JPS61151248U - - Google Patents
Info
- Publication number
- JPS61151248U JPS61151248U JP3459185U JP3459185U JPS61151248U JP S61151248 U JPS61151248 U JP S61151248U JP 3459185 U JP3459185 U JP 3459185U JP 3459185 U JP3459185 U JP 3459185U JP S61151248 U JPS61151248 U JP S61151248U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- porous body
- rod
- source device
- cylindrical container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 5
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Description
第１図はイオン源の構成図、第２図はイオン化
部の詳細図、第３図は本考案のイオン化部を示す
図である。
１……イオン化部、１１……円筒状容器、１２
……多孔質体、１３……イオン化物質、１４……
円筒状容器、１５……スプリング、１６……棒状
体、１７……目盛。
FIG. 1 is a block diagram of the ion source, FIG. 2 is a detailed view of the ionization section, and FIG. 3 is a diagram showing the ionization section of the present invention. 1... Ionization section, 11... Cylindrical container, 12
... Porous body, 13 ... Ionized substance, 14 ...
Cylindrical container, 15... spring, 16... rod-shaped body, 17... scale.
Claims (1)
端に具備した多孔質体と、多孔質体を高温に加熱
する加熱源と、多孔質体より放出するイオンを引
出す引出し電極より成るイオン源において、前記
、円筒状容器の中のイオン化物質を多孔質体側へ
押し付けるスプリングおよび棒状体を設けたこと
を特徴としたイオン源装置。 ２ 実用新案登録請求の範囲第１項において、イ
オン原の棒状体の一端が真空容器の外部から観測
出来る様、真空容器にのぞき窓と棒状体に目盛を
有したことを特徴としたイオン源装置。[Scope of Claim for Utility Model Registration] 1. A cylindrical container for storing an ionized substance, a porous body provided at its tip, a heating source for heating the porous body to a high temperature, and a drawer for drawing out ions released from the porous body. An ion source device comprising an electrode, characterized in that an ion source device is provided with a spring and a rod-shaped body that presses the ionized substance in the cylindrical container toward the porous body. 2. An ion source device according to claim 1 of the utility model registration claim, characterized in that the vacuum vessel has a peephole and the rod-like body has a scale so that one end of the rod-like body of the ion source can be observed from outside the vacuum vessel. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3459185U JPS61151248U (en) | 1985-03-13 | 1985-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3459185U JPS61151248U (en) | 1985-03-13 | 1985-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61151248U true JPS61151248U (en) | 1986-09-18 |
Family
ID=30538103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3459185U Pending JPS61151248U (en) | 1985-03-13 | 1985-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61151248U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63184237U (en) * | 1987-05-19 | 1988-11-28 |
-
1985
- 1985-03-13 JP JP3459185U patent/JPS61151248U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63184237U (en) * | 1987-05-19 | 1988-11-28 |
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