JPS61122912A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPS61122912A
JPS61122912A JP24288184A JP24288184A JPS61122912A JP S61122912 A JPS61122912 A JP S61122912A JP 24288184 A JP24288184 A JP 24288184A JP 24288184 A JP24288184 A JP 24288184A JP S61122912 A JPS61122912 A JP S61122912A
Authority
JP
Japan
Prior art keywords
thin film
film magnetic
ferromagnetic material
thin
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24288184A
Other languages
Japanese (ja)
Inventor
Takeshi Takahashi
健 高橋
Hiroshi Yoda
養田 広
Kiyoshi Sasaki
清志 佐々木
Kazuo Nakamura
和夫 中村
Nobumasa Kaminaka
紙中 伸征
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP24288184A priority Critical patent/JPS61122912A/en
Publication of JPS61122912A publication Critical patent/JPS61122912A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/1278Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To obtain a good recording density characteristic without unevenness up to a high density area by making a ridgeline of the end part of a ferromagnetic material in a recording media travelling surface non-parallel to an MR element of a thin film magnetic detecting part. CONSTITUTION:At a ferromagnetic material 1 of ferrite, etc., a notch groove 2 is formed from a thin film magnetic detecting part forming surface to a recording media travelling surface, and in it, a non-magnetic material 3 is charged. The notch groove 2 is made non-parallel for a magnetoresistance effect element (MR element) 4 of a thin film magnetic detecting part, and in such a case, formed elliptically. For this reason, the interference of a signal flux will not co-lectively occur at the special recording density, and the good recording density characteristic without unevenness up to a high density area can be obtained.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は垂直磁気記録媒体に記録された信号磁化の再生
に好適な磁気抵抗効果型の薄膜磁気ヘッドに関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetoresistive thin film magnetic head suitable for reproducing signal magnetization recorded on a perpendicular magnetic recording medium.

従来の技術 磁気抵抗効果型の垂直磁化再生ヘッドとして本発明者等
は例えば特開昭58−179927号公報に示される構
造を提案した。すなわち第6図にその構造を示す様に、
MR素子4と強磁性薄膜13とで構成される磁気検出部
および強磁性体1よりなるリターンコアを有するもので
ある。再生動作時において、垂直異方性膜8に記録され
である信号磁化からの再生磁束は強磁性薄膜13を通っ
てMR素子4に導かれ、更に強磁性体1f:通って記録
媒体7に流入し強磁性薄膜9を通って元の信号磁化に戻
る。このとき、MR素子の比抵抗が再生磁束に応じて変
化することを利用して再生信号を得るものである。尚、
上記磁気検出部はMR素子単体で構成してあってもその
動作は同じである。
2. Description of the Related Art As a magnetoresistive type perpendicular magnetization reproducing head, the present inventors have proposed, for example, a structure shown in Japanese Patent Application Laid-open No. 179927/1983. In other words, as the structure is shown in Figure 6,
It has a magnetic detection section made up of an MR element 4 and a ferromagnetic thin film 13, and a return core made of a ferromagnetic material 1. During a reproducing operation, the reproducing magnetic flux from the signal magnetization recorded on the perpendicular anisotropic film 8 is guided to the MR element 4 through the ferromagnetic thin film 13, and further passes through the ferromagnetic material 1f and flows into the recording medium 7. The signal passes through the ferromagnetic thin film 9 and returns to the original signal magnetization. At this time, a reproduction signal is obtained by utilizing the fact that the specific resistance of the MR element changes in accordance with the reproduction magnetic flux. still,
Even if the above-mentioned magnetic detection section is composed of a single MR element, its operation is the same.

