JPS60195837A - Manufacture of face panel - Google Patents

Abstract

PURPOSE:To heighten the productivity of face panels by a method, in which a phosphor layer and a film layer are formed on the inside of the face panel followed by maintaining the face panel inside in a gas atmosphere of a specific vacuum degree and performing sputtering for simultaneously fomring a luminous reflective metal film and a thermoabsorbing material film on the film layer. CONSTITUTION:Sputtering maintains the inside of a face panel 1 in a gas atmosphere of a vacuum degree 10<-4>-10<-2>Torr while being performed with a luminous reflective metal as a target. Generally, a mixture gas of rare gas such as helium, neon, argon, krypton and xenon and a nitric compound such as nitorgen, ammonia and dicyan or a compound separating and generating nitrogen under said sputtering atmosphere is used as the atmosphere gas. The kind of the atmospheric gas is properly selected according to a sputtering condition, however, desirably a mixture gas of nitrogen gas and rare gas, which are cheap and easy to handle, is used while more desirably mixture gas consisting of 3-10vol% of nitrogen and 90-97vol% of rare gas is used. Sputtering is desirably performed until the sputtering film thickness reaches 500-5,000Angstrom .

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method in which a light-reflecting metal film and a heat-absorbing material film are used to cover a phosphor layer and a film layer formed on the inner surface of a face panel of a color picture tube. The present invention relates to a method for manufacturing a face panel that is simultaneously formed in a process.

[Technical background of the invention and its problems]

Most power 2-picture tubes currently on the market use three-color phosphors formed on the inner surface of the face panel using a thin iron plate called a shadow mask in which rectangular or circular openings are perforated according to a certain rule. Color separation is performed.

The figure is a schematic cross-sectional view of essential parts showing an example of a color picture tube.

In the figure, a color picture tube has a shadow mask 3 facing a phosphor layer 2 coated on the inner surface of a face panel 1.
is arranged, and the electron beam 5 emitted from the electron gun 4 passes through the fine aperture of the shadow mask 3 and strikes the phosphor layer 2 corresponding to the aperture of the shadow mask 3 to project an image. .

In this case, the transmittance of the electron beam 5 passing through the aperture of the shadow mask 3 is about 15-30X, and the remaining 70-8X
The 5% electron beam 5 enters the shadow mask 3 and heats the shadow mask 3, causing thermal deformation. It is generally well known that as a result of this, color shifts occur in the nine images that are projected.

Therefore, in this type of color picture tube, in order to reduce this thermal deformation, a film layer 6 is provided on the phosphor layer 2 formed on the inner surface of the face panel 1 to protect the phosphor layer.
In addition to a light-reflecting metal film 7 for emitting light to the outside of the face panel 1, a heat-absorbing material film 8 is coated in this order.

The process of forming the light-reflective metal film 7 on the phosphor layer 2 and film layer 6 is called metal backing process. Conventionally, metal backing process involves forming a metal such as aluminum on the phosphor layer and the film layer 6.
A method was used in which the film was deposited on the surface of the film layer.

On the other hand, the heat-absorbing material film 8 is conventionally formed by vapor-depositing a black metal film on the light-reflecting metal film 7, or by a method disclosed in JP-A-51-52
It was formed by a method of directly spraying graphite powder dispersed paint onto the light-reflecting metal film 7, as proposed in Japanese Patent Application Laid-open No. 782 or Japanese Patent Application Laid-Open No. 51-53454.

However, the method for forming the heat absorbing material film 8 described above is
In both cases, phosphor layer 2° film layer 6 in 7 ace panel
Since it consists of two processes: the process of forming the light-reflective metal film 7t on top, and the process of forming the heat-absorbing material [8], the manufacturing process of the face panel is complicated and the productivity is low. was there. For this reason, there has been a strong desire to develop a method for manufacturing face panels that is simple and highly productive.

