JPS61128709U - - Google Patents

Info

Publication number
JPS61128709U
JPS61128709U JP1157685U JP1157685U JPS61128709U JP S61128709 U JPS61128709 U JP S61128709U JP 1157685 U JP1157685 U JP 1157685U JP 1157685 U JP1157685 U JP 1157685U JP S61128709 U JPS61128709 U JP S61128709U
Authority
JP
Japan
Prior art keywords
flow rate
gas
mass flow
rate control
mixed gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1157685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530168Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985011576U priority Critical patent/JPH0530168Y2/ja
Publication of JPS61128709U publication Critical patent/JPS61128709U/ja
Application granted granted Critical
Publication of JPH0530168Y2 publication Critical patent/JPH0530168Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Non-Electrical Variables (AREA)
JP1985011576U 1985-01-30 1985-01-30 Expired - Lifetime JPH0530168Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985011576U JPH0530168Y2 (enExample) 1985-01-30 1985-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985011576U JPH0530168Y2 (enExample) 1985-01-30 1985-01-30

Publications (2)

Publication Number Publication Date
JPS61128709U true JPS61128709U (enExample) 1986-08-12
JPH0530168Y2 JPH0530168Y2 (enExample) 1993-08-02

Family

ID=30493824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985011576U Expired - Lifetime JPH0530168Y2 (enExample) 1985-01-30 1985-01-30

Country Status (1)

Country Link
JP (1) JPH0530168Y2 (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5287889A (en) * 1975-11-27 1977-07-22 Draegerwerk Ag Respiration protective* diving* medical and experimental gas mixer
JPS52137764A (en) * 1976-05-14 1977-11-17 Chiyoda Chem Eng & Constr Co Ltd Fuel gas mixing system
JPS563978A (en) * 1979-06-25 1981-01-16 Akira Takayama Semiconductor fuel cell using transistor effect

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5287889A (en) * 1975-11-27 1977-07-22 Draegerwerk Ag Respiration protective* diving* medical and experimental gas mixer
JPS52137764A (en) * 1976-05-14 1977-11-17 Chiyoda Chem Eng & Constr Co Ltd Fuel gas mixing system
JPS563978A (en) * 1979-06-25 1981-01-16 Akira Takayama Semiconductor fuel cell using transistor effect

Also Published As

Publication number Publication date
JPH0530168Y2 (enExample) 1993-08-02

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