(特開昭5a−1yes2a) 発明が解決しようとする問題点 しかし、この様な構造のヘッドの記録媒体走行面におい
て、第6図に示すように強磁性体1の端部の稜線11が
磁気検出部(この例では強磁性薄M13)の稜線と千行
く配置され、更に上記稜線11と磁気検出部との距離が
比較的短かく、かつ磁気検出部形成面における強磁性体
端部と記録媒体対向部までの距離と同程直の場合は、記
録媒体の信号磁化から発生した磁束がMR素子4t−通
って強磁性体1に流入して記録媒体7に還流する際に、
強磁性体1の端部(稜線11)に集中し、その下部にあ
る信号磁化からの磁束と干渉を起こす為に記録密度特性
上に凹凸を発生するという問題点があった。
(Japanese Unexamined Patent Publication No. 5A-1 Yes2A) Problems to be Solved by the Invention However, in the recording medium running surface of a head having such a structure, as shown in FIG. It is arranged 1,000 times the ridgeline of the detecting section (ferromagnetic thin M13 in this example), and furthermore, the distance between the ridgeline 11 and the magnetic detecting section is relatively short, and the edge of the ferromagnetic material on the surface where the magnetic detecting section is formed is located parallel to the recording section. If the distance is as straight as the distance to the medium facing part, when the magnetic flux generated from the signal magnetization of the recording medium passes through the MR element 4t, flows into the ferromagnetic material 1, and returns to the recording medium 7,
There is a problem in that unevenness occurs in the recording density characteristics because the magnetic flux is concentrated at the edge (edge line 11) of the ferromagnetic material 1 and interferes with the magnetic flux from the signal magnetization located below.

そこで、本発明は上記のような記録密度特性の凹凸を解
消し、短波長領域まで効率良く垂直磁化を再生する薄膜
磁気ヘッドを提供することを目的とする。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a thin film magnetic head that eliminates the above-described irregularities in recording density characteristics and efficiently reproduces perpendicular magnetization up to a short wavelength region.

問題を解決するための手段 本発明は上記問題点を解決するために、上記のように軟
磁性層を有する記録媒体と組み合わせることにより閉磁
路を構成する薄膜磁気検出部と。
Means for Solving the Problems In order to solve the above-mentioned problems, the present invention provides a thin-film magnetic detection section that forms a closed magnetic path by combining with a recording medium having a soft magnetic layer as described above.

うち少くとも薄膜磁気検出部と対向する領域の稜線が、
薄膜磁気検出部の稜線に対し非平行になるように構成し
たものである。
At least the ridgeline of the area facing the thin film magnetic detection section is
It is configured to be non-parallel to the ridgeline of the thin film magnetic detection section.

作用 本発明は上記した構成により、還流磁束の集中する強磁
性体端部の下部にある信号磁化が稜線方向の位置によっ
て異なる為に、特定の記録密度のところで集中的に信号
磁束が干渉し合うということは無くなり、記録密度特性
上の凹凸が解消する。
According to the above-described configuration, the signal magnetization of the lower part of the ferromagnetic material end where the return magnetic flux concentrates differs depending on the position in the ridge line direction, so that the signal magnetic flux interferes intensively at a specific recording density. This is no longer the case, and unevenness in recording density characteristics is eliminated.

実施例 第1図は本発明の一実施例を示すもので、a図は斜視図
、b図は記録媒体走行面からみた平面図、0図は薄膜磁
気検出部形成面からみた側面図、d図はa図におけるム
ーム′断面図である。
Embodiment Figure 1 shows an embodiment of the present invention, in which figure a is a perspective view, figure b is a plan view seen from the recording medium running surface, figure 0 is a side view seen from the surface on which the thin-film magnetic sensing portion is formed, and d. The figure is a sectional view of Moum' in figure a.

同図において1はフェライト等の強磁性体で薄膜磁気検
出部形成面から記録媒体走行面にかけて切欠溝2が形成
されておシ、その中にはガラス等の非磁性材3が充填さ
れている。記録媒体走行面におけるこの切欠溝の形状(
稜線11)は薄膜磁気検出部形成面の稜線に対し非平行
になるように形成されており1本実施例の場合は第1図
すに示すように楕円状に形成されている。4は強磁性薄
膜よりなる磁気抵抗効果(MR)素子でその幅方向の一
端は記録媒体走行面に露呈し、他端は強磁性体1と磁気
的に結合するように配置されている。
In the figure, reference numeral 1 is a ferromagnetic material such as ferrite, and a notched groove 2 is formed from the surface on which the thin film magnetic detection portion is formed to the recording medium running surface, and a non-magnetic material 3 such as glass is filled in the notched groove 2. . The shape of this notch groove on the recording medium running surface (
The ridgeline 11) is formed so as to be non-parallel to the ridgeline of the surface on which the thin-film magnetic detection portion is formed, and in the case of this embodiment, is formed in an elliptical shape as shown in FIG. Reference numeral 4 denotes a magnetoresistive (MR) element made of a ferromagnetic thin film, one end of which in the width direction is exposed to the recording medium running surface, and the other end is arranged so as to be magnetically coupled to the ferromagnetic material 1.

