JPS61127639U - - Google Patents

Info

Publication number
JPS61127639U
JPS61127639U JP1166985U JP1166985U JPS61127639U JP S61127639 U JPS61127639 U JP S61127639U JP 1166985 U JP1166985 U JP 1166985U JP 1166985 U JP1166985 U JP 1166985U JP S61127639 U JPS61127639 U JP S61127639U
Authority
JP
Japan
Prior art keywords
section
photoelectric sensor
substrate
wafer
emitting section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1166985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0229724Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1166985U priority Critical patent/JPH0229724Y2/ja
Publication of JPS61127639U publication Critical patent/JPS61127639U/ja
Application granted granted Critical
Publication of JPH0229724Y2 publication Critical patent/JPH0229724Y2/ja
Expired legal-status Critical Current

Links

JP1166985U 1985-01-30 1985-01-30 Expired JPH0229724Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1166985U JPH0229724Y2 (enrdf_load_stackoverflow) 1985-01-30 1985-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1166985U JPH0229724Y2 (enrdf_load_stackoverflow) 1985-01-30 1985-01-30

Publications (2)

Publication Number Publication Date
JPS61127639U true JPS61127639U (enrdf_load_stackoverflow) 1986-08-11
JPH0229724Y2 JPH0229724Y2 (enrdf_load_stackoverflow) 1990-08-09

Family

ID=30494002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1166985U Expired JPH0229724Y2 (enrdf_load_stackoverflow) 1985-01-30 1985-01-30

Country Status (1)

Country Link
JP (1) JPH0229724Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02305449A (ja) * 1989-02-28 1990-12-19 Kokusai Electric Co Ltd ウェーハ枚数計数装置
JPH03237739A (ja) * 1990-02-15 1991-10-23 Kokusai Electric Co Ltd ウェーハ枚数計数装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02305449A (ja) * 1989-02-28 1990-12-19 Kokusai Electric Co Ltd ウェーハ枚数計数装置
JPH03237739A (ja) * 1990-02-15 1991-10-23 Kokusai Electric Co Ltd ウェーハ枚数計数装置

Also Published As

Publication number Publication date
JPH0229724Y2 (enrdf_load_stackoverflow) 1990-08-09

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