09 Konica Minolta Opto Inc 基板取り出し治具及び記録媒体用ガラス基板の製造方法

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