JPS61139054A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS61139054A
JPS61139054A JP59261070A JP26107084A JPS61139054A JP S61139054 A JPS61139054 A JP S61139054A JP 59261070 A JP59261070 A JP 59261070A JP 26107084 A JP26107084 A JP 26107084A JP S61139054 A JPS61139054 A JP S61139054A
Authority
JP
Japan
Prior art keywords
terminal
conductor
pellet
semiconductor
connecting terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59261070A
Other languages
Japanese (ja)
Inventor
Tetsuro Suzuki
鈴木 鉄朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59261070A priority Critical patent/JPS61139054A/en
Publication of JPS61139054A publication Critical patent/JPS61139054A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/16Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
    • H01L23/18Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
    • H01L23/24Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device solid or gel at the normal operating temperature of the device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/33Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
    • H01L25/072Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/33Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
    • H01L2224/331Disposition
    • H01L2224/3318Disposition being disposed on at least two different sides of the body, e.g. dual array
    • H01L2224/33181On opposite sides of the body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/34Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L2224/39Structure, shape, material or disposition of the strap connectors after the connecting process
    • H01L2224/40Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
    • H01L2224/401Disposition
    • H01L2224/40135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/40137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/34Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L2224/39Structure, shape, material or disposition of the strap connectors after the connecting process
    • H01L2224/40Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
    • H01L2224/401Disposition
    • H01L2224/40151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/40221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/40225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/40227Connecting the strap to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

PURPOSE:To improve thermal fatigue characteristics, moisture resistance and shock resistance, by electrically connecting a connecting terminal to a plurality of semiconductor pellets, which are mounted on a pellet mounting conductor, connecting the connecting terminal to a terminal conductor on a substrate, and guiding the terminal to the outside. CONSTITUTION:The specified part of a connecting terminal 27 is connected to a heat radiating substrate 20 through a solder layer 28, a terminal conductor 24 and an insulating layer 22 sequentially. Thus the difference in thermal capacity between the surface of a semiconductor pellet 26 on the side of the heat radiating substrate and the surface of the pellet on the side of the connecting terminal 27 can be made sufficiently small. As a result, occurrence of cracks in the solder layers 25 and 28 can be prevented during a thermal fatigue test. The connecting terminal 27 is connected to the terminal conductor 24 before the terminal 27 reaches the semiconductor pellet 26. Therefore, the actual length of the connecting terminal 27 can be made long, and the intrusion of moisture to the semiconductor pellet 26 can be suppressed. External force is absorbed by the connecting part of the terminal conductor 24, and shock resistance can be improved.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、半導体装置に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to a semiconductor device.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

従来、電源整流等の整流素子として使用される半導体装
置は、第2図に示すような構造を侑している。図中1は
、冷却フィンとなる放熱基板である。放熱基板1は、筐
体2の床部を構成している。放熱基板1上には、絶縁層
3が形成されている。絶縁層3上には、所定ツクターン
の導体4が形成されている。導体4上には、半田層5を
介して半導体ペレット6が装着されている。半導体ペレ
ット6には、接続端子7の一端部が半田層5を介して装
着されている。接続端子7は、断面路り字形をなし、そ
の他端部を筐体2の外部に導出している。筐体2内の半
導体ペレット6及び接続端子の一端部等は、樹脂封止体
8で一体に封止されている。
2. Description of the Related Art Conventionally, a semiconductor device used as a rectifying element for power supply rectification, etc. has a structure as shown in FIG. In the figure, numeral 1 is a heat dissipation board that becomes a cooling fin. The heat dissipation board 1 constitutes the floor of the housing 2. An insulating layer 3 is formed on the heat dissipation substrate 1. A conductor 4 of a predetermined turn is formed on the insulating layer 3. A semiconductor pellet 6 is mounted on the conductor 4 with a solder layer 5 interposed therebetween. One end of a connection terminal 7 is attached to the semiconductor pellet 6 via the solder layer 5. The connection terminal 7 has a cross-sectional shape, and the other end is led out of the housing 2 . The semiconductor pellet 6 and one end of the connection terminal inside the housing 2 are integrally sealed with a resin sealing body 8.

