JPS6112675Y2 - - Google Patents

Info

Publication number
JPS6112675Y2
JPS6112675Y2 JP12375879U JP12375879U JPS6112675Y2 JP S6112675 Y2 JPS6112675 Y2 JP S6112675Y2 JP 12375879 U JP12375879 U JP 12375879U JP 12375879 U JP12375879 U JP 12375879U JP S6112675 Y2 JPS6112675 Y2 JP S6112675Y2
Authority
JP
Japan
Prior art keywords
blanking
circuit
electron beam
electrode
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12375879U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5640659U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12375879U priority Critical patent/JPS6112675Y2/ja
Publication of JPS5640659U publication Critical patent/JPS5640659U/ja
Application granted granted Critical
Publication of JPS6112675Y2 publication Critical patent/JPS6112675Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP12375879U 1979-09-07 1979-09-07 Expired JPS6112675Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12375879U JPS6112675Y2 (enrdf_load_stackoverflow) 1979-09-07 1979-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12375879U JPS6112675Y2 (enrdf_load_stackoverflow) 1979-09-07 1979-09-07

Publications (2)

Publication Number Publication Date
JPS5640659U JPS5640659U (enrdf_load_stackoverflow) 1981-04-15
JPS6112675Y2 true JPS6112675Y2 (enrdf_load_stackoverflow) 1986-04-19

Family

ID=29355686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12375879U Expired JPS6112675Y2 (enrdf_load_stackoverflow) 1979-09-07 1979-09-07

Country Status (1)

Country Link
JP (1) JPS6112675Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010232035A (ja) * 2009-03-27 2010-10-14 Fujifilm Corp 電子ビーム描画方法、電子ビーム描画装置、モールドの製造方法および磁気ディスク媒体の製造方法

Also Published As

Publication number Publication date
JPS5640659U (enrdf_load_stackoverflow) 1981-04-15

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