JPS61129339U - - Google Patents
Info
- Publication number
- JPS61129339U JPS61129339U JP1268185U JP1268185U JPS61129339U JP S61129339 U JPS61129339 U JP S61129339U JP 1268185 U JP1268185 U JP 1268185U JP 1268185 U JP1268185 U JP 1268185U JP S61129339 U JPS61129339 U JP S61129339U
- Authority
- JP
- Japan
- Prior art keywords
- microscope
- move
- autoprober
- probe
- probe card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1268185U JPS61129339U (OSRAM) | 1985-01-31 | 1985-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1268185U JPS61129339U (OSRAM) | 1985-01-31 | 1985-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61129339U true JPS61129339U (OSRAM) | 1986-08-13 |
Family
ID=30495977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1268185U Pending JPS61129339U (OSRAM) | 1985-01-31 | 1985-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61129339U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0273163A (ja) * | 1988-09-09 | 1990-03-13 | Tokyo Electron Ltd | プローブ装置 |
-
1985
- 1985-01-31 JP JP1268185U patent/JPS61129339U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0273163A (ja) * | 1988-09-09 | 1990-03-13 | Tokyo Electron Ltd | プローブ装置 |