MR素子4の長手方向の両端には電流供給用の電極6,
6が形成されている。記録媒体7はペース1oの上にパ
ーマロイなどの強磁性薄膜9、さらにCo−0rなどの
垂直異方性膜8を形成した垂直二層膜媒体である。
At both ends of the MR element 4 in the longitudinal direction, electrodes 6 for supplying current,
6 is formed. The recording medium 7 is a perpendicular two-layer medium in which a ferromagnetic thin film 9 such as permalloy and a perpendicular anisotropic film 8 such as Co-0r are formed on a paste 1o.

第2図は上述したような切欠溝を有するヘッド基板の一
例を示すもので、フェライトブロックよりなる強磁性体
1の薄膜磁気検出部形成面からこれに略直交する記録媒
体走行面にかけてダイシングソー等で斜めに切欠溝2を
形成する。その際。
FIG. 2 shows an example of a head substrate having the above-mentioned notched grooves, in which a dicing saw or the like is used to extend the area from the thin film magnetic detection section forming surface of the ferrite block 1 to the recording medium running surface substantially perpendicular thereto. Form the notch groove 2 diagonally. that time.

砥石の先端断面形状を円弧あるいは適当な楕円形状にし
ておく。その後、切欠溝2の中にガラス等の非磁性材3
f:充填し、研削および研磨で平滑な面を形成する。第
3図は第2図のヘッド基板の一部を拡大したもので、平
滑化した薄膜磁気検出部形成面の上に1例えばML−F
・合金を蒸着手段でSOO入程度の厚さに被着し、写真
食刻技術でMR素子4の幅方向の一端部が強磁性体1と
磁気的に結合するように配置し更にMR素子4の長手方
向の両端に電極6,6を配置した薄膜磁気検出部を形成
した状態を示しである。その後、保護層を配置した後、
一点鎖線B−B’の位置まで前面を研磨して仕上げるも
のである。
The cross-sectional shape of the tip of the whetstone should be a circular arc or a suitable ellipse. After that, a non-magnetic material 3 such as glass is inserted into the notch groove 2.
f: Fill and form a smooth surface by grinding and polishing. FIG. 3 is an enlarged view of a part of the head substrate shown in FIG. 2, in which a film such as ML-F
・The alloy is deposited to a thickness of SOO by a vapor deposition method, and arranged so that one end in the width direction of the MR element 4 is magnetically coupled to the ferromagnetic material 1 using a photolithography technique, and then the MR element 4 is This figure shows a state in which a thin film magnetic detection section is formed in which electrodes 6, 6 are arranged at both ends in the longitudinal direction. Then, after placing the protective layer,
The front surface is polished to the position indicated by the dashed line BB'.

この様な構成にすることにより、垂直異方性膜8に記録
された信号磁化から発生する磁束はMR素子4の下端部
から導かれてMR素子4を通り、その上端部から強磁性
体1に流入し、更に記録媒体7の強磁性薄膜9に導かれ
て元の信号磁化に戻るという閉磁路構造を構成すると同
時に、記録媒体走行面における強磁性体1の端部(稜線
11)が楕円状になっている為に還流磁束の集中する強
磁性体端部の下部にある信号磁化が稜線方向の位置によ
って異なり、特定の記録密度のところで集中的に信号磁
束が干渉し合うということは無くなり高密度領域まで凹
凸の無い良好な記録密度特性が得られる。第4図は再生
特性を示したもので。
With this configuration, the magnetic flux generated from the signal magnetization recorded in the perpendicular anisotropic film 8 is guided from the lower end of the MR element 4, passes through the MR element 4, and passes through the ferromagnetic material 1 from its upper end. At the same time, a closed magnetic circuit structure is formed in which the signal flows into the ferromagnetic thin film 9 of the recording medium 7 and returns to the original signal magnetization. Because of this shape, the signal magnetization at the bottom of the ferromagnetic end where the return magnetic flux concentrates differs depending on the position in the ridge line direction, and the signal magnetic flux does not interfere with each other intensively at a specific recording density. Good recording density characteristics without unevenness can be obtained up to the high density area. Figure 4 shows the reproduction characteristics.

