JPS61134042A - Equipment for manufacturing semiconductor device - Google Patents

Equipment for manufacturing semiconductor device

Info

Publication number
JPS61134042A
JPS61134042A JP25588484A JP25588484A JPS61134042A JP S61134042 A JPS61134042 A JP S61134042A JP 25588484 A JP25588484 A JP 25588484A JP 25588484 A JP25588484 A JP 25588484A JP S61134042 A JPS61134042 A JP S61134042A
Authority
JP
Japan
Prior art keywords
bending
semiconductor device
lead frame
semiconductor devices
mold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25588484A
Other languages
Japanese (ja)
Inventor
Masao Matsumoto
松本 征夫
Seiichi Kawamoto
川本 誠一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP25588484A priority Critical patent/JPS61134042A/en
Publication of JPS61134042A publication Critical patent/JPS61134042A/en
Pending legal-status Critical Current

Links

Landscapes

  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To enable common use independently of the difference in the number of continuous connection, and to reduce the number of ascent-descent times of dies and bending bases, by a method wherein dies and bending bases are arranged each by 2N+1 pieces at equal pitches with respect to the minimum number N of continuous connection of the titled devices. CONSTITUTION:In the case of separating semiconductor devices from a lead frame with the continuous connection of the minimum number N of semiconductor devices and of bending leads, the minimum number N of the lead frame connections are stored each in two magazines 13a and 13b, and these magazines 13a and 13b are set up in front of the lower dies 11. At the time of this set-up, the lower die 11b and upper die, the lower bending die and upper bending die which are located at the center are put in the state out of use. Lead frames are taken out of each magazine 13a, 13b by operating feed pawls 15. A lead frame is positioned and fixed on the lower die, and semiconductor devices are separated from the lead frame by lowering the upper die. Then, each semiconductor device is fed onto the lower bending base by the feed pawls, and leads of the semiconductor device are bent downward by lowering the upper bending base.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は半導体装置の製造装置に係り、特にリードフレ
ームから半導体装置を切り離すと共に、リードを折曲げ
るのに使用される装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an apparatus for manufacturing a semiconductor device, and more particularly to an apparatus used for separating a semiconductor device from a lead frame and bending a lead.

(発明の技術的背景とその問題点) 第5図は半導体装置の製造工程におけるリードフレーム
21の斜視図である。このリードフレーム21の長手方
向にはタイバー25で支持されたベッド22が所定間隔
で形成され、各ベッド22上にチップ23がマウントさ
れている。そして、チップ23の電極と各リード24の
間には金等からなる細線(図示せず)が配線されてワイ
ヤボンディングがなされ、次いで、チップ、細線の部分
を樹脂モールドしてパッケージとなすことで、−のリー
ドフレームに複数の半導体装置が連設される。従って、
樹脂モールド終了後タイバー25およびリード24を所
定長さに切断しリードフレームから各半導体装置を切り
離す必要がある。このため、従来は第3図および第4図
に示す装置が使用されでいる。
(Technical background of the invention and its problems) FIG. 5 is a perspective view of the lead frame 21 in the manufacturing process of a semiconductor device. Beds 22 supported by tie bars 25 are formed at predetermined intervals in the longitudinal direction of this lead frame 21, and chips 23 are mounted on each bed 22. Then, thin wires (not shown) made of gold or the like are wired between the electrodes of the chip 23 and each lead 24 for wire bonding, and then the chip and the thin wires are molded with resin to form a package. , - A plurality of semiconductor devices are arranged in series on lead frames. Therefore,
After resin molding is completed, it is necessary to cut the tie bars 25 and leads 24 to a predetermined length to separate each semiconductor device from the lead frame. For this reason, devices shown in FIGS. 3 and 4 have conventionally been used.

第3図は半導体装置がN個(図では5個)連設された場
合に使用′される装置、第4図は2N個(図では10個
)連設された場合に使用される装置の平面図である。こ
れらの図において、半導体装置が連設されたリードフレ
ームはマガジン2および7内に収納されており、マガジ
ン2に対して送り爪1および6が前進することでリード
フレームが1枚ごとに下金型3および8上に送り出され
る。そして、上金型(図示せず)が下降して下金型3お
よび8との共働作用で半導体装置をリードフレームから
切り離し、さらに送り爪の進退で切り離された半導体装
置を自白4および9上に送り出し、曲台上でリードを所
定方向、例えば下方に折曲し、スティック5および10
内に収納するものである。
Figure 3 shows a device used when N (5 in the figure) semiconductor devices are connected, and Figure 4 shows a device used when 2N (10 in the figure) semiconductor devices are connected in a row. FIG. In these figures, lead frames on which semiconductor devices are connected are housed in magazines 2 and 7, and as feed claws 1 and 6 move forward with respect to magazine 2, the lead frames are moved one by one to the bottom metal. Pour onto molds 3 and 8. Then, the upper mold (not shown) descends and works together with the lower molds 3 and 8 to separate the semiconductor device from the lead frame. Bend the reed in a predetermined direction, for example, downward, on the bending table, and then
It is to be stored inside.

