JPS61130886A - Detector for object to be treated - Google Patents

Abstract

PURPOSE:To facilitate the mounting of a sensor while preventing malfunctioning, by mounting a photosensor to a container where a conveying unit is arranged to differentiate the reflectance of the conveying unit from that of an object to be treated significantly. CONSTITUTION:A photosensor 16 is mounted to a container 3 of a conveying unit 4 while the reflectance of the unit 4 is differentiated from test of an object 5 to be treated significantly. To this end, arms 7 and 8 of the unit 4, a setting plate 13 and a support base 6 is subjected to a black alumite processing and a high polymer black film is adhered on to surfaces of members to be brought close to the reflectance of the object 5 being processed. Therefore, the sensor 16 is allowed to detect the presence of the object 5 being processed positively without being affected by external light thereby elevating the reliability of the detection. The mounting work can be facilitated by mounting the sensor 16 outside the container 3.

Description

Detailed Description of the Invention [Technical Field of the Invention] The present invention relates to a processing object detection device, and particularly to a processing object detection device for detecting the presence or absence of a processing object placed on a conveyance device. Regarding.

(Technical background of the invention and its problems) Conventionally, vacuum processing I! [! A conveyance device is arranged inside a vacuum preliminary chamber connected to the chamber, and the workpiece is conveyed by this conveyance device, and the presence or absence of the workpiece placed on the conveyance device is detected. In this case, a photosensor is attached to the above-mentioned conveyance device, and this photosensor irradiates the workpiece with light or infrared rays and receives the reflected light, thereby identifying and detecting changes in the intensity of the reflected light. It had been done.

However, the above configuration has the disadvantage that when the transport device moves, the photosensor may receive external light and malfunction, resulting in a decrease in detection accuracy and reliability. I was pondering.

In addition, when installing the above photosensor on a conveyance device,
It also has the disadvantage that it is very difficult to install due to the large number of moving parts.

[Purpose of the invention]

The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide a processing object detection device that is easy to install and can reliably prevent malfunctions.

(Summary of the Invention) In order to achieve the above object, a processing object detection device according to the present invention irradiates a processing object placed on a conveyance device with light or infrared rays and receives the reflected light. In a processing object detection device including a photosensor for detecting the presence or absence of a processing object, the photosensor is attached to a container side in which a transport device is arranged, and the reflectance of the transport device is adjusted to reflect the processing object. It is characterized by having a significantly different rate.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to FIGS. 1 and 2.

In this embodiment, a transfer device 4 is provided inside a vacuum preliminary chamber 3 connected to the vacuum processing chamber 1 via a gate valve 2, and the transfer device 4 transports the workpiece 5 toward the atmosphere. It is designed to be transported from there to the vacuum processing chamber 1. This conveying device 4 includes a pair of first arms 7.7 rotatably mounted on a support base 6, and each of the 17th arms 7.7.
．． A pair of No. 27 rotatably attached to the tip of No. 7.
- the first arms 7.7 are attached by meshing gears 9.10 attached to the side ends and the tips of the second arms 8, 8, respectively. It is formed into a pantograph shape. Further, the rotating shaft 11 of the first arm 7 passes through the support base 6 and is connected to a rotational drive source (not shown), and a belt 12 is provided for transmitting the rotational movement of the rotational drive source to the second arm 8. The tip of the second arm 8 is rotatably attached to the mounting plate 13 for the object 5 to be processed. In such a configuration, by rotating each of the arms 7.8, the object to be processed is conveyed linearly.

Further, an opening 14 is formed at the upper surface of the vacuum preparatory chamber 3, and a transparent lid member 15 is fixed so as to close this opening 14. On the top surface of this lid member 15,
An anti-OA type photosensor 16 is attached as a detector.

Further, the conveying device 4 is configured so that its reflectance is greatly different from that of the object to be processed 5, and as a means for making the reflectance different in this way, in this embodiment, each of the conveying devices 4 is The arm 7゜8, the mounting plate 13, and the support base 6 are subjected to black alumite treatment, and a black polymeric film of fluorine, fluorine carbide, chlorine hydrocarbon, or silicone is adhered to the surface of each of the above members. The reflectance of the transport device is lower than the reflectance of the object to be processed. In addition, the above-mentioned alumite treatment or film adhesion alone may be used, or each member may be painted black.Furthermore, in order to make the reflectance of the conveying device 4 higher than that of the object to be processed 5, white painting or mirror finishing may be applied. Processing may also be performed.

In this embodiment, the presence or absence of the object to be processed is detected by emitting infrared rays or light from a light emitting section (not shown) of the photosensor 16 and receiving the reflected light at the light receiving section. The reflectance of the conveyance device 4 is
When the reflectance J: is low, the reflected light intensity increases as the object to be processed is placed on the mounting plate 13,
In addition, if the reflectance of the transport device 4 is higher than the reflectance of the workpiece 5, the light-receiving section is constantly receiving reflected light of strong intensity, and the workpiece 5 is not exposed to ah. By doing so, the intensity of the reflected light is reduced and the object to be processed 5 can be detected.

Therefore, regardless of the above-mentioned means, the transport device 4
Since the reflectance of the photo sensor 16 and the object to be processed 5 are greatly different, and the photosensor 16 is not exposed to external light, malfunctions of the photosensor 16 can be reliably prevented. Further, in this embodiment, the photosensor 16 is attached to the vacuum preliminary chamber 3 instead of the conveyance device 4, and is located outside the vacuum preliminary chamber 3, so that attachment is easy, and furthermore, It is not affected by the atmosphere inside the vacuum preliminary chamber 3.

〔Effect of the invention〕

As described above, the processing object detection device according to the present invention has the following features:
The photosensor is attached to the side of the container where the transport device is placed, and the reflectance of the transport device is made to be significantly different from the reflectance of the object to be processed, so the photosensor is not affected by external light and can be reliably processed. It becomes possible to detect the presence or absence of the object to be processed, which improves reliability. In addition, since the photosensor is attached to the container side, the attachment work becomes easier.

[Brief explanation of the drawing]

FIGS. 1 and 2 each show an embodiment of the present invention, with FIG. 1 being a longitudinal cross-sectional view of a vacuum pre-chamber portion, and FIG. 2 being a plan view of the vacuum pre-chamber. DESCRIPTION OF SYMBOLS 1... To vacuum processing, 2... Gate valve, 3... Vacuum preliminary chamber, 4... Transfer device, 5... Limb processing object, 6...
・Support pace, 7...first arm, 8...second arm, 9, 10...gear, 11...rotation shaft, 12...
・Belt, 13... Placement plate, 14... Opening, 15
... Lid member, 16... Photosenna. Drawings::,”, 9 (no changes to 11 and 11) Figure 1 Figure 2 Procedural amendment January 1985 (0th day)

Claims (1)

[Claims] The above-mentioned object detection device is provided with a photosensor that detects the presence or absence of the object by irradiating the object placed on the conveyance device with light or infrared rays and receiving the reflected light. 1. A detection device for an object to be processed, characterized in that a photosensor is attached to the side of a container in which a transport device is arranged, and the reflectance of the transport device is made to be significantly different from the reflectance of the object to be processed.