JPS61131855U - - Google Patents
Info
- Publication number
- JPS61131855U JPS61131855U JP1528785U JP1528785U JPS61131855U JP S61131855 U JPS61131855 U JP S61131855U JP 1528785 U JP1528785 U JP 1528785U JP 1528785 U JP1528785 U JP 1528785U JP S61131855 U JPS61131855 U JP S61131855U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- light
- metal layer
- chip
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1528785U JPS61131855U (uk) | 1985-02-07 | 1985-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1528785U JPS61131855U (uk) | 1985-02-07 | 1985-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61131855U true JPS61131855U (uk) | 1986-08-18 |
Family
ID=30500996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1528785U Pending JPS61131855U (uk) | 1985-02-07 | 1985-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61131855U (uk) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009180622A (ja) * | 2008-01-31 | 2009-08-13 | Alps Electric Co Ltd | ピエゾ抵抗型物理量センサ及びその製造方法 |
-
1985
- 1985-02-07 JP JP1528785U patent/JPS61131855U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009180622A (ja) * | 2008-01-31 | 2009-08-13 | Alps Electric Co Ltd | ピエゾ抵抗型物理量センサ及びその製造方法 |
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