JPS61138040A - Clean working room - Google Patents

Abstract

PURPOSE:To simplify the fixing working of a clean unit and lighting lamp and the like at a layout changing by a method wherein a grille size of a grille- shaped frame body hung down from a ceiling part is formed as same as the fixing surface sizes of a clean unit, a lighting lamp and the like. CONSTITUTION:A grille-shaped frame body 2 is hung down with bolts 3 from the under surface of a ceiling part 25a in a clean working room. A ceiling part clean unit 4 for blowing-off a clean air is supported on a passage part 26a of the grille part of the frame body 2. Working part clean units 4h, 4g and 4f for blowing-off the clean air into a working space 26b are supported by supports arranged on a floor. Those working part clean units and the frame body 2 are closed by a connecting plate 15. A lighting lamp is fitted at the grille part of the frame body 2. At the layout changing, only the location chang ing of clean unite for working and ceiling part is required.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a clean work room (clean room) for creating a clean working environment, which is used in the semiconductor manufacturing industry, food manufacturing industry, drug manufacturing industry, and the like.

In the semiconductor manufacturing industry and other industries that use this type of clean room, technological progress is remarkable, and the layout within the clean room is frequently changed due to improvements and changes in production equipment and products, so it is easy to change the layout. There is a need to reduce equipment costs for creating and maintaining a clean work environment that can be handled at low cost.

[Conventional technology]

Conventionally, the structure of a clean room is as shown in Figures 3 and 4.
The structure shown in the figure is known. FIG. 3 is a sectional view of a conventional vertical laminar flow type Clean Roots.

In No. 3-, 1a is a dust-free building, and the floor 19a and ceiling 25a are perforated plates through which clean air can pass, and the floor plate 16 and top plate 17 are constructed to have a double structure. An air purifying filter 6a is provided between the top plate 17 and the ceiling Ill 25a so as to face the inside of the clean room, and an air supply port 9a from an air conditioner (not shown) is provided. floorboard 16
An exhaust port 20 is provided between the floor portion 19a and the floor portion 19a.

As shown by the dotted line arrow in the figure, the air blown from the air conditioner through the air supply port 9a is purified by the filter 6a, and is blown out from the entire ceiling through the top plate 17 into the clean room interior 25 as a laminar flow, and then through the floor plate 16. It is discharged from the exhaust port 20. As a result, dust generated from the production equipment 21, etc. is quickly discharged outside the room in a clean air flow, maintaining an almost uniform high level of cleanliness throughout the room, and all process operations can be performed in this clean space. That's what I do.

Next, FIG. 4 is a sectional view of a conventional tunnel-type clean room.

In Fig. 4, clean units 22, 22a +
22b houses a blower for blowing air and a filter for purifying the air blown from the blower. A stone lean unit 22a with a side plate 4.

22b are provided facing each other on the lower surface side of the ceiling part, and spaced apart from each other in the central part.The clean unit 22 is provided at a height such that a person can pass under it to form a tunnel-like cover. A predetermined width opening shall be made between the lower end of the side plate and the floor surface to allow air to be discharged. In a room surrounded by the tunnel-shaped cover and the floor surface on which it is installed, a working section 26b in which production equipment and the like are installed and a central passage section 26a are each provided continuously in the longitudinal direction of the tunnel-shaped cover. As indicated by dotted arrows, the clean unit 22 obtains air blown from an air supply port (not shown), and the clean units 22a and 22b obtain air blown from the outside of the side plate 4. The clean air blown from the clean unit 22 is sent to the passage section 26! The clean air blown from L Ic blowout, clean 22) 22a, 22b is discharged from the lower end of the working part 261)K blowout side plate island. In other words, air blown from the outside of the tunnel-shaped cover is sucked in, and the air purified by the filter is blown out to the inside of the tunnel-shaped cover. The air volume of clean units 22a and 22b is adjusted to
By setting the air flow rate to be larger than that in 2, it is possible to prevent wind from blowing from the passage section 26a to the working section 26b, and to quickly exhaust dust from production equipment, etc. to the outside of the room on the clean air flow. Part 2.61) maintain a high level of cleanliness.

