JPS61134882U - - Google Patents
Info
- Publication number
- JPS61134882U JPS61134882U JP1827085U JP1827085U JPS61134882U JP S61134882 U JPS61134882 U JP S61134882U JP 1827085 U JP1827085 U JP 1827085U JP 1827085 U JP1827085 U JP 1827085U JP S61134882 U JPS61134882 U JP S61134882U
- Authority
- JP
- Japan
- Prior art keywords
- pad
- conduit
- vacuum chuck
- pin
- negative pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案の一実施例の縦断側面図、第２
図は第１図のものの動作説明図である。
１…導管、４…ピン、６…パツド、７…真空チ
ヤツク、８…物体、Ｐ…負圧。
Fig. 1 is a longitudinal cross-sectional side view of one embodiment of the present invention;
This figure is an explanatory diagram of the operation of the one shown in FIG. 1... Conduit, 4... Pin, 6... Pad, 7... Vacuum chuck, 8... Object, P... Negative pressure.
Claims (1)
を物体に当接させた状態で前記導管に負圧を供給
して前記物体を前記パツドに吸着する真空チヤツ
クにおいて、前記物体が前記パツドに吸着された
状態では該物体によつて端部が押圧されるピンを
前記導管内に弾性的に支承したことを特徴とする
真空チヤツク。 In a vacuum chuck in which a pad is attached to the tip of a conduit and the pad is in contact with an object, negative pressure is supplied to the conduit to attract the object to the pad, and the object is attracted to the pad. A vacuum chuck characterized in that a pin is elastically supported in the conduit, the end of which is pressed by the object in the state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1827085U JPS61134882U (en) | 1985-02-12 | 1985-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1827085U JPS61134882U (en) | 1985-02-12 | 1985-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61134882U true JPS61134882U (en) | 1986-08-22 |
Family
ID=30506747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1827085U Pending JPS61134882U (en) | 1985-02-12 | 1985-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61134882U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013193191A (en) * | 2012-03-22 | 2013-09-30 | Toshiba Corp | Suction device, device for manufacturing electronic component, and method of manufacturing electronic component |
-
1985
- 1985-02-12 JP JP1827085U patent/JPS61134882U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013193191A (en) * | 2012-03-22 | 2013-09-30 | Toshiba Corp | Suction device, device for manufacturing electronic component, and method of manufacturing electronic component |