横軸に記録密度をとり、縦軸に相対出力をとっている。The horizontal axis shows the recording density, and the vertical axis shows the relative output.

曲線イは稜線11がMR素子4と平行になっている場合
で稜線11からMR素子4tでの距離の偶数分の1のビ
ット長に相当する記録密度付近にディップ現象が生じて
いることがわかる。曲線口は本発明の場合で、高密度領
域までディップ現象が見られない。
Curve A shows the case where the ridge line 11 is parallel to the MR element 4, and it can be seen that a dip phenomenon occurs near the recording density corresponding to a bit length of an even number of the distance from the ridge line 11 to the MR element 4t. . The curved opening is the case of the present invention, and no dip phenomenon is observed up to the high-density region.

尚、稜線形状は楕円形状で無くとも磁気検出部の稜線と
非平行な形状であれば上記作用を実現出来るが、製造方
法の点から例えば砥石の管理、量産性の点で、楕円形状
が、適している。
Note that the above effect can be achieved even if the ridgeline shape is non-parallel to the ridgeline of the magnetic detection part, but from the viewpoint of the manufacturing method, for example, in terms of grindstone management and mass production, the elliptical shape is Are suitable.

尚、薄膜磁気検出部としては第6図に示したように、M
R素子4の記録媒体側にSiO□などの絶絶層12を介
してパーマロイ等の強磁性薄膜13を配置しても、上述
の効果は全く同様である。この様な構造の場合は、MR
素子4を流れる電流が記録媒体7にリークすることが無
い為、記録媒体の表面処理あるいは材料面での選択等の
制限が緩和され応用範囲が拡大する。
In addition, as shown in FIG. 6, the thin film magnetic detection section is M
Even if a ferromagnetic thin film 13 such as permalloy is disposed on the recording medium side of the R element 4 with an insulating layer 12 such as SiO□ interposed therebetween, the above-mentioned effect is exactly the same. In the case of such a structure, MR
Since the current flowing through the element 4 does not leak to the recording medium 7, restrictions on surface treatment of the recording medium or selection of materials are relaxed, and the range of applications is expanded.

発明の効果 以上のように、本発明による薄膜磁気ヘッドは高密度に
記録された垂直磁化を高効率で再生すると同時に、信号
磁束の干渉が特定の記録密度のところで集中的に発生す
るということが無い為、高密度領域まで凹凸の無い良好
な記録密度特性が得られる。さらに、ヘッド・媒体間の
相対速度が小さくでも充分な再生出力が得られると同時
に今後予想されるマルチトラック化においても好適な構
成である。
Effects of the Invention As described above, the thin film magnetic head according to the present invention can reproduce perpendicular magnetization recorded at high density with high efficiency, and at the same time, it is possible to prevent interference of signal magnetic flux from occurring concentratedly at a specific recording density. Since there is no unevenness, it is possible to obtain good recording density characteristics without unevenness even in high-density areas. Furthermore, sufficient reproduction output can be obtained even if the relative speed between the head and the medium is small, and at the same time, this configuration is suitable for multi-tracking expected in the future.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図1は本発明の一実施例における薄膜磁気ヘッドの
斜視図、第1図すは記録媒体側からみた平面図、N1図
Cは薄膜磁気検出部側からみた側面図、第1図11 F
i第第1為aムーム′断面図、第2図は、本発明の一実
施例のヘッド基板の斜視図、第3図は第2図の部分拡大
図、第4図は本発明の一実施例の薄膜磁気ヘッドの再生
特性を示す特性図、第6図は従来の薄膜磁気ヘッドの断
面図、第6図は従来の薄膜磁気ヘッドの記録媒体側から
みた平面図である。 1・・・・・・強磁性体、2・・・・・・切欠溝、3・
・・・・・非磁性体、4・・・・・・MR素子、5,6
・・・・・・電極。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図 第2図 第3図 ど切又客 第4図 /   10   /θθ R1ろシk 91  )J、   ChFRpr>第5
図 第6図
FIG. 1 is a perspective view of a thin film magnetic head according to an embodiment of the present invention, FIG. 1 is a plan view seen from the recording medium side, and FIG. F
FIG. 2 is a perspective view of a head substrate according to an embodiment of the present invention, FIG. 3 is a partially enlarged view of FIG. 2, and FIG. 4 is a cross-sectional view of an embodiment of the present invention. FIG. 6 is a sectional view of a conventional thin film magnetic head, and FIG. 6 is a plan view of the conventional thin film magnetic head as viewed from the recording medium side. 1...Ferromagnetic material, 2...Notch groove, 3.
...Nonmagnetic material, 4...MR element, 5,6
······electrode. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2 Figure 3
Figure 6