〔背景技術の問題点〕[Problems with background technology]

上述のように構成された半導体装置10は、熱疲労特性
、耐湿性、及び耐衝撃性について次のような問題があっ
た。
The semiconductor device 10 configured as described above has the following problems regarding thermal fatigue characteristics, moisture resistance, and impact resistance.

(1)熱疲労特性の問題点 半導体ペレット6の熱容量は、放熱基板1側よシも接続
端子7側の方が小さい。このため熱疲労試験を行うと、
接続端子7側の湿度上昇が大きく、半田層5に亀裂が発
生し易い。また、熱疲労試験の際に半導体ペレット60
発熱によりて樹脂封止体8が膨張する。このため半田層
5内での亀裂の発生、成長を助長する。
(1) Problems with thermal fatigue characteristics The heat capacity of the semiconductor pellet 6 is smaller on the connection terminal 7 side than on the heat dissipation board 1 side. For this reason, when performing a thermal fatigue test,
The humidity on the connection terminal 7 side increases significantly, and cracks are likely to occur in the solder layer 5. In addition, during thermal fatigue testing, semiconductor pellets 60
The resin sealing body 8 expands due to the heat generation. This encourages the generation and growth of cracks within the solder layer 5.

(2)耐湿性の問題点 樹脂封止体8と接続端子7間で最も湿気を吸い易い。従
って、樹脂封止体8内の接続端子7の長さが短い従来の
半導体装置1oでは、湿気による特性劣化が起き易い。
(2) Problems with moisture resistance Moisture is most likely to be absorbed between the resin sealing body 8 and the connection terminal 7. Therefore, in the conventional semiconductor device 1o in which the length of the connecting terminal 7 within the resin sealing body 8 is short, characteristics deterioration due to moisture is likely to occur.

(3)耐衝撃性の問題点 接続端子1に外力が加わると、直接半導体ペレット6や
半田層5にその外力が伝達される。
(3) Problems with impact resistance When an external force is applied to the connecting terminal 1, the external force is directly transmitted to the semiconductor pellet 6 and the solder layer 5.

このため半導体ペレット6及び半田層5が外力によって
破壊され易い。
Therefore, the semiconductor pellet 6 and the solder layer 5 are easily destroyed by external force.

〔発明の目的〕[Purpose of the invention]

本発明は、熱疲労特性、耐湿性及び耐衝撃性の向上を図
った半導体装置を提供することその目的とするものであ
る。
An object of the present invention is to provide a semiconductor device with improved thermal fatigue characteristics, moisture resistance, and impact resistance.

〔発明の概要〕[Summary of the invention]

本発明は、ペレット装着用導体に装着された複数個の半
導体ペレットに接続端子を電気的に接続すると共に、こ
の接続端子を基板上の端子用導体に接続して外部に導出
するようにしたことにより、熱疲労特性、耐湿性及び耐
衝撃性の向上を達成した半導体装置である。
The present invention electrically connects a connecting terminal to a plurality of semiconductor pellets attached to a pellet attaching conductor, and connects this connecting terminal to a terminal conductor on a board to lead it out to the outside. This is a semiconductor device that has improved thermal fatigue characteristics, moisture resistance, and impact resistance.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の実施例について図面を参照して説明する
。第1図は、本発明の一実施例の断面図である。図中2
0は金属からなる放熱基板である。放熱基板20は、筐
体21の床部を構成している。放熱基板20上には、絶
縁層22が形成されている。絶縁層22上には、所定ノ
臂ターンのペレット装着用導体23及び端子用導体24
が夫々独立して形成されている。ペレット装着用導体2
3には、半田層25を介して半導体4レフト26が装着
されている。半導体ペレット26には、接続端子22の
一端部が半田層25を介して電気的に接続されている。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view of one embodiment of the present invention. 2 in the diagram
0 is a heat dissipation board made of metal. The heat dissipation board 20 constitutes a floor portion of the housing 21 . An insulating layer 22 is formed on the heat dissipation substrate 20. On the insulating layer 22 are a pellet mounting conductor 23 and a terminal conductor 24 with predetermined arm turns.
are formed independently. Conductor 2 for attaching pellets
A semiconductor 4 left 26 is attached to 3 through a solder layer 25. One end of the connection terminal 22 is electrically connected to the semiconductor pellet 26 via the solder layer 25 .

