JPS61134882U - - Google Patents
Info
- Publication number
- JPS61134882U JPS61134882U JP1827085U JP1827085U JPS61134882U JP S61134882 U JPS61134882 U JP S61134882U JP 1827085 U JP1827085 U JP 1827085U JP 1827085 U JP1827085 U JP 1827085U JP S61134882 U JPS61134882 U JP S61134882U
- Authority
- JP
- Japan
- Prior art keywords
- pad
- conduit
- vacuum chuck
- pin
- negative pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1827085U JPS61134882U (fr) | 1985-02-12 | 1985-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1827085U JPS61134882U (fr) | 1985-02-12 | 1985-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61134882U true JPS61134882U (fr) | 1986-08-22 |
Family
ID=30506747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1827085U Pending JPS61134882U (fr) | 1985-02-12 | 1985-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61134882U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013193191A (ja) * | 2012-03-22 | 2013-09-30 | Toshiba Corp | 吸着装置、電子部品の製造装置、及び、電子部品の製造方法 |
-
1985
- 1985-02-12 JP JP1827085U patent/JPS61134882U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013193191A (ja) * | 2012-03-22 | 2013-09-30 | Toshiba Corp | 吸着装置、電子部品の製造装置、及び、電子部品の製造方法 |