JPS61140548U - - Google Patents
Info
- Publication number
- JPS61140548U JPS61140548U JP2406485U JP2406485U JPS61140548U JP S61140548 U JPS61140548 U JP S61140548U JP 2406485 U JP2406485 U JP 2406485U JP 2406485 U JP2406485 U JP 2406485U JP S61140548 U JPS61140548 U JP S61140548U
- Authority
- JP
- Japan
- Prior art keywords
- film
- metal film
- tungsten
- layer
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 claims 1
- 229910021342 tungsten silicide Inorganic materials 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2406485U JPS61140548U (enrdf_load_stackoverflow) | 1985-02-21 | 1985-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2406485U JPS61140548U (enrdf_load_stackoverflow) | 1985-02-21 | 1985-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61140548U true JPS61140548U (enrdf_load_stackoverflow) | 1986-08-30 |
Family
ID=30517871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2406485U Pending JPS61140548U (enrdf_load_stackoverflow) | 1985-02-21 | 1985-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61140548U (enrdf_load_stackoverflow) |
-
1985
- 1985-02-21 JP JP2406485U patent/JPS61140548U/ja active Pending
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