Claims (4)

【特許請求の範囲】[Claims] (1)前面を記録媒体走行面とする強磁性体と、この強
磁性体の一側面から前面にかけて設けた切欠に充填した
非磁性体と、前記非磁性体の上に付着形成され一端が前
記強磁性体の上記側面の一部と磁気結合するとともに他
端が記録媒体に対向する薄膜磁気検出部とを備え、前記
記録媒体走行面における強磁性体端部のうち少くとも前
記薄膜磁気検出部に対向する領域の稜線が、前記薄膜磁
気検出部の稜線に対し非平行であることを特徴とする薄
膜磁気ヘッド。
(1) A ferromagnetic material whose front surface serves as a recording medium running surface, a non-magnetic material filled in a notch provided from one side of the ferromagnetic material to the front surface, and a non-magnetic material that is adhered and formed on the non-magnetic material and whose one end is a thin film magnetic detection section that is magnetically coupled to a part of the side surface of the ferromagnetic material and whose other end faces the recording medium; A thin film magnetic head characterized in that an edge line of a region facing the thin film magnetic detection section is non-parallel to an edge line of the thin film magnetic detection section.
(2)前記記録媒体走行面における強磁性体端部の稜線
が楕円形状であることを特徴とする特許請求の範囲第1
項記載の薄膜磁気ヘッド。
(2) Claim 1, characterized in that the ridgeline of the end of the ferromagnetic material on the recording medium running surface has an elliptical shape.
The thin film magnetic head described in Section 1.
(3)前記薄膜磁気検出部は強磁性材よりなる薄膜磁気
抵抗効果素子単体で構成していることを特徴とする特許
請求の範囲第1項または第2項記載の薄膜磁気ヘッド。
(3) The thin-film magnetic head according to claim 1 or 2, wherein the thin-film magnetic detection section is constituted by a single thin-film magnetoresistive element made of a ferromagnetic material.
(4)前記薄膜磁気検出部が強磁性材よりなる薄膜磁気
抵抗効果素子と、この薄膜磁気抵抗効果素子の幅方向の
一端部と電気絶縁体を介して磁気的に結合し、かつ他の
一端部が記録媒体に面した強磁性薄膜とで構成している
ことを特徴とする特許請求の範囲第1項または第2項記
載の薄膜磁気ヘッド。
(4) The thin film magnetic detection section is magnetically coupled to a thin film magnetoresistive element made of a ferromagnetic material and one end in the width direction of the thin film magnetoresistive element via an electrical insulator, and the other end 3. The thin-film magnetic head according to claim 1, wherein the thin-film magnetic head comprises a ferromagnetic thin film whose portion faces the recording medium.
JP24288184A 1984-11-16 1984-11-16 Thin film magnetic head Pending JPS61122912A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24288184A JPS61122912A (en) 1984-11-16 1984-11-16 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24288184A JPS61122912A (en) 1984-11-16 1984-11-16 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS61122912A true JPS61122912A (en) 1986-06-10

Family

ID=17095616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24288184A Pending JPS61122912A (en) 1984-11-16 1984-11-16 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS61122912A (en)

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