接続端子27は、その所定領域を半田層28を介して端
子用導体24に接続し、他端部を筐体21の外部に導出
している。筐体2ノ内の接続端子27の一端部、半導体
ペレット26、半田層25.28及び(レット装着用導
体23、端子用導体24は、樹脂封止体29によって一
体に樹脂封止されている。
The connection terminal 27 has a predetermined region connected to the terminal conductor 24 via the solder layer 28 , and the other end thereof is led out to the outside of the housing 21 . One end of the connection terminal 27 inside the housing 2, the semiconductor pellet 26, the solder layer 25, 28, the conductor 23 for attaching the pellet, and the conductor 24 for the terminal are integrally resin-sealed with a resin sealing body 29. .

このように構成された半導体装置とは、熱疲労特性、耐
湿性及び耐衝撃性について次のような効果を有する。
The semiconductor device configured in this manner has the following effects in terms of thermal fatigue characteristics, moisture resistance, and impact resistance.

(1)熱疲労特性についての効果 接続端子27の所定部分が半田層28、端子用導体24
及び絶縁層22を順次介して放熱基板20に接続してい
るので、熱疲労試験の際に半導体4レツト26の放熱基
板20側と接続端子22側の熱容量の差を十分に小さく
することができる。その結果、熱疲労試験の際に半田層
25.211中に亀裂が発生するのを防止することがで
きる。
(1) Effect on thermal fatigue characteristics A predetermined portion of the connecting terminal 27 is connected to the solder layer 28 and the terminal conductor 24.
Since it is connected to the heat dissipation board 20 through the insulating layer 22 and the insulating layer 22 in order, the difference in heat capacity between the heat dissipation board 20 side and the connection terminal 22 side of the semiconductor 4-let 26 can be made sufficiently small during a thermal fatigue test. . As a result, it is possible to prevent cracks from forming in the solder layer 25, 211 during a thermal fatigue test.

(2)耐湿性についての効果 接続端子22を半導体ペレット26に達する前に端子用
導体24に接続したことにより、接続端子27の実質長
を長くして、半導体ペレット26への湿気の侵入を抑制
することができもその結果、耐湿性を向上させることが
できる。
(2) Effect on moisture resistance By connecting the connecting terminal 22 to the terminal conductor 24 before reaching the semiconductor pellet 26, the actual length of the connecting terminal 27 is increased and moisture intrusion into the semiconductor pellet 26 is suppressed. As a result, moisture resistance can be improved.

(3)耐衝撃性についての効果 接続端子27が端子用導体24に約25 鴫偏2以上の
接着力で固着されているので、外力に対してその分だけ
機械的強度を向上できると共K。
(3) Effect on impact resistance Since the connecting terminal 27 is fixed to the terminal conductor 24 with an adhesive force of approximately 25 mm or more, the mechanical strength against external forces can be improved by that amount. .

この端子用導体24との接続部で外力を吸収して、耐衝
撃性を向上させることができる。
External force can be absorbed at the connection portion with the terminal conductor 24, and impact resistance can be improved.

〔発明の効果〕〔Effect of the invention〕

以上説明した如く、本発明に係る半導体装置によれば、
熱疲労特性、耐湿性及び耐衝撃性を向上式せることがで
きるものである。
As explained above, according to the semiconductor device according to the present invention,
It can improve thermal fatigue properties, moisture resistance, and impact resistance.

