JPS61132678U - - Google Patents
Info
- Publication number
- JPS61132678U JPS61132678U JP1507285U JP1507285U JPS61132678U JP S61132678 U JPS61132678 U JP S61132678U JP 1507285 U JP1507285 U JP 1507285U JP 1507285 U JP1507285 U JP 1507285U JP S61132678 U JPS61132678 U JP S61132678U
- Authority
- JP
- Japan
- Prior art keywords
- speed feeding
- pulse motor
- speed
- low
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1507285U JPS61132678U (ru) | 1985-02-05 | 1985-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1507285U JPS61132678U (ru) | 1985-02-05 | 1985-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61132678U true JPS61132678U (ru) | 1986-08-19 |
Family
ID=30500580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1507285U Pending JPS61132678U (ru) | 1985-02-05 | 1985-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61132678U (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01144552A (ja) * | 1987-11-30 | 1989-06-06 | Shimadzu Corp | 薄膜断面分析装置 |
-
1985
- 1985-02-05 JP JP1507285U patent/JPS61132678U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01144552A (ja) * | 1987-11-30 | 1989-06-06 | Shimadzu Corp | 薄膜断面分析装置 |
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