JPS61116762U - - Google Patents

Info

Publication number
JPS61116762U
JPS61116762U JP19654484U JP19654484U JPS61116762U JP S61116762 U JPS61116762 U JP S61116762U JP 19654484 U JP19654484 U JP 19654484U JP 19654484 U JP19654484 U JP 19654484U JP S61116762 U JPS61116762 U JP S61116762U
Authority
JP
Japan
Prior art keywords
film
thin film
substrate
forming
functional thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19654484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19654484U priority Critical patent/JPS61116762U/ja
Publication of JPS61116762U publication Critical patent/JPS61116762U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP19654484U 1984-12-28 1984-12-28 Pending JPS61116762U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19654484U JPS61116762U (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19654484U JPS61116762U (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Publications (1)

Publication Number Publication Date
JPS61116762U true JPS61116762U (enrdf_load_stackoverflow) 1986-07-23

Family

ID=30754340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19654484U Pending JPS61116762U (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPS61116762U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009228015A (ja) * 2008-03-19 2009-10-08 Toppan Printing Co Ltd 積層体の製造方法および製造装置ならびにガスバリアフィルム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009228015A (ja) * 2008-03-19 2009-10-08 Toppan Printing Co Ltd 積層体の製造方法および製造装置ならびにガスバリアフィルム

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