JPS61138248U - - Google Patents
Info
- Publication number
- JPS61138248U JPS61138248U JP2244885U JP2244885U JPS61138248U JP S61138248 U JPS61138248 U JP S61138248U JP 2244885 U JP2244885 U JP 2244885U JP 2244885 U JP2244885 U JP 2244885U JP S61138248 U JPS61138248 U JP S61138248U
- Authority
- JP
- Japan
- Prior art keywords
- terminal
- holder
- temperature measuring
- probe pin
- contact probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims 3
- 238000009529 body temperature measurement Methods 0.000 claims 2
Landscapes
- Electron Beam Exposure (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985022448U JPH0741151Y2 (ja) | 1985-02-19 | 1985-02-19 | マスクガラス等の温度測定機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985022448U JPH0741151Y2 (ja) | 1985-02-19 | 1985-02-19 | マスクガラス等の温度測定機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61138248U true JPS61138248U (it) | 1986-08-27 |
| JPH0741151Y2 JPH0741151Y2 (ja) | 1995-09-20 |
Family
ID=30514750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985022448U Expired - Lifetime JPH0741151Y2 (ja) | 1985-02-19 | 1985-02-19 | マスクガラス等の温度測定機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0741151Y2 (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63148623A (ja) * | 1986-12-11 | 1988-06-21 | Dainippon Screen Mfg Co Ltd | 基板温度測定装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5744543U (it) * | 1980-08-27 | 1982-03-11 | ||
| JPS57162431A (en) * | 1981-03-31 | 1982-10-06 | Jeol Ltd | Method for exposure to electron beam |
-
1985
- 1985-02-19 JP JP1985022448U patent/JPH0741151Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5744543U (it) * | 1980-08-27 | 1982-03-11 | ||
| JPS57162431A (en) * | 1981-03-31 | 1982-10-06 | Jeol Ltd | Method for exposure to electron beam |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63148623A (ja) * | 1986-12-11 | 1988-06-21 | Dainippon Screen Mfg Co Ltd | 基板温度測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0741151Y2 (ja) | 1995-09-20 |