JPS61138248U - - Google Patents

Info

Publication number
JPS61138248U
JPS61138248U JP2244885U JP2244885U JPS61138248U JP S61138248 U JPS61138248 U JP S61138248U JP 2244885 U JP2244885 U JP 2244885U JP 2244885 U JP2244885 U JP 2244885U JP S61138248 U JPS61138248 U JP S61138248U
Authority
JP
Japan
Prior art keywords
terminal
holder
temperature measuring
probe pin
contact probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2244885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0741151Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985022448U priority Critical patent/JPH0741151Y2/ja
Publication of JPS61138248U publication Critical patent/JPS61138248U/ja
Application granted granted Critical
Publication of JPH0741151Y2 publication Critical patent/JPH0741151Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP1985022448U 1985-02-19 1985-02-19 マスクガラス等の温度測定機構 Expired - Lifetime JPH0741151Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985022448U JPH0741151Y2 (ja) 1985-02-19 1985-02-19 マスクガラス等の温度測定機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985022448U JPH0741151Y2 (ja) 1985-02-19 1985-02-19 マスクガラス等の温度測定機構

Publications (2)

Publication Number Publication Date
JPS61138248U true JPS61138248U (fr) 1986-08-27
JPH0741151Y2 JPH0741151Y2 (ja) 1995-09-20

Family

ID=30514750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985022448U Expired - Lifetime JPH0741151Y2 (ja) 1985-02-19 1985-02-19 マスクガラス等の温度測定機構

Country Status (1)

Country Link
JP (1) JPH0741151Y2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148623A (ja) * 1986-12-11 1988-06-21 Dainippon Screen Mfg Co Ltd 基板温度測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5744543U (fr) * 1980-08-27 1982-03-11
JPS57162431A (en) * 1981-03-31 1982-10-06 Jeol Ltd Method for exposure to electron beam

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5744543U (fr) * 1980-08-27 1982-03-11
JPS57162431A (en) * 1981-03-31 1982-10-06 Jeol Ltd Method for exposure to electron beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148623A (ja) * 1986-12-11 1988-06-21 Dainippon Screen Mfg Co Ltd 基板温度測定装置

Also Published As

Publication number Publication date
JPH0741151Y2 (ja) 1995-09-20

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