しかしながら、このような装置は半導体装置の連設数に
応じた金型1曲台を有する夫々の装置が必要であり、こ
れらは共用できないため装置の数が増加し、その製作費
も増加している。このような連設数はNに対し2Nにな
っていることが多い。
However, such equipment requires separate equipment with one mold stand for each number of semiconductor devices to be connected, and since these cannot be shared, the number of equipment increases and the manufacturing cost increases. There is. The number of such consecutive connections is often 2N.

又、共用性がないため、Nil連設されたリードフレー
ムから2N個連設されたリードフレームに移行する際に
は金型および自白をその都度セットし直さなければなら
ず作業効率が劣る。さらに、金型と自白の昇降回数も多
く、不良率の発生が多いという問題点がある。
In addition, since there is no commonality, when transitioning from a lead frame in which Nil leads are connected to a lead frame in which 2N lead frames are connected, the molds and blanks must be reset each time, resulting in poor work efficiency. Furthermore, there is a problem in that the mold and the mold have to be moved up and down many times, resulting in a high rate of defectives.

〔発明の目的〕[Purpose of the invention]

本発明は、上記事情を考慮してなされたもので、半導体
装置の連設数の相異に関係なく共用が可能で、しかも金
型や自白の昇降回数を減少させることのできる半導体装
置の製造装置を提供することを目的とする。
The present invention has been made in consideration of the above-mentioned circumstances, and is capable of manufacturing a semiconductor device that can be used in common regardless of the number of semiconductor devices installed in series, and that can reduce the number of times a mold or a mold is raised and lowered. The purpose is to provide equipment.

(発明の概要) 上記目的を達成するため、本発明による製造装置は、半
導体装置の連設数の最小値Nに対して、金型および自白
を2N+1等ピッチで配設し、N個連設されたリードフ
レームを加工する場合は中央の金型および自白を不使用
としてマガジンを2基セツトし、又、2N個達設された
リードフレームを加工する場合は右又は左の端部に位置
した金型および自白を不使用とすることで、N連および
2N運のいずれのリードフレームに対しても作業を可能
にするものである。
(Summary of the Invention) In order to achieve the above object, the manufacturing apparatus according to the present invention arranges molds and molds at an equal pitch of 2N+1 for the minimum number N of the number of consecutively installed semiconductor devices. When processing a lead frame with 2N pieces installed, set two magazines without using the central mold and confession, and when processing a lead frame with 2N pieces installed, set two magazines at the right or left end. By not using molds or blanks, it is possible to work on both N-strand and 2-N lead frames.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を図面に基づいて説明する。 Hereinafter, one embodiment of the present invention will be described based on the drawings.

第1図は本発明の一実施例の製造装置を示す平面図であ
り、上金型および上曲台を省略しである。
FIG. 1 is a plan view showing a manufacturing apparatus according to an embodiment of the present invention, with an upper mold and an upper bending table omitted.

この実施例においては、リードフレームに連設される半
導体装置の最小値Nが5個であり、下金型11は2N+
1、すなわち11基遍設されている。
In this embodiment, the minimum number N of semiconductor devices connected to the lead frame is 5, and the lower mold 11 is 2N+
1, or 11, are installed everywhere.

従って、図示しない上金型も同数の11基配設され、上
金型の下降で下金型上に載置されたリードフレームから
半導体装置が切り離されるものである。又、切り離され
た半導体装置のリードを折曲る下曲台12および上曲台
(図示せず)も2N+1、すなわち11基配設されてお
り、半導体装置はこの加工終了後にスティック14内に
収納されるようになっている。
Therefore, the same number of eleven upper molds (not shown) are also provided, and the semiconductor device is separated from the lead frame placed on the lower mold by lowering the upper mold. In addition, 2N+1, that is, 11 lower bending tables 12 and upper bending tables (not shown) are provided for bending the leads of the separated semiconductor devices, and the semiconductor devices are stored in the stick 14 after the processing is completed. It is supposed to be done.

