JPS61117252U - - Google Patents
Info
- Publication number
- JPS61117252U JPS61117252U JP20213584U JP20213584U JPS61117252U JP S61117252 U JPS61117252 U JP S61117252U JP 20213584 U JP20213584 U JP 20213584U JP 20213584 U JP20213584 U JP 20213584U JP S61117252 U JPS61117252 U JP S61117252U
- Authority
- JP
- Japan
- Prior art keywords
- film
- shuttle
- semiconductor element
- air pressure
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 230000007423 decrease Effects 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20213584U JPH0128681Y2 (enExample) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20213584U JPH0128681Y2 (enExample) | 1984-12-28 | 1984-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61117252U true JPS61117252U (enExample) | 1986-07-24 |
| JPH0128681Y2 JPH0128681Y2 (enExample) | 1989-08-31 |
Family
ID=30764571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20213584U Expired JPH0128681Y2 (enExample) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0128681Y2 (enExample) |
-
1984
- 1984-12-28 JP JP20213584U patent/JPH0128681Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0128681Y2 (enExample) | 1989-08-31 |