JPS61135021A - Method of manufacturing face panel - Google Patents

Abstract

PURPOSE:To improve productivity of a panel by forming light reflecting metal film inside the face panel of a color receiver tube through sputtering technique and then heat absorbing film through introducing a very small amount of nitrogen gas inside the panel tube. CONSTITUTION:Air inside a face panel 1 in which fluorescent layer 2 and a film layer 6 are formed is exhaused up to 2X10<-5>Torr vacuum by a vacuum pump system with an oil diffusion pump. Then, argon gas is introduced inside the face panel 1 maintaining gross pressure of 3X10<-5>Torr vacuum, and a sputtering work is carried out for about 15min using aluminum as a target metal to form an about 1,200Angstrom thick light reflecting aluminum metal film 7. Following these works, 5vol% of nitrogen gas relative to argon gas is introduced inside the panel 1 and the sputtering work is carried out for about 5min to form an about 1,200Angstrom thick black-colored heat absorbing film 8. With the above method, productivity of the face panel is improved.

Description

Detailed Description of the Invention [Technical Field of the Invention] The present invention relates to a first step of forming a light-reflecting metal film covering a phosphor layer/film layer formed on the inner surface of a face panel of a color picture tube. and a second step of forming a heat-absorbing material film thereon.

(The following explanation will be given on behalf of a shadow mask type color picture tube).

[Technical background of the invention and its problems]

In most color picture tubes currently on the market, three-color phosphors are formed on the inner surface of a 7-Ace panel using a thin iron plate called a shadow mask, in which rectangular or circular openings are perforated according to certain rules. Color separation is performed.

The figure is a schematic cross-sectional view of a main part showing an example of a collar receiver H tube.

In the figure, a color receiver 1 has a shadow mask 3 placed opposite a phosphor layer 2 coated on the inner surface V of a face panel 1, and an electron beam 5 emitted by a Kaiko gun 4. passes through minute apertures in the shadow mask 3 and impinges on the phosphor layer 2 corresponding to the apertures in the shadow mask 3, thereby projecting an image.

In this case, the transmittance of the resonant beam 5 passing through the aperture of the shadow mask 3 is about 15-30%, and the remaining 70-8%
The 5% electron beam 5 enters the shadow mask 3 and heats the shadow mask 3, causing thermal deformation. It is generally well known that as a result, a color difference 1 occurs in the projected image.

Therefore, in this type of color picture tube, in order to reduce this thermal deformation, a film layer 6 is provided on the phosphor layer 2 formed on the inner surface of the face panel 1 to protect the phosphor layer.
In addition to a light-reflecting metal film 7 for emitting light to the outside of the face panel 1, a heat-absorbing material film 8 is coated in this order.

The process of forming a light-reflecting metal film 7 on the phosphor layer 2 and film layer 6 is called metal backing process. Conventionally, metal para-young process is used to form a metal such as aluminum on the phosphor layer and the film layer 6.
The method Vζ was used for vapor deposition on the film layer surface.

On the other hand, the heat-absorbing material film 8 has conventionally been applied to the light-reflecting metal film 7 in Japanese Patent Application Laid-Open No. 53-85153 or Japanese Patent Application Laid-open No. 54-77.
Yotsuna 1O-121To proposed in Publication No. 568
A method of depositing a black metal film by a vacuum deposition method using RR, or JP-A-51-52782 or JP-A-5
It was formed by a method of spray coating a graphite powder dispersed paint directly on the light-reflecting metal film 7, as proposed in Japanese Patent No. 1-53454.

However, the method for forming the heat absorbing material film 8 described above is
Both include phosphor layer 2 and film layer 6 in the face panel.
It consists of two types of steps: a step of forming a light-reflective metal film 7t on top and a step of forming a heat-absorbing material film 8, or the pressure in the evaporation vacuum chamber is increased to 10-10% during formation of the metal reflective film. 'When forming a heat absorption film from around Torr, 10-
1~ITorrlC adjustment, etc., the manufacturing process of the face panel was complicated, and there was a problem of low productivity, so there was a strong desire to develop a simple and highly productive manufacturing method for the 7 Ace panel. .

[Purpose of the invention]

In the present invention, a light-reflecting metal film is formed on the inner surface of a seven-face panel of a color iron receiving tube by a sputtering method, and then a trace amount of nitrogen gas is introduced into a vacuum chamber to form a heat-absorbing material film. It is an object of the present invention to provide a manufacturing method, thereby increasing the productivity of face panels.

