JPS6113455U - 電子線用偏向電極支持装置 - Google Patents

電子線用偏向電極支持装置

Info

Publication number
JPS6113455U
JPS6113455U JP9770884U JP9770884U JPS6113455U JP S6113455 U JPS6113455 U JP S6113455U JP 9770884 U JP9770884 U JP 9770884U JP 9770884 U JP9770884 U JP 9770884U JP S6113455 U JPS6113455 U JP S6113455U
Authority
JP
Japan
Prior art keywords
support device
electrode support
electron beam
deflection electrode
holders
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9770884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0446364Y2 (enrdf_load_stackoverflow
Inventor
美雄 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP9770884U priority Critical patent/JPS6113455U/ja
Publication of JPS6113455U publication Critical patent/JPS6113455U/ja
Application granted granted Critical
Publication of JPH0446364Y2 publication Critical patent/JPH0446364Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP9770884U 1984-06-29 1984-06-29 電子線用偏向電極支持装置 Granted JPS6113455U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9770884U JPS6113455U (ja) 1984-06-29 1984-06-29 電子線用偏向電極支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9770884U JPS6113455U (ja) 1984-06-29 1984-06-29 電子線用偏向電極支持装置

Publications (2)

Publication Number Publication Date
JPS6113455U true JPS6113455U (ja) 1986-01-25
JPH0446364Y2 JPH0446364Y2 (enrdf_load_stackoverflow) 1992-10-30

Family

ID=30657265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9770884U Granted JPS6113455U (ja) 1984-06-29 1984-06-29 電子線用偏向電極支持装置

Country Status (1)

Country Link
JP (1) JPS6113455U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0486620U (enrdf_load_stackoverflow) * 1990-11-30 1992-07-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0486620U (enrdf_load_stackoverflow) * 1990-11-30 1992-07-28

Also Published As

Publication number Publication date
JPH0446364Y2 (enrdf_load_stackoverflow) 1992-10-30

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