JPS61131059U - - Google Patents
Info
- Publication number
- JPS61131059U JPS61131059U JP1403485U JP1403485U JPS61131059U JP S61131059 U JPS61131059 U JP S61131059U JP 1403485 U JP1403485 U JP 1403485U JP 1403485 U JP1403485 U JP 1403485U JP S61131059 U JPS61131059 U JP S61131059U
- Authority
- JP
- Japan
- Prior art keywords
- emitter tip
- tip
- needle
- metal ion
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第1図は、本考案のニードル型液体金属イオン
源の模式図である。
1…エミツタチツプ、2…加熱用フイラメント
、3…イオン化物質、4…溝、5…引出し電極。
FIG. 1 is a schematic diagram of the needle-type liquid metal ion source of the present invention. DESCRIPTION OF SYMBOLS 1... Emitter tip, 2... Heating filament, 3... Ionized substance, 4... Groove, 5... Extraction electrode.
Claims (1)
出し電極から成るニードル型液体金属イオン源に
おいて、エミツタチツプの円錐状先端部分に螺旋
状溝を設けたことを特徴とする液体金属イオン源
。 A needle-type liquid metal ion source comprising an emitter tip, a heating filament, and an extraction electrode, characterized in that a spiral groove is provided in the conical tip of the emitter tip.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1403485U JPS61131059U (en) | 1985-02-01 | 1985-02-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1403485U JPS61131059U (en) | 1985-02-01 | 1985-02-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61131059U true JPS61131059U (en) | 1986-08-16 |
Family
ID=30498583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1403485U Pending JPS61131059U (en) | 1985-02-01 | 1985-02-01 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61131059U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010046818A (en) * | 1999-11-15 | 2001-06-15 | 강승언 | The Fabrication Technology of Coil Type Liquid Metal Ion Source formed the Liquid Metal Supply Course Line. |
-
1985
- 1985-02-01 JP JP1403485U patent/JPS61131059U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010046818A (en) * | 1999-11-15 | 2001-06-15 | 강승언 | The Fabrication Technology of Coil Type Liquid Metal Ion Source formed the Liquid Metal Supply Course Line. |
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