[Purpose of the invention]

The present invention provides a method for manufacturing a face panel in which a light-reflecting metal film and a heat-absorbing material film are simultaneously formed on the inner surface of the face panel of a color picture tube in one step, thereby increasing the productivity of the face panel. With the goal.

[Summary of the invention]

As a result of extensive research in order to achieve the above object, the present inventor has discovered that using a metal target in a gas at a specific degree of vacuum,
41 When sputtering is performed to form a film on the light body layer and the film layer, the surface of the core film outside the film layer becomes a light-reflective metal film.

The present invention was completed by discovering that the outer surface is a film of heat-absorbing material.

That is, the method for manufacturing a face panel of the present invention is as follows.

Fusing a shadow mask type color picture tube (after forming a phosphor layer and a film layer on the inner surface of the panel) 2 Maintaining the inside of the Ace panel in a gas atmosphere with a vacuum level of 10-/10 Torr and performing sputtering. In step 1-**, a light-reflecting metal film and a heat-absorbing material film are simultaneously formed on the film layer.

The present invention will be explained in more detail below.

The formation of the phosphor layer and film layer on the inner surface of the face panel can be performed by methods known to those skilled in the art. For example, in order to obtain a phosphor layer, first, on the inner surface of the face panel,
A photosensitive phosphor coating liquid in which a known resin, photosensitizer, and phosphor powder are dispersed or dissolved in an aqueous or organic medium is applied, dried, and then photosensitive is applied through a shadow mask having a desired pattern. The phosphor coating is exposed to light to insolubilize the exposed areas. Next, the unexposed portions are removed with an aqueous or organic solvent to obtain a dot-like or stripe-like phosphor pattern. This kind of operation can be performed using three colors, green, blue, and red.
By repeating the colored phosphors, three colored phosphor layers are formed on the inner surface of the face panel.

In this case, in advance, in the gaps between the phosphor dots or stripes,
It is also possible to provide a light absorption layer made of a resin containing graphite powder or the like to improve the contrast of the image.

Next, an organic coating film is applied, for example, by lacquering, to the surface of the phosphor layer and dried to form a film layer.

A metal backing treatment is performed on the phosphor layer or film layer thus formed.

The main feature of the face panel manufacturing method of the present invention is that the metal backing treatment is performed by sputtering. According to sputtering according to the method of the invention,
The sputtered film surface on the film layer side becomes a light-reflective metal surface, and the sputtered film surface on the opposite side becomes a black heat-absorbing material surface, and as a result, the light-reflecting metal film and the heat-absorbing material film are separated. It will be formed in one step.

Sputtering is performed while maintaining the inside of the face panel in a gas atmosphere with a degree of vacuum of 4 io to 10 Torr, using a light-reflecting metal as a target. Normally, after the face panel is evacuated to a vacuum level of 10 Torr or less, a predetermined amount of gas is introduced and sputtering is performed while maintaining the vacuum level at 10-4 to 1 f2 Torr.However, the face panel is replaced with the desired gas. After that, the vacuum degree can be evacuated to 410 to 10 Torr.

The atmospheric gas is usually a rare gas such as helium, neon, argon, krypton, or xenon.

A gas mixture with a nitrogen-containing compound such as nitrogen, ammonia, or dicyanide, or a compound that separates and generates nitrogen in the sputtering atmosphere is used, and these gas mixtures may contain trace amounts of oxygen or carbon dioxide gas, etc. . The type of atmospheric gas to be used is appropriately selected depending on the sputtering conditions, but preferably a mixture of nitrogen gas and rare gas is used, which is inexpensive and easy to handle, and more preferably '#i3
A gas mixture consisting of ~10 volumes of nitrogen and 90-97 volumes of noble gas is used. Nitrogen at such a blending ratio -
A rare gas mixture is preferable because if the content of the rare gas component is less than 90 vol., a light-reflecting metal film cannot be obtained on the surface of the film layer, whereas if it exceeds 97 vol. This is because it becomes difficult to obtain a black film on the surface of the upper layer.

