JPS61140354U - - Google Patents
Info
- Publication number
- JPS61140354U JPS61140354U JP1985022843U JP2284385U JPS61140354U JP S61140354 U JPS61140354 U JP S61140354U JP 1985022843 U JP1985022843 U JP 1985022843U JP 2284385 U JP2284385 U JP 2284385U JP S61140354 U JPS61140354 U JP S61140354U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- light
- glass mask
- pattern
- film made
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 4
- 239000004063 acid-resistant material Substances 0.000 claims 1
- 239000003513 alkali Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000012780 transparent material Substances 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985022843U JPS61140354U (uk) | 1985-02-20 | 1985-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985022843U JPS61140354U (uk) | 1985-02-20 | 1985-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61140354U true JPS61140354U (uk) | 1986-08-30 |
Family
ID=30515520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985022843U Pending JPS61140354U (uk) | 1985-02-20 | 1985-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61140354U (uk) |
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1985
- 1985-02-20 JP JP1985022843U patent/JPS61140354U/ja active Pending