JPS61136544U - - Google Patents

Info

Publication number
JPS61136544U
JPS61136544U JP1995885U JP1995885U JPS61136544U JP S61136544 U JPS61136544 U JP S61136544U JP 1995885 U JP1995885 U JP 1995885U JP 1995885 U JP1995885 U JP 1995885U JP S61136544 U JPS61136544 U JP S61136544U
Authority
JP
Japan
Prior art keywords
ion etching
airtight container
semiconductor wafer
chuck mechanism
transfer plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1995885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1995885U priority Critical patent/JPS61136544U/ja
Publication of JPS61136544U publication Critical patent/JPS61136544U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1995885U 1985-02-13 1985-02-13 Pending JPS61136544U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1995885U JPS61136544U (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1995885U JPS61136544U (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Publications (1)

Publication Number Publication Date
JPS61136544U true JPS61136544U (enrdf_load_stackoverflow) 1986-08-25

Family

ID=30510009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1995885U Pending JPS61136544U (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Country Status (1)

Country Link
JP (1) JPS61136544U (enrdf_load_stackoverflow)

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