Sputtering has a sputtering film thickness of 500 to 50
It is preferable to carry out the process until it reaches 00X. If the film thickness is less than 500X, the heat absorbing property of the heat absorbing film will be insufficient.
Further, if the film thickness exceeds 500 mm, it becomes difficult for electron beams to pass through the film, and the function as a cathode ray tube deteriorates.

〔Effect of the invention〕

The face panel manufacturing method of the present invention has the advantage that the formation of a light-reflecting metal film and the formation of a heat-absorbing material film on the inner surface of the face panel, which conventionally required two steps, can be performed simultaneously in one step. It has the effect of being simple and highly productive.

[Embodiments of the invention]

Hereinafter, the method of the present invention will be explained in detail with reference to Examples.

Example 1 A vacuum level of 2 x 10 Torr was achieved by connecting a face panel with a phosphor layer and a film layer formed on the inner surface to a vacuum 5 bonder using an oil diffusion pump.
was exhausted. After that, argon gas containing 5 volumes of nitrogen gas was introduced into the face panel to bring the total pressure to 4.5.
While maintaining the temperature at X 10 Torr, sputtering was performed using aluminum metal as a target for 5 minutes to form a film having a thickness of about 20,000 mm and a black outer surface on the film layer.

When the film layer and the black film formed thereon were peeled off from the face panel thus produced, the surface of the black film in contact with the film was a mirror surface with a light-reflective metallic luster. That is, the film formed on the film layer had a bifacial film, with the surface on the film layer side having the shape of a light-reflecting metal film and the surface on the opposite side exhibiting black color.

Example 2 A face panel having a phosphor layer and a film layer formed on its inner surface was connected to a vacuum bonder using an oil diffusion pump and evacuated to a vacuum level of 4×10 Torr. Afterwards, inject nitrogen gas at 1.5 x 4 10 Torr and argon gas at 2.85 x 10 Torr into the face panel.
The total pressure of each gas is 3X10 Torr so that the partial pressure is 3 Torr.
It was introduced in Sputtering was performed for 51 minutes using aluminum metal as a target, and a thickness of approximately 20,001 mm was deposited on the film layer. A black film was formed on the outer surface.

The film layer and the black coating were peeled off from the face panel manufactured in this manner.

The film formed on the film layer was a bifacial film in which the film-side surface was a light-reflective metal film and the opposite surface was black.

Test Example Sputtering was carried out in the same manner as in Example 1, except that a mixed gas atmosphere of nitrogen gas and argon gas with the blending ratio shown in the following table was used under conditions of a total pressure of 4.5 x 10 Torr to form a sputtered film. investigated the properties of The results are shown in the table.

From the results in the table, it can be seen that a gas mixture of 3 to 10 volumes of methane and 90 to 97 volumes of rare gas is suitable as the gas used in the method of the present invention.

As described above, it was confirmed that the face panel manufacturing method of the present invention is simpler and more productive than conventional methods.

[Brief explanation of drawings]

The figure is a schematic cross-sectional view of essential parts showing an example of a color picture tube. 1...Face panel, 2...11 light layer, s...
- Shadow mask, 4... Electron gun, 5... Electron beam, 6... Film layer, 7... Light reflective metal film, 8
...Heat-absorbing material film.

Claims (3)

[Claims] (1) After forming a phosphor layer and a film layer on the inner surface of the face panel of a shadow mask type color picture tube, the interior of the face panel is maintained in a zero gas atmosphere with a degree of vacuum of 10 to 1 O-2 Torr, and sputtering is performed to form the phosphor layer and film layer. - A method for producing a face panel, which comprises simultaneously forming a light-reflecting metal film and a heat-absorbing material film on an ilm layer. (2) Gas is 3-10% nitrogen and 90-97% by volume
The manufacturing method according to claim 1, comprising a mixture of rare gases. (3) The manufacturing method according to claim 1, wherein the sputtering is performed using a metal substantially consisting of aluminum as a target.