[Summary of the invention]

As a result of extensive research in order to achieve the above object, the present inventor has discovered that using a metal target in a gas at a specific degree of vacuum,
After forming a light-reflecting metal film on the phosphor layer and film layer by sputtering, a trace amount of nitrogen gas is added and sputtering is continued to form a black heat-absorbing film. It was discovered that the coated surface is a light-reflecting metal film, while the outer surface is a heat-absorbing material film, leading to the completion of the present invention.

That is, in the face panel manufacturing method of the present invention, after forming a phosphor layer and a film layer on the inner surface of the face panel of a color picture tube using a Nyadou mask, the inside of the 7Ace panel is heated at a vacuum level of 1o-4 to 10-'' Torr. The first step is to form a light-reflective metal film on the film layer by sputtering while maintaining a zero gas atmosphere, and then to form a heat-absorbing metal film by introducing a small amount of nitrogen gas into the system and performing sputtering. and a second step of forming a material film.

The present invention will be explained in more detail below.

Formation of the phosphor layer and film layer directly within the face panel can be performed by methods known to those skilled in the art. For example, in order to obtain a phosphor layer, first, on the inner surface of the 7-space panel,
A photosensitive phosphor coating liquid in which a known resin, photosensitizer, and phosphor powder are dispersed or dissolved in an aqueous or organic medium is applied, dried, and then photosensitive is applied through a shadow mask having a desired pattern. The phosphor coating is exposed to light to insolubilize the exposed areas. Next, the unexposed portions are removed with an aqueous or organic solvent to obtain a dot-like or stripe-like phosphor pattern. By repeating this procedure for each of the three colors of green and i-red phosphors, a three-color phosphor layer is formed on the inner surface of the face panel.

In this case, in advance, in the gaps between the phosphor dots or stripes,
A light absorption layer made of resin containing equal parts of graphite powder is provided to
You can also try to improve the contrast of the elephant.

Next, the surface of the phosphor layer is coated with an organic coating, for example, by lacquering, and dried to form a film layer.

A metal backing treatment is performed on the phosphor layer or film layer thus formed.

The main feature of the 7Ace panel manufacturing method of the present invention is that the metal backing treatment is performed by sputtering. According to sputtering according to the method of the invention,
The sputtered film surface on the film layer side becomes a light-reflective metal surface, and the sputtered film surface on the opposite side becomes a black heat-absorbing material surface, and as a result, the light-reflecting metal film and the heat-absorbing material film are separated. It can be easily formed.

For sputtering, vacuum level inside the face panel is 10″″4
The test is carried out while maintaining a zero gas atmosphere of ~10 −2 Torr and using a light-reflecting metal as a target. Normally, after the face panel has been evacuated to a vacuum level of 10-' Torr or less, a predetermined amount of gas is introduced to increase the vacuum level to 10-4 to 10'' Torr.
After replacing the face panel with the desired gas, the degree of vacuum is increased to 10-4 to 1.
It can also be evacuated to 0-'' Torr.

A rare gas such as helium, neon, argon, krypton, or xenon is usually used as the atmospheric gas for forming the light-reflective metal film in the first step. In order to form a heat-absorbing material film in the second step, 3 to 10 volumes of nitrogen, ammonia,
A gas mixture made by mixing a nitrogen-containing compound such as dicyanide or a compound that separates and generates nitrogen in the sputtering atmosphere is used, and these gas mixtures contain trace amounts of oxygen or carbon dioxide gas. Good too.

The type of atmospheric gas to be used is appropriately selected depending on the sputtering conditions, but it is preferable to use a rare gas that is inexpensive and easy to handle in the first step, and to use a rare gas and nitrogen in the second step. A mixture of gases is used, more preferably 3
A gas mixture consisting of ~10 volumes of nitrogen and 90-97% by volume of a rare gas is used. Nitrogen at such a blending ratio
The reason why a rare gas mixture is preferable is that if the richness of the rare gas component is less than 90% by volume or more than 97% by volume, it becomes difficult to form a black film on the surface of the uppermost layer.

In the first step of sputtering, the light reflective film thickness was 300 mm.
It is preferable to carry out the process until it reaches 2,000. Film thickness is 30
If it is less than 0', the light reflectivity is not necessarily sufficient.
Further, if the film thickness exceeds 2000λ, it becomes difficult for electron beams to pass through the film.

In the second step of sputtering, the thickness of the heat-absorbing film is 50 mm.
It is necessary to be thicker than 0λ. If it is less than 500λ, the heat absorbing property of the heat absorbing film will be insufficient.The total thickness of the light reflecting film and the heat absorbing film is preferably 3000× or less. This is because if it is more than that, it becomes difficult for electron beams to pass through the tube and its function as a cathode ray tube deteriorates.