このような装置により、半導体装置が最小値N個連設さ
れたリードフレームから半導体装置の切り離しおよびリ
ードの折曲げを行なう場合を説明する。2基のマガジン
13aおよび13b内には最小連設数Nのリードフレー
ムが収納されており、これらのマガジン13aおよび1
3bを下金型11の前方にセットする。このセット時に
あっては、中央に位置した下金型11bおよび上金型(
図示せず)、下曲台12bおよび上曲台(図示せず)を
不使用状態とする。そして、送り爪15を作動させて、
各マガジン13a、13bからリードフレームを取り出
し、下金型上にリードフレームを位置決め、固定し、上
金型を下降させてリードフレームから半導体装置を切り
離す。次いで、送り爪により各半導体装置を下凸台上に
送り、上曲台の下降で半導体装置のリードをF方に折曲
させ、スティック14内に収納する。従って、リードフ
レームが最小の連設数Nの場合には、中央に位置した金
型および自白を使用しないようにマガジンをセットすれ
ばよく、金型および自白の1回の昇降で2枚のリードフ
レームから半導体装置を切り離すことができる。
A case will be described in which, using such an apparatus, a semiconductor device is separated from a lead frame in which a minimum number of N semiconductor devices are arranged in series, and the leads are bent. The two magazines 13a and 13b accommodate a minimum number of N lead frames, and these magazines 13a and 1
3b is set in front of the lower mold 11. During this setting, the lower mold 11b located in the center and the upper mold (
(not shown), the lower bending table 12b, and the upper bending table (not shown) are left unused. Then, operate the feed claw 15,
A lead frame is taken out from each magazine 13a, 13b, the lead frame is positioned and fixed on the lower mold, and the upper mold is lowered to separate the semiconductor device from the lead frame. Next, each semiconductor device is sent onto the lower convex table by the feed claw, and the lead of the semiconductor device is bent in the F direction by lowering the upper bending table and stored in the stick 14. Therefore, when the minimum number of lead frames is N, it is sufficient to set the magazine so as not to use the mold and the blank located in the center, and it is sufficient to set the magazine so that the mold and the blank located in the center are not used. The semiconductor device can be separated from the frame.

次に、第2図は半導体の連設数が2Nのリードフレーム
を加工する場合を示している。この場合には、右端部に
位置した下金型11aおよび上金型、下曲台12aおよ
び上曲台を使用しないようにマガジン16をセットすれ
ばよく、後工程は前述と同様であるので省略する。この
場合、右端部に位置した金型と回合を不使用としないで
、左端部に位置した金型と回合を不使用状態とするよう
にマガジンのセットを行なってもよい。
Next, FIG. 2 shows the case of processing a lead frame in which the number of semiconductors connected in series is 2N. In this case, it is sufficient to set the magazine 16 so that the lower mold 11a and upper mold located at the right end, the lower bending table 12a and the upper bending table are not used, and the post-process is the same as described above, so it is omitted. do. In this case, the magazine may be set so that the mold and the rotation located at the left end are not used, instead of the mold and the rotation located at the right end.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明によれば、半導体装置の連
設数の最小INに対して金型および回合を等ピッチで2
N+1個配設し、リードフレームの連設数に応じて中央
又は端部に位置した金型および回合を使用しないで半導
体装置のリード切り離しとリードの折曲を行なうように
したので、連設数Nあるいは2Nのいずれのリードフレ
ームにも使用することができる。このため、1台の装置
で多種のリードフレームに適用することができ、装置の
設置数を減少させることができると共に金型と回合のセ
ット直しの必要がなく作業の能率化を図ることができる
。又、最小の連設数の場合には複数のリードフレームを
同時に加工することができるから、金型および回合の昇
降回数が少なく、不良率が減少する。
As explained above, according to the present invention, the molds and the ratio are set at equal pitches for the minimum IN of the number of consecutively installed semiconductor devices.
N+1 lead frames are arranged, and the leads of the semiconductor device can be separated and bent without using a mold and a mold located at the center or at the end depending on the number of lead frames installed in a row, so the number of leads can be reduced. It can be used with either N or 2N lead frames. For this reason, one device can be applied to many types of lead frames, reducing the number of devices installed, and eliminating the need to reset the mold and mold, increasing work efficiency. . Further, in the case of the minimum number of consecutive lead frames, a plurality of lead frames can be processed simultaneously, so the number of times the mold and the mold are raised and lowered is reduced, and the defective rate is reduced.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による製造装置の一実施例を示す平面図
、第2図は連設数が異なる場合の使用状態の平面図、第
3図および第4図は従来装置の平面図、第5図はリード
フレームの一例の斜視図である。 11.11a、11b・・・下金型、12.12a。 12b・・・下曲台、13.13b、16・・・マガジ
ン、14・・・スティック、15・・・送り爪。 出願人代理人  猪  股    項 第3図 第4図
FIG. 1 is a plan view showing an embodiment of the manufacturing device according to the present invention, FIG. 2 is a plan view of the state of use when the number of connected units is different, FIGS. 3 and 4 are plan views of the conventional device, and FIG. FIG. 5 is a perspective view of an example of a lead frame. 11.11a, 11b... lower mold, 12.12a. 12b...Lower bending stand, 13.13b, 16...Magazine, 14...Stick, 15...Feed claw. Applicant's agent Inomata Figure 3 Figure 4