【図面の簡単な説明】 第1図は、本発明の一実施例の断面図、第2図は、従来
の半導体装置の断面図である。 20・・・放熱基板、21・・・筐体、22・・・絶縁
層、23・・・ペレット装着用導体、24・・・端子用
導体、25・・・半田層、26・・・半導体ペレット、
27・・・接続端子、28・・・半田層、29・・・樹
脂封止体、30・・・半導体装置 出願人代理人  弁理士 鈴 江 武 彦第1図 第2図
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional semiconductor device. DESCRIPTION OF SYMBOLS 20... Heat dissipation board, 21... Housing, 22... Insulating layer, 23... Conductor for pellet attachment, 24... Conductor for terminals, 25... Solder layer, 26... Semiconductor pellet,
27...Connection terminal, 28...Solder layer, 29...Resin sealing body, 30...Semiconductor device applicant's representative Patent attorney Takehiko Suzue Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims]  放熱基板上に絶縁層を介して形成された所定パターン
のペレット装着用導体及び端子用導体と、該ペレット装
着用導体上に装着された半導体ペレットと、該半導体ペ
レットに一端部が電気的に接続され、かつ、前記一端部
以外の領域で前記端子用導体に接続すると共に、他端部
を外部に導出した接続端子と、該他端部以外の領域及び
前記半導体ペレット、前記ペレット装着用導体、前記端
子用導体、前記絶縁層を封止する樹脂封止体とを具備す
ることを特徴とする半導体装置。
A conductor for pellet mounting and a terminal conductor of a predetermined pattern formed on a heat dissipation board via an insulating layer, a semiconductor pellet mounted on the conductor for pellet mounting, and one end electrically connected to the semiconductor pellet. and a connecting terminal connected to the terminal conductor in a region other than the one end and having the other end led out to the outside, a region other than the other end, the semiconductor pellet, the pellet mounting conductor, A semiconductor device comprising the terminal conductor and a resin sealing body for sealing the insulating layer.
JP59261070A 1984-12-11 1984-12-11 Semiconductor device Pending JPS61139054A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59261070A JPS61139054A (en) 1984-12-11 1984-12-11 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59261070A JPS61139054A (en) 1984-12-11 1984-12-11 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS61139054A true JPS61139054A (en) 1986-06-26

Family

ID=17356660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59261070A Pending JPS61139054A (en) 1984-12-11 1984-12-11 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS61139054A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61157340U (en) * 1985-03-20 1986-09-30
JPH0297055A (en) * 1988-10-04 1990-04-09 Fuji Electric Co Ltd Semiconductor device
US5506447A (en) * 1993-06-15 1996-04-09 Fuji Electric Co., Ltd. Hybrid integrated circuit
JP2012059876A (en) * 2010-09-08 2012-03-22 Sanken Electric Co Ltd Semiconductor module and manufacturing method of the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52127759A (en) * 1976-04-20 1977-10-26 Hitachi Ltd Resin-seal type semiconductor unit
JPS57122550A (en) * 1981-01-23 1982-07-30 Hitachi Ltd Semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52127759A (en) * 1976-04-20 1977-10-26 Hitachi Ltd Resin-seal type semiconductor unit
JPS57122550A (en) * 1981-01-23 1982-07-30 Hitachi Ltd Semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61157340U (en) * 1985-03-20 1986-09-30
JPH0297055A (en) * 1988-10-04 1990-04-09 Fuji Electric Co Ltd Semiconductor device
US5506447A (en) * 1993-06-15 1996-04-09 Fuji Electric Co., Ltd. Hybrid integrated circuit
JP2012059876A (en) * 2010-09-08 2012-03-22 Sanken Electric Co Ltd Semiconductor module and manufacturing method of the same

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