[Problem that the invention seeks to solve]

However, in lean rooms like these, first of all, in the conventional example shown in Figure 3, clean air is blown out from the entire ceiling to maintain a high level of cleanliness throughout the room, so when changing the layout of the clean room interior. This problem can be easily dealt with by simply replacing the indoor production equipment or changing the equipment. However, because the cleanliness chart and the area to be air conditioned are wide and many expensive high-performance filters are used, the equipment cost is very high, and the running costs such as air conditioning maintenance costs and filter replacement costs are also high. I need. In addition, since the entire clean room is air-conditioned, it is possible to control the air-conditioning temperature for each root.

Next, the conventional example shown in Fig. 4 does not have the same problems as the conventional example shown in Fig. 3. However, each Clean Nine Knit is sold with the ceiling section processed, so if you want to change the layout, such as expanding a passageway or work area, you will need to make a one-way unit.

This required major modifications such as moving the working area and modifying the ceiling, resulting in problems such as the cost and time required for modification.

[Means for solving the problem j] The present invention suspends a lattice-shaped frame from the ceiling with hanging bolts, installs supports for supporting the work area clean unit at a predetermined position on the floor, and solves the above problems. A connection plate is provided between the upper end surface of the working section clean unit and the lower end surface of the frame body, the part facing the upper end surface of the working section clean unit, and the connecting plate is provided between the working section clean unit and the frame body. By blocking the grid to form a clean space, and making the lattice part of the frame and the mounting surface of the ceiling part Clean Enit, lighting lights, etc. the same size, it is easier to process the ceiling part when changing the layout,
This not only reduces processing costs and processing periods, but also reduces equipment costs and air conditioning maintenance costs, and allows air conditioning temperature control for each factory.

[Function] According to the present invention, the support having the working part clean unit is arranged in accordance with the layout change, the space between the working part clean unit and the frame is closed by the i-connection plate, and the working part clean unit is provided. Install lighting according to the placement of the pillar □゛ and the location of the passage.

A ceiling clean unit and the like are placed and hermetically supported by the frame.

〔Example〕

1 and 2 are configuration diagrams showing an embodiment of the present invention, FIG. 1 is a cross-sectional view of a clean work chamber which is an embodiment of the present invention, and FIG. 2 is a partial perspective view of the frame. It is a diagram.

1 and 2, a lattice-shaped frame 2 is suspended from a ceiling reed of a building 1 by hanging bolts 3 fixedly supported by a ceiling 215a Ic. Support legs are installed on the floor 19, and a floor plate 16 made of a perforated plate through which air can pass is placed on the support legs 8.

The clean unit No. 4h has a built-in blower 5 for blowing air and a filter 6 for cleaning the air blown from the blower 5, and has an air conditioning function that can adjust the blowing amount, blowing speed, temperature and humidity, etc. Clean 22) 4f, 4g
, 4h is a clean unit for the working section, which is supported by columns 11.11a and 111) and is provided at a position lower than the frame 2. Strut u + lla +11
1) The floor plate 16 of the part to be installed is removed and the floor part 19 is installed.
1C will be installed. The columns 11, lla, and llb may be arranged in an L-shape as they are, or may be fixed to the floor 19 with bolts. Pillar 11 + ll
After the installation of a +111), a perforated plate with a size that creates a gap at a predetermined distance from the pillar is installed on the part of the removed floorboard 16 to prevent vibrations from being transmitted to the floorboard when the pillar shakes. Good too.

Since the support is installed on the floor part 19, the installed part does not protrude into the work area and become an obstruction. Posts u, lla, 1l
bK rear plates 12, 12a, 12b are attached, and a connection plate 15 is attached between the clean units 4f, 4g, 4h for working parts and the frame 2 of the part facing this clean unit to form a clean space. . In this case, since the working part side is under positive pressure, there is no problem even if the connecting plate 15 is simply attached because external air will not flow in. In addition, when the work section clean unit is not installed, the frame 2. and the floorboard 16.

This partition plate 14 or back plate 2 + 12a.

121) becomes swamped on the board and creates turbulent flow, which spreads dust generated indoors or from adjacent contaminated areas, so a gear rally 13 is installed to ensure that the dust is quickly discharged outside the work area. K.

