JPS61131866A - 研摩機における研摩剤流量計の洗浄方法およびその装置 - Google Patents

研摩機における研摩剤流量計の洗浄方法およびその装置

Info

Publication number
JPS61131866A
JPS61131866A JP59251768A JP25176884A JPS61131866A JP S61131866 A JPS61131866 A JP S61131866A JP 59251768 A JP59251768 A JP 59251768A JP 25176884 A JP25176884 A JP 25176884A JP S61131866 A JPS61131866 A JP S61131866A
Authority
JP
Japan
Prior art keywords
abrasive
flow meter
pure water
polishing
polishing machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59251768A
Other languages
English (en)
Japanese (ja)
Other versions
JPH044100B2 (enExample
Inventor
Masaharu Kinoshita
正治 木下
Hideo Kawakami
川上　英雄
Osamu Yoneya
米屋　修
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Toshiba Corp
Shibaura Machine Co Ltd
Original Assignee
Toshiba Corp
Toshiba Machine Co Ltd
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Machine Co Ltd, Toshiba Ceramics Co Ltd filed Critical Toshiba Corp
Priority to JP59251768A priority Critical patent/JPS61131866A/ja
Publication of JPS61131866A publication Critical patent/JPS61131866A/ja
Publication of JPH044100B2 publication Critical patent/JPH044100B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP59251768A 1984-11-30 1984-11-30 研摩機における研摩剤流量計の洗浄方法およびその装置 Granted JPS61131866A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59251768A JPS61131866A (ja) 1984-11-30 1984-11-30 研摩機における研摩剤流量計の洗浄方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59251768A JPS61131866A (ja) 1984-11-30 1984-11-30 研摩機における研摩剤流量計の洗浄方法およびその装置

Publications (2)

Publication Number Publication Date
JPS61131866A true JPS61131866A (ja) 1986-06-19
JPH044100B2 JPH044100B2 (enExample) 1992-01-27

Family

ID=17227626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59251768A Granted JPS61131866A (ja) 1984-11-30 1984-11-30 研摩機における研摩剤流量計の洗浄方法およびその装置

Country Status (1)

Country Link
JP (1) JPS61131866A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6393565A (ja) * 1986-10-09 1988-04-23 Nec Kyushu Ltd 裏面研削装置
WO1998014305A1 (en) * 1996-10-02 1998-04-09 Speedfam Corporation Methods and apparatus for measuring and dispensing processing solutions to a cmp machine
JP2016501759A (ja) * 2012-10-05 2016-01-21 ロバート， ダブリュ． パーシュ， 通貨式タイヤ充填・修復装置及び方法
US20190168470A1 (en) * 2016-08-15 2019-06-06 Consumer Products International Llc. Currency Operated Tire Inflation and Repair Apparatus and Methods

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461391A (en) * 1977-10-24 1979-05-17 Shibayama Kikai Kk Water grinding for polishing machine
JPS58203890A (ja) * 1982-05-21 1983-11-28 東洋食品機械株式会社 ピストン式充填機の洗滌装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461391A (en) * 1977-10-24 1979-05-17 Shibayama Kikai Kk Water grinding for polishing machine
JPS58203890A (ja) * 1982-05-21 1983-11-28 東洋食品機械株式会社 ピストン式充填機の洗滌装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6393565A (ja) * 1986-10-09 1988-04-23 Nec Kyushu Ltd 裏面研削装置
WO1998014305A1 (en) * 1996-10-02 1998-04-09 Speedfam Corporation Methods and apparatus for measuring and dispensing processing solutions to a cmp machine
JP2016501759A (ja) * 2012-10-05 2016-01-21 ロバート， ダブリュ． パーシュ， 通貨式タイヤ充填・修復装置及び方法
US10071531B2 (en) 2012-10-05 2018-09-11 Consumer Products International Llc. Currency operated tire inflation and repair apparatus and methods
JP2019116270A (ja) * 2012-10-05 2019-07-18 コンシューマー プロダクツ インターナショナル エルエルシー． 通貨式タイヤ充填・修復装置及び方法
US20190168470A1 (en) * 2016-08-15 2019-06-06 Consumer Products International Llc. Currency Operated Tire Inflation and Repair Apparatus and Methods

Also Published As

Publication number Publication date
JPH044100B2 (enExample) 1992-01-27

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