JPS61128709U - - Google Patents

Info

Publication number
JPS61128709U
JPS61128709U JP1157685U JP1157685U JPS61128709U JP S61128709 U JPS61128709 U JP S61128709U JP 1157685 U JP1157685 U JP 1157685U JP 1157685 U JP1157685 U JP 1157685U JP S61128709 U JPS61128709 U JP S61128709U
Authority
JP
Japan
Prior art keywords
flow rate
gas
mass flow
rate control
mixed gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1157685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530168Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985011576U priority Critical patent/JPH0530168Y2/ja
Publication of JPS61128709U publication Critical patent/JPS61128709U/ja
Application granted granted Critical
Publication of JPH0530168Y2 publication Critical patent/JPH0530168Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Non-Electrical Variables (AREA)
JP1985011576U 1985-01-30 1985-01-30 Expired - Lifetime JPH0530168Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985011576U JPH0530168Y2 (enrdf_load_stackoverflow) 1985-01-30 1985-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985011576U JPH0530168Y2 (enrdf_load_stackoverflow) 1985-01-30 1985-01-30

Publications (2)

Publication Number Publication Date
JPS61128709U true JPS61128709U (enrdf_load_stackoverflow) 1986-08-12
JPH0530168Y2 JPH0530168Y2 (enrdf_load_stackoverflow) 1993-08-02

Family

ID=30493824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985011576U Expired - Lifetime JPH0530168Y2 (enrdf_load_stackoverflow) 1985-01-30 1985-01-30

Country Status (1)

Country Link
JP (1) JPH0530168Y2 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5287889A (en) * 1975-11-27 1977-07-22 Draegerwerk Ag Respiration protective* diving* medical and experimental gas mixer
JPS52137764A (en) * 1976-05-14 1977-11-17 Chiyoda Chem Eng & Constr Co Ltd Fuel gas mixing system
JPS563978A (en) * 1979-06-25 1981-01-16 Akira Takayama Semiconductor fuel cell using transistor effect

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5287889A (en) * 1975-11-27 1977-07-22 Draegerwerk Ag Respiration protective* diving* medical and experimental gas mixer
JPS52137764A (en) * 1976-05-14 1977-11-17 Chiyoda Chem Eng & Constr Co Ltd Fuel gas mixing system
JPS563978A (en) * 1979-06-25 1981-01-16 Akira Takayama Semiconductor fuel cell using transistor effect

Also Published As

Publication number Publication date
JPH0530168Y2 (enrdf_load_stackoverflow) 1993-08-02

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