JPS61118614U - - Google Patents
Info
- Publication number
- JPS61118614U JPS61118614U JP132385U JP132385U JPS61118614U JP S61118614 U JPS61118614 U JP S61118614U JP 132385 U JP132385 U JP 132385U JP 132385 U JP132385 U JP 132385U JP S61118614 U JPS61118614 U JP S61118614U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- impurity removal
- removal device
- container
- liquid metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012535 impurity Substances 0.000 claims description 9
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 5
- 239000007795 chemical reaction product Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Gas Separation By Absorption (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985001323U JPH0418655Y2 (enExample) | 1985-01-09 | 1985-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985001323U JPH0418655Y2 (enExample) | 1985-01-09 | 1985-01-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61118614U true JPS61118614U (enExample) | 1986-07-26 |
| JPH0418655Y2 JPH0418655Y2 (enExample) | 1992-04-27 |
Family
ID=30473965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985001323U Expired JPH0418655Y2 (enExample) | 1985-01-09 | 1985-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418655Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197221A (ja) * | 1983-06-30 | 1985-10-05 | ジエ−ムズ ア−ル．シエリ− | 反応ガスの改良ゲツタリング用の装置及び方法 |
-
1985
- 1985-01-09 JP JP1985001323U patent/JPH0418655Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197221A (ja) * | 1983-06-30 | 1985-10-05 | ジエ−ムズ ア−ル．シエリ− | 反応ガスの改良ゲツタリング用の装置及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0418655Y2 (enExample) | 1992-04-27 |