JPS61127639U - - Google Patents

Info

Publication number
JPS61127639U
JPS61127639U JP1166985U JP1166985U JPS61127639U JP S61127639 U JPS61127639 U JP S61127639U JP 1166985 U JP1166985 U JP 1166985U JP 1166985 U JP1166985 U JP 1166985U JP S61127639 U JPS61127639 U JP S61127639U
Authority
JP
Japan
Prior art keywords
section
photoelectric sensor
substrate
wafer
emitting section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1166985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0229724Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1166985U priority Critical patent/JPH0229724Y2/ja
Publication of JPS61127639U publication Critical patent/JPS61127639U/ja
Application granted granted Critical
Publication of JPH0229724Y2 publication Critical patent/JPH0229724Y2/ja
Expired legal-status Critical Current

Links

JP1166985U 1985-01-30 1985-01-30 Expired JPH0229724Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1166985U JPH0229724Y2 (fr) 1985-01-30 1985-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1166985U JPH0229724Y2 (fr) 1985-01-30 1985-01-30

Publications (2)

Publication Number Publication Date
JPS61127639U true JPS61127639U (fr) 1986-08-11
JPH0229724Y2 JPH0229724Y2 (fr) 1990-08-09

Family

ID=30494002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1166985U Expired JPH0229724Y2 (fr) 1985-01-30 1985-01-30

Country Status (1)

Country Link
JP (1) JPH0229724Y2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02305449A (ja) * 1989-02-28 1990-12-19 Kokusai Electric Co Ltd ウェーハ枚数計数装置
JPH03237739A (ja) * 1990-02-15 1991-10-23 Kokusai Electric Co Ltd ウェーハ枚数計数装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02305449A (ja) * 1989-02-28 1990-12-19 Kokusai Electric Co Ltd ウェーハ枚数計数装置
JPH03237739A (ja) * 1990-02-15 1991-10-23 Kokusai Electric Co Ltd ウェーハ枚数計数装置

Also Published As

Publication number Publication date
JPH0229724Y2 (fr) 1990-08-09

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