Claims (1)

【特許請求の範囲】  半導体装置が所定の等ピッチで連設されたリードフレ
ームを収納するマガジンと、このマガジンから取り出さ
れたリードフレームから半導体装置を切り離す半導体装
置毎に設けられた切断用の金型と、切り離された半導体
装置を所定方向に折曲させる半導体装置毎に設けられた
曲台とからなる半導体装置の製造装置において、 リードフレームに連設される半導体装置の最小値Nに対
して前記金型および曲台が前記所定等ピッチで2N+1
配設され、半導体装置の連設数に応じて中央又は端部に
位置した金型および曲台を不使用状態とするように前記
マガジンをセットすることを特徴とする半導体装置の製
造装置。
[Claims] A magazine that stores lead frames in which semiconductor devices are arranged in series at a predetermined equal pitch, and a cutting tool provided for each semiconductor device to separate the semiconductor devices from the lead frames taken out from the magazine. In a semiconductor device manufacturing apparatus consisting of a mold and a bending table provided for each semiconductor device to bend the separated semiconductor device in a predetermined direction, for the minimum value N of semiconductor devices connected to a lead frame, The mold and the bending table are arranged at the predetermined equal pitch of 2N+1.
1. An apparatus for manufacturing a semiconductor device, characterized in that the magazine is set so that the mold and the bending stand located at the center or at the end depending on the number of semiconductor devices installed in a row are not in use.
JP25588484A 1984-12-04 1984-12-04 Equipment for manufacturing semiconductor device Pending JPS61134042A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25588484A JPS61134042A (en) 1984-12-04 1984-12-04 Equipment for manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25588484A JPS61134042A (en) 1984-12-04 1984-12-04 Equipment for manufacturing semiconductor device

Publications (1)

Publication Number Publication Date
JPS61134042A true JPS61134042A (en) 1986-06-21

Family

ID=17284901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25588484A Pending JPS61134042A (en) 1984-12-04 1984-12-04 Equipment for manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS61134042A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11574850B2 (en) 2020-04-08 2023-02-07 Google Llc Heat sink with turbulent structures

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11574850B2 (en) 2020-04-08 2023-02-07 Google Llc Heat sink with turbulent structures

Similar Documents

Publication Publication Date Title
US5332405A (en) Apparatus for manufacturing semiconductor lead frames in a circular path
JPS61134042A (en) Equipment for manufacturing semiconductor device
US3756109A (en) Automatic feed apparatus for encapsulated semiconductor units
JPH06268021A (en) Film carrier punching die
KR0142941B1 (en) Lead forming method of semiconductor package and forming device thereof
US5295298A (en) Method of forming leads of semiconductor device to shape
KR0123314Y1 (en) Double forming device of semiconductor device
JP2648053B2 (en) Semiconductor device lead cutting method
US11626350B2 (en) Cutting a leadframe assembly with a plurality of punching tools
TW518734B (en) Leadframe for preventing delamination of QFN semiconductor package
US20220336331A1 (en) Electronic device with exposed tie bar
JPS6035549A (en) Cut-off shaping device
JPH0369173B2 (en)
KR100510741B1 (en) device for trim and forming for manufacturing package of semiconductor
JPS5850762A (en) Lead frame for semiconductor device
JPS5921172B2 (en) Lead frame connecting piece cutting device
JP2871649B2 (en) Method for manufacturing lead frame for semiconductor device
JP2911365B2 (en) Molding equipment for molding parts in lead frames for semiconductor component manufacturing
JP2823328B2 (en) External lead forming method and external lead forming apparatus for resin-sealed semiconductor device
JPH10229156A (en) Lead cutting/shaping method and device
KR100726771B1 (en) Fabrication method of strip for chip scale package
JPH11154721A (en) Method for molding ic lead frame
JPH0582689A (en) Manufacture of semiconductor device and apparatus for manufacturing the same
JPH0735402Y2 (en) Lead frame cutting device
JPH0997866A (en) Lead forming method and mold for forming lead