JPS61131834U - - Google Patents
Info
- Publication number
- JPS61131834U JPS61131834U JP1468985U JP1468985U JPS61131834U JP S61131834 U JPS61131834 U JP S61131834U JP 1468985 U JP1468985 U JP 1468985U JP 1468985 U JP1468985 U JP 1468985U JP S61131834 U JPS61131834 U JP S61131834U
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- prober
- wafer stage
- wafer
- mechanism according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims 10
- 239000002826 coolant Substances 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1468985U JPS61131834U (de) | 1985-02-06 | 1985-02-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1468985U JPS61131834U (de) | 1985-02-06 | 1985-02-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61131834U true JPS61131834U (de) | 1986-08-18 |
Family
ID=30499840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1468985U Pending JPS61131834U (de) | 1985-02-06 | 1985-02-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61131834U (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06104321A (ja) * | 1991-03-26 | 1994-04-15 | Erich Reitinger | 半導体ウエハー等のテスト装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53144682A (en) * | 1977-05-23 | 1978-12-16 | Fujitsu Ltd | Testing method of semiconductor devices |
JPS546382U (de) * | 1977-06-16 | 1979-01-17 | ||
JPS57160141A (en) * | 1981-03-27 | 1982-10-02 | Nec Kyushu Ltd | Device for inspecting semiconductor substrate |
-
1985
- 1985-02-06 JP JP1468985U patent/JPS61131834U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53144682A (en) * | 1977-05-23 | 1978-12-16 | Fujitsu Ltd | Testing method of semiconductor devices |
JPS546382U (de) * | 1977-06-16 | 1979-01-17 | ||
JPS57160141A (en) * | 1981-03-27 | 1982-10-02 | Nec Kyushu Ltd | Device for inspecting semiconductor substrate |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06104321A (ja) * | 1991-03-26 | 1994-04-15 | Erich Reitinger | 半導体ウエハー等のテスト装置 |
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