JPS61131836U - - Google Patents

Info

Publication number
JPS61131836U
JPS61131836U JP1576485U JP1576485U JPS61131836U JP S61131836 U JPS61131836 U JP S61131836U JP 1576485 U JP1576485 U JP 1576485U JP 1576485 U JP1576485 U JP 1576485U JP S61131836 U JPS61131836 U JP S61131836U
Authority
JP
Japan
Prior art keywords
transfer device
wafer
wafer boat
feed screw
reciprocating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1576485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1576485U priority Critical patent/JPS61131836U/ja
Publication of JPS61131836U publication Critical patent/JPS61131836U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1576485U 1985-02-06 1985-02-06 Pending JPS61131836U (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1576485U JPS61131836U (US07922777-20110412-C00004.png) 1985-02-06 1985-02-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1576485U JPS61131836U (US07922777-20110412-C00004.png) 1985-02-06 1985-02-06

Publications (1)

Publication Number Publication Date
JPS61131836U true JPS61131836U (US07922777-20110412-C00004.png) 1986-08-18

Family

ID=30501905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1576485U Pending JPS61131836U (US07922777-20110412-C00004.png) 1985-02-06 1985-02-06

Country Status (1)

Country Link
JP (1) JPS61131836U (US07922777-20110412-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291335A (ja) * 1985-06-19 1986-12-22 Denkoo:Kk 半導体移換え装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291335A (ja) * 1985-06-19 1986-12-22 Denkoo:Kk 半導体移換え装置

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