JPS61116765U - - Google Patents

Info

Publication number
JPS61116765U
JPS61116765U JP34085U JP34085U JPS61116765U JP S61116765 U JPS61116765 U JP S61116765U JP 34085 U JP34085 U JP 34085U JP 34085 U JP34085 U JP 34085U JP S61116765 U JPS61116765 U JP S61116765U
Authority
JP
Japan
Prior art keywords
swinging
wafer carrier
support
pair
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP34085U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342138Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP34085U priority Critical patent/JPS6342138Y2/ja
Publication of JPS61116765U publication Critical patent/JPS61116765U/ja
Application granted granted Critical
Publication of JPS6342138Y2 publication Critical patent/JPS6342138Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP34085U 1985-01-07 1985-01-07 Expired JPS6342138Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34085U JPS6342138Y2 (enrdf_load_stackoverflow) 1985-01-07 1985-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34085U JPS6342138Y2 (enrdf_load_stackoverflow) 1985-01-07 1985-01-07

Publications (2)

Publication Number Publication Date
JPS61116765U true JPS61116765U (enrdf_load_stackoverflow) 1986-07-23
JPS6342138Y2 JPS6342138Y2 (enrdf_load_stackoverflow) 1988-11-04

Family

ID=30472092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34085U Expired JPS6342138Y2 (enrdf_load_stackoverflow) 1985-01-07 1985-01-07

Country Status (1)

Country Link
JP (1) JPS6342138Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6342138Y2 (enrdf_load_stackoverflow) 1988-11-04

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