JPS61142449U - - Google Patents
Info
- Publication number
- JPS61142449U JPS61142449U JP2521685U JP2521685U JPS61142449U JP S61142449 U JPS61142449 U JP S61142449U JP 2521685 U JP2521685 U JP 2521685U JP 2521685 U JP2521685 U JP 2521685U JP S61142449 U JPS61142449 U JP S61142449U
- Authority
- JP
- Japan
- Prior art keywords
- sample stage
- fine pattern
- airtight chamber
- wafer
- pattern observation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2521685U JPS61142449U (enExample) | 1985-02-22 | 1985-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2521685U JPS61142449U (enExample) | 1985-02-22 | 1985-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61142449U true JPS61142449U (enExample) | 1986-09-03 |
Family
ID=30520091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2521685U Pending JPS61142449U (enExample) | 1985-02-22 | 1985-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61142449U (enExample) |
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1985
- 1985-02-22 JP JP2521685U patent/JPS61142449U/ja active Pending