JPS611312Y2 - - Google Patents
Info
- Publication number
- JPS611312Y2 JPS611312Y2 JP14771279U JP14771279U JPS611312Y2 JP S611312 Y2 JPS611312 Y2 JP S611312Y2 JP 14771279 U JP14771279 U JP 14771279U JP 14771279 U JP14771279 U JP 14771279U JP S611312 Y2 JPS611312 Y2 JP S611312Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14771279U JPS611312Y2 (https=) | 1979-10-26 | 1979-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14771279U JPS611312Y2 (https=) | 1979-10-26 | 1979-10-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5666749U JPS5666749U (https=) | 1981-06-03 |
| JPS611312Y2 true JPS611312Y2 (https=) | 1986-01-17 |
Family
ID=29378850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14771279U Expired JPS611312Y2 (https=) | 1979-10-26 | 1979-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS611312Y2 (https=) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6054764A (ja) * | 1983-09-06 | 1985-03-29 | Chugai Ro Kogyo Kaisha Ltd | 塗料焼付装置 |
| WO2023037698A1 (ja) | 2021-09-09 | 2023-03-16 | 日本碍子株式会社 | ウエハ載置台 |
| JP7583698B2 (ja) | 2021-10-08 | 2024-11-14 | 日本碍子株式会社 | ウエハ載置台 |
| JP7514811B2 (ja) | 2021-10-14 | 2024-07-11 | 日本碍子株式会社 | ウエハ載置台 |
| JP7554171B2 (ja) | 2021-10-19 | 2024-09-19 | 日本碍子株式会社 | ウエハ載置台 |
| JP7580361B2 (ja) | 2021-11-10 | 2024-11-11 | 日本碍子株式会社 | ウエハ載置台 |
| JP7522089B2 (ja) | 2021-11-10 | 2024-07-24 | 日本碍子株式会社 | ウエハ載置台 |
| US12543527B2 (en) | 2022-01-27 | 2026-02-03 | Ngk Insulators, Ltd. | Wafer placement table, and member for semiconductor manufacturing apparatus, using the same |
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1979
- 1979-10-26 JP JP14771279U patent/JPS611312Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5666749U (https=) | 1981-06-03 |