JPS61120037A - 放物面鏡の検査装置 - Google Patents

放物面鏡の検査装置

Info

Publication number
JPS61120037A
JPS61120037A JP24056084A JP24056084A JPS61120037A JP S61120037 A JPS61120037 A JP S61120037A JP 24056084 A JP24056084 A JP 24056084A JP 24056084 A JP24056084 A JP 24056084A JP S61120037 A JPS61120037 A JP S61120037A
Authority
JP
Japan
Prior art keywords
light
parabolic mirror
mirror
point
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24056084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0252209B2 (enrdf_load_stackoverflow
Inventor
Tomoyuki Kikukawa
知之 菊川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP24056084A priority Critical patent/JPS61120037A/ja
Publication of JPS61120037A publication Critical patent/JPS61120037A/ja
Publication of JPH0252209B2 publication Critical patent/JPH0252209B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005—Testing of reflective surfaces, e.g. mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP24056084A 1984-11-16 1984-11-16 放物面鏡の検査装置 Granted JPS61120037A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24056084A JPS61120037A (ja) 1984-11-16 1984-11-16 放物面鏡の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24056084A JPS61120037A (ja) 1984-11-16 1984-11-16 放物面鏡の検査装置

Publications (2)

Publication Number Publication Date
JPS61120037A true JPS61120037A (ja) 1986-06-07
JPH0252209B2 JPH0252209B2 (enrdf_load_stackoverflow) 1990-11-09

Family

ID=17061339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24056084A Granted JPS61120037A (ja) 1984-11-16 1984-11-16 放物面鏡の検査装置

Country Status (1)

Country Link
JP (1) JPS61120037A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109163682A (zh) * 2018-09-11 2019-01-08 苏州如期光电科技有限公司 一种长焦大离轴量离轴抛物面的检测方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109163682A (zh) * 2018-09-11 2019-01-08 苏州如期光电科技有限公司 一种长焦大离轴量离轴抛物面的检测方法

Also Published As

Publication number Publication date
JPH0252209B2 (enrdf_load_stackoverflow) 1990-11-09

Similar Documents

Publication Publication Date Title
CA1139441A (en) Optical imaging system provided with an opto-electronic detection system for determining a deviation between the image plane of the imaging system and a second plane on which an image is to be formed
JPH0151801B2 (enrdf_load_stackoverflow)
JP6711899B2 (ja) レーザビームの特性を決定するための装置および方法
JPS5952704A (ja) 光学的検査装置および方法
JP2001059712A (ja) 立体形状検出方法及びその装置並びに共焦点検出装置
JP2000505906A (ja) 光学式検査装置及びこの検査装置が設けられているリソグラフィ装置
CN118654865A (zh) 一种物镜检测方法和相关装置
US6100519A (en) Photo-detector based calculating means having a grating wheel with integrated lenses
JPS61120037A (ja) 放物面鏡の検査装置
KR0170783B1 (ko) 표면 광학 주사 장치
US5274420A (en) Beamsplitter type lens elements with pupil-plane stops for lithographic systems
US4089607A (en) Optical interferometer
KR19980081410A (ko) 물체의 형태를 비접촉식으로 측정하는 방법 및 장치
JPH063625A (ja) 検査装置
JPH06288735A (ja) 放物面鏡形状検査測定用の位相共役干渉計
JP3106521B2 (ja) 透明基板の光学的検査装置
SU1675827A1 (ru) Микроскоп
CN101576436A (zh) 一种汞灯灯室的光学特性测试装置及其测试方法
JP2007218931A (ja) 光学面の形状測定方法および装置および記録媒体
US3503674A (en) Scatterplate with antireflection coatings
JP3470729B2 (ja) 屈折率分布の測定方法および測定装置
JP4007473B2 (ja) 波面形状測定方法
JPH04297810A (ja) 光学検査装置
JP4334327B2 (ja) 対象物の大きさおよび位置を測定するためのホログラフィ光学素子およびその使用方法ならびに当該ホログラフィ光学素子を有する装置
JP2915599B2 (ja) トロイダル面の測定方法及び測定装置