JPS61117245U - - Google Patents
Info
- Publication number
- JPS61117245U JPS61117245U JP34185U JP34185U JPS61117245U JP S61117245 U JPS61117245 U JP S61117245U JP 34185 U JP34185 U JP 34185U JP 34185 U JP34185 U JP 34185U JP S61117245 U JPS61117245 U JP S61117245U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- waste water
- semiconductor wafers
- cleaning tank
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000002351 wastewater Substances 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000012993 chemical processing Methods 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 2
- 239000007791 liquid phase Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34185U JPS61117245U (https=) | 1985-01-07 | 1985-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34185U JPS61117245U (https=) | 1985-01-07 | 1985-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61117245U true JPS61117245U (https=) | 1986-07-24 |
Family
ID=30472094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34185U Pending JPS61117245U (https=) | 1985-01-07 | 1985-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61117245U (https=) |
-
1985
- 1985-01-07 JP JP34185U patent/JPS61117245U/ja active Pending
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