JPS61120348A - Apparatus for producing magnetic recording medium - Google Patents

Abstract

PURPOSE:To produce a medium provided with a thin magnetic film having large saturation magnetization, high hardness and excellent stability by forming a thin iron nitride film by both means for ion implantation and vapor deposition on a support consisting of a nonmagnetic body for supporting a magnetic recording medium. CONSTITUTION:This apparatus has a nitrogen ion implanting device 1 and an evaporator 2 using iron as a member for evaporation and is provided with the implanting end of the device 1 and the member for evaporation of the evaporator 2 so as to face the nonmagnetic support. The support 3 is successive ly let off from a roller 4 and is so transferred as to be taken up by a roller 5. The nitrogen ions from the device 1 are accelerated to collide against the support 3 in the transfer process thus intruding into the surface of the support 3. on the other hard, iron is evaporated from the evaporator 2 and sticks similar ly on a target as the support 3. The nitrogen ions and the evaporating particles of the iron react with each other on the surface of the support 3 where the film of the iron nitride is formed.

Description

[Detailed description of the invention] (Industrial application field) The present invention relates to a magnetic recording medium manufacturing apparatus.

- (Prior Art) As is well known, magnetic films, magnetic disks, and other magnetic recording media are made by depositing magnetic powder such as ferromagnetic metal oxide powder or ferromagnetic metal powder 1 ferromagnetic alloy powder on a non-magnetic material. Coated magnetic recording media are widely used, in which a material is dispersed in an organic binder and then coated and dried.

On the other hand, in recent years, the demand for high-density recording has increased, and along with this, ferromagnetic metal thin films formed by vacuum evaporation, sputtering, ion blating, electroplating, or electroless plating without using a binder are used as magnetic recording layers. At the same time, non-binder-based magnetic recording media are attracting attention.

As for recording systems, the perpendicular magnetic recording system, which enables higher density recording, is attracting attention, and various efforts are being made to put it into practical use.

In non-binder magnetic recording media, ferromagnetic metals with higher saturation magnetization than oxides can be formed as thin films without containing a binder, which is a non-magnetic material, so they can be made into ultra-thin films that are advantageous for high density. It has the advantage of However, metals alone tend to deteriorate in properties due to oxidation, and lack strength against wear.
There are major problems such as low adhesion to the support.

(Problems to be Solved by the Invention) An object of the present invention is to provide an apparatus for manufacturing a magnetic recording medium having a magnetic thin film having large saturation magnetization, high hardness, and excellent stability.

(Means for Solving the Problems) This invention forms an iron nitride thin film on a non-magnetic support for supporting a magnetic recording medium by both ion implantation and vapor deposition. It is characterized by

More specifically, it has a nitrogen ion implanter and an evaporator using iron as an evaporation member, and the injection end of the ion implanter and the evaporation member of the evaporator are opposed to the nonmagnetic support. The iron serving as the evaporation member is evaporated onto the surface of the support using the support as a target, and nitrogen ions are implanted, thereby depositing iron nitride, which is the magnetic recording medium, onto the surface of the support. It is characterized in that it is formed by forming a film.

(Function) The ion implantation referred to here means so-called ion implantation, in which ions are accelerated and collided with a target sample to penetrate into the target sample. That is, after extracting ions (nitrogen ions in this invention) generated by a high-frequency discharge type, electron impact type, PIG type, duoplasmatron type, sputter type, etc. ion source, converging and accelerating them, Separate the mass and irradiate the sample on the target with this mass.

Further, the term "vapor deposition" as used herein means so-called vacuum deposition, in which a metal (iron in this invention) is heated and evaporated in a vacuum to form a metal coating. As a heating method for the evaporation source, heating means such as resistance heating, electron beam, induction heating, plasma discharge, arc, etc. can be used.

Nitrogen ions from the ion implanter and iron evaporated from the evaporator react with each other to form an alloy on a support made of a non-magnetic material, which is a magnetic recording medium, to produce iron nitride. Iron is evaporated by an evaporator and directed to the support, but compared to sputter deposition, it is possible to form a much thinner and more uniform film, and the film formation rate is also much faster.

Therefore, thin film iron nitride can be efficiently produced.

Note that as the support, any non-magnetic metal such as aluminum, brass, zinc, or non-metal such as plastics, ceramics, and glass can be used.

(Embodiment) An embodiment of the present invention will be described with reference to the drawings. In FIG. 1, 1 is an ion implanter, and 2 is an evaporator.

3 is a support which is a magnetic recording medium, and in this example, a non-magnetic film is used. 4 is a roller for feeding out this film, and 5 is a roller for winding. The support body 3 is sequentially let out from the roller 4.

It is transported so as to be wound up by rollers 5.

The nitrogen ions from the syringe 1 are accelerated and collide with the support 3 which is in the transfer process as described above, and penetrate into the surface of the support 3. On the other hand, iron is evaporated from the evaporator 2 and also adheres to the target 3.

These nitrogen ions and evaporated iron particles react on the surface of the support 3, and iron nitride is formed thereon.

FIG. 2 is an x, m diffraction diagram of an iron nitride thin film prepared according to the present invention. Note that this iron nitride thin film was created under conditions of nitrogen beam energy of 20 KeV, nitrogen beam current of 20 mA, and iron evaporation rate of about 1 to 6 persons/sec. As can be seen from this figure, Fe4N is perpendicular to the support.
It turns out that crystals have precipitated. Furthermore, the saturation magnetization of this thin film was 150 emn/g, a high value comparable to that of metal iron, indicating that it is useful as a magnetic recording medium.

(Effects of the Invention) As detailed above, according to the present invention, iron is known to have the largest saturation magnetization among iron and iron compounds, and has higher hardness and stability than metal iron. An excellent iron nitride thin film can be formed in an ultra-thin film with a uniform thickness, and the film formation rate can be faster than that by sputtering.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is an X-ray diffraction diagram. 1...Ion implanter, 2...Evaporator, 3...Target Isao 1st previous Kakutomo 2θ (skin)

Claims (1)

[Claims] It consists of an ion implanter that accelerates and implants nitrogen ions, and an evaporator that uses iron as an evaporation member and evaporates the iron, and the injection end of the ion implanter and the evaporation member of the evaporator Iron is arranged to face a support for a magnetic recording medium made of a non-magnetic material, and the support is deposited by evaporating the iron of the evaporation member by the evaporator and implanting nitrogen ions by the ion implanter. A magnetic recording medium manufacturing apparatus that forms an iron nitride thin film, which is a magnetic recording medium, on the surface of a body.