JPS61120009A - Level utilizing semiconductor sensor - Google Patents

Abstract

PURPOSE:To measure levelness with high precision by arranging an optoelec tromotive force type semiconductor sensor in a case provided with a slit which stops down irradiation light at the upper part. CONSTITUTION:The level 1 is provided with the case 2, the slit 3 at the upper part of the case, and the optoelectromotive force type semiconductor sensor 4 at the internal bottom part of the case. Light entering the case 2 through the slit 3 illuminates the semiconductor sensor 4 to generate a potential difference between electrodes 5a and 5b positioned on the same plane parallel to a faying surface, and this electromotive force varies linearly, so the potential between the electrodes 5a and 5b is measured and utilized to measure the irradiation position of the light. When the levelness is measured, the level 1 on a body to be measured is irradiated with light and then the output signal of the level 1 is inputted to an MPU10 as a control signal through an amplifier 9 and compared with a reference signal to sends the position signal of a positioner 8 to a positioner controller 11. Thus, the levelness of the body 7 to be measured is known and the levelness is adjusted on the basis of said levelness.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a spirit level for detecting the levelness of an object to be measured, and particularly to a spirit level suitable for highly accurate levelness detection.

[Background of the invention]

In recent years, with the development of ultra-precision processing technology including semiconductor manufacturing technology, there has been a demand for the establishment of highly accurate position control technology. However, since the accuracy of position control depends on the accuracy of the detection end, it cannot be achieved with conventional leveling, and there are expectations for the practical use of new detection ends. Related to this is, for example, Japanese Patent Publication No. 58-56718 regarding a conventional tilt detection bag W using projected light.

[Purpose of the invention]

An object of the present invention is to provide a spirit level that uses a semiconductor sensor and can measure levelness with high precision.

[Summary of the invention]

Semiconductor sensors generally have a non-linear relationship between the amount of irradiated light and the output voltage, and this characteristic is applicable only to ON-OFF control and not to highly accurate position control.

The present invention uses a photovoltaic semiconductor sensor at the detection end that has a lateral voltage effect in which the photovoltaic output changes linearly depending on the irradiation position of the light beam, making it possible to measure horizontality with high precision. It is.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be explained with reference to FIG. 1 and FIG. In FIGS. 1 and 2, l is a level, which includes a case 2 to prevent external disturbances, a slit 3 provided at the top of the case 2 to narrow down the irradiated light, and a level located at the inner bottom of the case 2.
Electrodes 5a are provided at both ends of the upper surface.

It is composed of a photovoltaic type semiconductor sensor 4 whose photovoltaic force output changes linearly depending on the irradiation position of the light beam, which is a detection element connected to the photovoltaic sensor 5b. The light beam entering the case 2 from the sleeve 3 is irradiated onto the semiconductor sensor 4, and when the semiconductor sensor 4 is irradiated with the light, it creates a potential difference between the electrodes 5a and 5b located in a direction parallel to the bonding surface, that is, on the same surface. arise,
This electromotive force 1. 8 (electrode 5a,
5b), the 1ilf! of the semiconductor sensor 4 changes linearly. By measuring the potential between 5a and Sb, it can be used to measure the light irradiation position.

FIG. 3 is a schematic diagram of a position control device using a level according to the present invention, in which 6 is a light source, 7 is an object to be measured, 8 is a positioner for the object to be measured 7, 9 is an amplifier, 10 is an MPU, and 11 is a positioner. It is a controller, and the positive position 5 is 8 from light #6.
1. : When light is irradiated onto the spirit level 1 on the object to be measured 7 which has been intercepted, the output signal from the spirit level 1 which received the light is sent to the amplifier 9.
The signal is input as a control signal to the MPU 10 via. M
The signal input to the P U lo is compared with a reference signal in the M P U 10, and a position control signal for the positioner 8 is sent to the positioner controller 11 to control the horizontality of the fixed object 7. Adjust.

FIG. 4 shows an example of measuring the levelness of an object to be measured using the level according to the present invention. That is, since the position of the light beam irradiated to the semiconductor sensor 4 disposed in the case 2 of the spirit level 1 changes depending on the inclination of the object 7 to be measured, By measuring the electric potential, it is possible to measure the inclination of the object 7 to be measured as shown in FIG. 4 (a) or 4 (b) with high precision.

〔Effect of the invention〕

As described above, the present invention uses a photovoltaic semiconductor sensor whose photovoltaic output varies linearly depending on the irradiation position of the light beam at the level detection end of the spirit level, so it is possible to achieve highly accurate leveling. Since it is possible to measure the power continuously and also to use weak incident light, it can be applied over a wide range of areas without being affected by the usage environment.

[Brief explanation of drawings]

@ Figure 1 is a plan view schematically showing an embodiment of a level using a semiconductor sensor according to the present invention, Figure ff12 is a front view of the same, and Figure 3 is a schematic diagram of a position control signal using a level according to the present invention. , FIG. 4 is a schematic diagram showing an example of measuring the levelness of an object to be measured using the spirit level according to the present invention. ■・・・Level, 2...Case, 3...
...Slit, 4...Semiconductor sensor, 5a,
5b... Electrode, 6... Light source, 7...
Measured object, 8...Positioner, 9...
・Amplifier, 10...MPU, 11...
Body controller 11 Figure 31''211

Claims (1)

[Claims] 1. A spirit level using a semiconductor sensor, characterized in that a photovoltaic semiconductor sensor is placed inside a case with a slit at the top to narrow down the irradiated light.