A lattice part of the frame body 2 and a Cree/unit 4 installed in this lattice part. Lighting lamp 10. Make the closing plate 71, inspection port 8°, air supply port 9, etc. the same size. As many clean units or illumination lights 10 as necessary for air purification are provided on the passage section 26a,
Others are closed by a closing plate 7. In addition to this, the lattice part of the frame 2 has an inspection port 8 which is opened and closed when inspecting the ceiling part. An air supply port 9 etc. is provided to suck in the air blown by the ceiling clean unit. A clean unit for the working section supported by a support is installed in accordance with the position and height of the working section, and a clean unit and illumination light are provided on the frame 2 in accordance with the width of the passage section 26a. Form a mold clean room.

Next, to explain the operation, clean 22) 4d
, 4e, 4f, 4g, the part surrounded by the pillars u and lla forms one clean space, and in the same way, the clean unit 4 + 4a + 4b + 4
c + 4h + lighting 10.

A portion surrounded by the pillar 11b and the partition plate 14 forms one clean space. First, in the first clean space, there are clean units for working sections) 4f, 4g to each working section 26.
Clean air is blown out to b, and the dust is carried on the clean air flow and discharged from the clean space through the entire floor plate 16 and gear gallery 13. Clean 22) 4f and 4g suck in air to be blown from the gap with the frame 2 or from the ceiling. Clean unit provided on frame 2) 4d.

4e sucks in air from the ceiling and the air supply port 9, and blows out clean air to the passage 26a. The blown clean air is discharged through the floor plate 16. Clean unit 4F,
The air volume of 4g should be greater than the air volume of Clean Units) 4d and 4e.

In the clean space of fang 2, the passage section 25a is wide,
Clean unit 4゜4a + 4 installed in frame 2
b + 4c sucks air from the ceiling and blows out clean air to the passage 26a. The blown clean air is sent to floorboard 1
It is discharged through 6. In order to raise the working part 26b of the clean unit 4h, the blower is attached to the side of the filter.
Air is sucked in from the side and sent to the working part 26bK as a vertical airflow through a filter. The clean air blown into the working section 26b is discharged through the floor plate 16. In this way, in the building 1, the clean unit sucks in air from outside the clean space, cleans it, blows out the clean air into the clean space, carries the clean air fig with dust, and discharges it to the outside of the clean space through the floor plate 16. Since each clean unit can adjust the blowing amount, blowing wind speed, temperature and humidity, etc., the blowing amount, temperature and humidity can be adjusted for each process.

In addition, when changing the layout due to changes in production equipment or products, the installation positions of the work section clean unit supported by the pillars and the ceiling clean unit installed on the frame must be adjusted accordingly. Just change it.

〔Effect of the invention〕

The present invention has a structure in which clean air is supplied to the working part and the passage part from separate clean units, and a lattice-shaped frame is suspended from the ceiling by hanging bolts, and a clean unit for the lattice part of the frame and the ceiling part is used. are the same size, a ceiling clean unit is installed according to the position and width of the passage, and a work area clean unit is supported by a support and installed on the floor, and the work area clean unit and this clean unit are installed in the same size. A clean room is created by closing the frame facing the space with a connecting plate to create a clean space, which reduces equipment costs, air conditioning maintenance costs, filter replacement costs, etc., and allows the air conditioning temperature to be controlled for each process. The effect is that relocation and expansion can be easily carried out in a short period of time and at low cost.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of a clean work room which is an embodiment of the present invention;
Fig. 2 is a partial perspective view of the frame, Fig. 3 is a sectional view of a conventional vertical laminar flow clean room, and Fig. 4 is a sectional view of a conventional tunnel type clean room. 2...Frame body, 4 + 4a, 4b * 4c +
4d, 4e, 4f. 4g, 4h ---Clean unit, 11. ll
a, ll'b...Strut, 15...Connection plate, 1
9, 19a...floor section. . Figure 2

Claims (1)

[Claims] 1) A lattice-shaped frame is suspended from the lower surface of the ceiling in a building that is intended to form a clean space, and a ceiling clean unit is supported by the frame that blows clean air into the passageway through which workers pass. A cleaning operation characterized in that a work area clean unit that blows clean air into the work area is supported by a support placed on the floor, and a connection plate closes the space between the work area clean unit and the frame. Room.