JPS61138240U - - Google Patents

Info

Publication number
JPS61138240U
JPS61138240U JP2245085U JP2245085U JPS61138240U JP S61138240 U JPS61138240 U JP S61138240U JP 2245085 U JP2245085 U JP 2245085U JP 2245085 U JP2245085 U JP 2245085U JP S61138240 U JPS61138240 U JP S61138240U
Authority
JP
Japan
Prior art keywords
valve
leak valve
electron beam
beam lithography
vacuum evacuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2245085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2245085U priority Critical patent/JPS61138240U/ja
Publication of JPS61138240U publication Critical patent/JPS61138240U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Details Of Valves (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2245085U 1985-02-19 1985-02-19 Pending JPS61138240U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2245085U JPS61138240U (enExample) 1985-02-19 1985-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2245085U JPS61138240U (enExample) 1985-02-19 1985-02-19

Publications (1)

Publication Number Publication Date
JPS61138240U true JPS61138240U (enExample) 1986-08-27

Family

ID=30514753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2245085U Pending JPS61138240U (enExample) 1985-02-19 1985-02-19

Country Status (1)

Country Link
JP (1) JPS61138240U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001108130A (ja) * 1999-05-25 2001-04-20 Applied Materials Inc 半導体ウェーハ処理装置用クラスタバルブ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001108130A (ja) * 1999-05-25 2001-04-20 Applied Materials Inc 半導体ウェーハ処理装置用クラスタバルブ

Similar Documents

Publication Publication Date Title
JPH01139237U (enExample)
JPS53131319A (en) Exhaust brake arrangement
JPS61138240U (enExample)
JPH0273995U (enExample)
JPS58144105U (ja) ダイヤフラム式バキユ−ムアクチユエ−タ
JPS62178686U (enExample)
JPH0410159U (enExample)
JPS527006A (en) Diaphragm pump
JPS63160408U (enExample)
JPS63102420U (enExample)
JPS6269364U (enExample)
JPS61106024U (enExample)
JPH03112863U (enExample)
JPH03182U (enExample)
JPH0220901U (enExample)
JPS53132615A (en) Exhaust reflux control system
JPS57143186A (en) Sealing means of compressor
JPH02110883U (enExample)
JPS61184171U (enExample)
JPS62144540U (enExample)
JPS5987841U (ja) 人工蘇生器
JPH01174918U (enExample)
JPH0357396U (enExample)
JPS63147813U (enExample)
JPH01141379U (enExample)