JPS61132678U - - Google Patents
Info
- Publication number
- JPS61132678U JPS61132678U JP1507285U JP1507285U JPS61132678U JP S61132678 U JPS61132678 U JP S61132678U JP 1507285 U JP1507285 U JP 1507285U JP 1507285 U JP1507285 U JP 1507285U JP S61132678 U JPS61132678 U JP S61132678U
- Authority
- JP
- Japan
- Prior art keywords
- speed feeding
- pulse motor
- speed
- low
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本考案の一実施例における要部の平面
図、第２図は同実施例における制御装置の動作の
要部のフローチヤートである。
FIG. 1 is a plan view of the main parts of an embodiment of the present invention, and FIG. 2 is a flowchart of the main parts of the operation of the control device in the embodiment.
Claims (1)
り用と低速送り用の２種類用意し、測定面積の大
小に応じて、広領域測定の場合には高速送り用パ
ルスモータを駆動し、小領域測定の場合には低速
送り用パルスモータを駆動する制御装置を備えた
電子線照射型分析装置の試料微動装置。 There are two types of pulse motors that drive the sample fine movement device, one for high-speed feeding and one for low-speed feeding. Depending on the size of the measurement area, the pulse motor for high-speed feeding is driven for wide-area measurement, and the pulse motor for high-speed feeding is used for small-area measurement. In some cases, a sample fine movement device for an electron beam irradiation type analyzer equipped with a control device that drives a low-speed feed pulse motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1507285U JPS61132678U (en) | 1985-02-05 | 1985-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1507285U JPS61132678U (en) | 1985-02-05 | 1985-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61132678U true JPS61132678U (en) | 1986-08-19 |
Family
ID=30500580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1507285U Pending JPS61132678U (en) | 1985-02-05 | 1985-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61132678U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01144552A (en) * | 1987-11-30 | 1989-06-06 | Shimadzu Corp | Thin film cross section analyzer |
-
1985
- 1985-02-05 JP JP1507285U patent/JPS61132678U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01144552A (en) * | 1987-11-30 | 1989-06-06 | Shimadzu Corp | Thin film cross section analyzer |
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