JPS61131834U - - Google Patents

Info

Publication number
JPS61131834U
JPS61131834U JP1468985U JP1468985U JPS61131834U JP S61131834 U JPS61131834 U JP S61131834U JP 1468985 U JP1468985 U JP 1468985U JP 1468985 U JP1468985 U JP 1468985U JP S61131834 U JPS61131834 U JP S61131834U
Authority
JP
Japan
Prior art keywords
cooling
prober
wafer stage
wafer
mechanism according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1468985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1468985U priority Critical patent/JPS61131834U/ja
Publication of JPS61131834U publication Critical patent/JPS61131834U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1468985U 1985-02-06 1985-02-06 Pending JPS61131834U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1468985U JPS61131834U (de) 1985-02-06 1985-02-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1468985U JPS61131834U (de) 1985-02-06 1985-02-06

Publications (1)

Publication Number Publication Date
JPS61131834U true JPS61131834U (de) 1986-08-18

Family

ID=30499840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1468985U Pending JPS61131834U (de) 1985-02-06 1985-02-06

Country Status (1)

Country Link
JP (1) JPS61131834U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06104321A (ja) * 1991-03-26 1994-04-15 Erich Reitinger 半導体ウエハー等のテスト装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144682A (en) * 1977-05-23 1978-12-16 Fujitsu Ltd Testing method of semiconductor devices
JPS546382U (de) * 1977-06-16 1979-01-17
JPS57160141A (en) * 1981-03-27 1982-10-02 Nec Kyushu Ltd Device for inspecting semiconductor substrate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144682A (en) * 1977-05-23 1978-12-16 Fujitsu Ltd Testing method of semiconductor devices
JPS546382U (de) * 1977-06-16 1979-01-17
JPS57160141A (en) * 1981-03-27 1982-10-02 Nec Kyushu Ltd Device for inspecting semiconductor substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06104321A (ja) * 1991-03-26 1994-04-15 Erich Reitinger 半導体ウエハー等のテスト装置

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