JPS61127639U - - Google Patents
Info
- Publication number
- JPS61127639U JPS61127639U JP1166985U JP1166985U JPS61127639U JP S61127639 U JPS61127639 U JP S61127639U JP 1166985 U JP1166985 U JP 1166985U JP 1166985 U JP1166985 U JP 1166985U JP S61127639 U JPS61127639 U JP S61127639U
- Authority
- JP
- Japan
- Prior art keywords
- section
- photoelectric sensor
- substrate
- wafer
- emitting section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1166985U JPH0229724Y2 (fr) | 1985-01-30 | 1985-01-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1166985U JPH0229724Y2 (fr) | 1985-01-30 | 1985-01-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61127639U true JPS61127639U (fr) | 1986-08-11 |
JPH0229724Y2 JPH0229724Y2 (fr) | 1990-08-09 |
Family
ID=30494002
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1166985U Expired JPH0229724Y2 (fr) | 1985-01-30 | 1985-01-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0229724Y2 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02305449A (ja) * | 1989-02-28 | 1990-12-19 | Kokusai Electric Co Ltd | ウェーハ枚数計数装置 |
JPH03237739A (ja) * | 1990-02-15 | 1991-10-23 | Kokusai Electric Co Ltd | ウェーハ枚数計数装置 |
-
1985
- 1985-01-30 JP JP1166985U patent/JPH0229724Y2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02305449A (ja) * | 1989-02-28 | 1990-12-19 | Kokusai Electric Co Ltd | ウェーハ枚数計数装置 |
JPH03237739A (ja) * | 1990-02-15 | 1991-10-23 | Kokusai Electric Co Ltd | ウェーハ枚数計数装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0229724Y2 (fr) | 1990-08-09 |
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