〔Effect of the invention〕

The manufacturing method of the 7Ace panel of the present invention involves forming a light-reflecting metal film on the inner surface of the face panel (first step) and forming a heat-absorbing material film (second step), which conventionally required two steps. There is an advantage that step (1) can be easily performed by introducing a small amount of nitrogen gas after the first step using the sputtering method, and the effect is that it is simple and has high productivity.

[Persimmon example of invention]

Hereinafter, the method of the present invention will be explained in detail with reference to Examples.

Example 1 A face panel with a phosphor layer and a film layer formed on the inner surface was connected to a vacuum pump using an oil diffusion pump at 9V.
The vacuum was evacuated to 2XlO-2 Torr by c. Afterwards, argon gas was introduced into the face panel to maintain the total pressure at 3X10"-2 Torr, and sputtering was performed for 15 minutes using aluminum as a target.
A light-reflecting aluminum metal film having a thickness of approximately 1200 mm was formed on the film layer.

Next, in addition to argon gas, nitrogen gas was introduced into the face panel so as to account for 5% by volume of the argon gas, and sputtering was performed for about 8 minutes to form a black heat-absorbing film of about 1,200 mm.

When the film layer and the above-mentioned black film formed on the film layer were peeled off from the thus produced facet funnel, the surface of the black film in contact with the film became a mirror surface with a light-reflective metallic luster. . That is, in the film formed on the film layer, the surface on the film layer side was in the form of a light-reflecting metal film, and the surface on the opposite side was a bifacial film exhibiting black color. The face panel on which the phosphor layer and film layer were formed was connected to a vacuum pump that also uses an oil diffusion pump and evacuated to a vacuum level of 4 X 10" Torr. After that, argon gas was injected into the face panel to 3 X 10" Torr.
It was introduced at a pressure of rr. Sputtering is performed for 10 minutes using aluminum metal as a target to a thickness of approximately 5ooX.
, a light-reflective aluminum metal film was formed.

Next, the argon gas was stopped, nitrogen gas was introduced into the face panel from another inlet, and the respective gases were mixed to a partial pressure of 1.5 x 10-' Torr and argon gas f285 x 10-' Torr, and the total pressure was increased. 3 x 10-'
Installed with Torr.

Sputtering was performed for 14 minutes using aluminum metal as a target, and a thickness of about 2100 mm was deposited on the light reflective metal film.
When the black film layer was peeled off from the face panel manufactured in this way with a black film formed on the outer surface, the film formed on the film layer was exposed to light directly on the film side. It became a reflective metal film, and the opposite surface was covered with a black bifacial film.

Examples 3-7 Table 1 shows examples in which a light-reflecting aluminum metal film and a black heat-absorbing film were formed in the same manner as in Example 1.

In each case, when the film layer and the black film formed thereon were peeled off from the manufactured 7Ace panel, the surface of the black film in contact with the film became a surface with a light-reflective metallic luster. That is, the film formed on the film layer had a light-reflecting metal film on the film layer side, and a black bifacial film on the opposite surface.

trochanteric margin Table 1 1,000,000 horrors

[Brief explanation of the drawing]

The drawing is a schematic cross-sectional view of a main part showing an example of a collar receiver 1 tube. 1... Face panel, 2... Fluorescent layer, 3...
Shadow mask, 4... Electron gun, 5... Electron beam, 6... Film layer, 7... Light reflective metal film, 8...
...Heat-absorbing material film. Agent Patent attorney Kensuke Chika (1 other person)

Claims (3)

[Claims] (1) After forming a phosphor layer and a film layer on the inner surface of the face panel of shadow mask type and aperture grill type color picture tubes, vacuum the inside of the face panel to a degree of vacuum of 10^-.
A first step of forming a light-reflecting aluminum metal film on the film layer by sputtering while maintaining a zero gas atmosphere of ^4 to 10^-^2 Torr, and forming a heat-absorbing material film. A method for manufacturing a face panel, comprising a second step. (2) The gas in the first step is an argon gas atmosphere,
and the gas in the second step is 3 to 10% by volume of nitrogen and 90 to 10% by volume of nitrogen.
The method for manufacturing a face panel according to claim 1, comprising a gas mixture of 97% by volume of rare gas. (3) The method for manufacturing a face panel according to claim 1, wherein the sputtering is performed using a metal substantially consisting of aluminum as a target.