JPS61115918U - - Google Patents
Info
- Publication number
- JPS61115918U JPS61115918U JP19817384U JP19817384U JPS61115918U JP S61115918 U JPS61115918 U JP S61115918U JP 19817384 U JP19817384 U JP 19817384U JP 19817384 U JP19817384 U JP 19817384U JP S61115918 U JPS61115918 U JP S61115918U
- Authority
- JP
- Japan
- Prior art keywords
- thermal mass
- mass flow
- flow rate
- sensor unit
- flow controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Volume Flow (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19817384U JPS61115918U (enExample) | 1984-12-31 | 1984-12-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19817384U JPS61115918U (enExample) | 1984-12-31 | 1984-12-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61115918U true JPS61115918U (enExample) | 1986-07-22 |
Family
ID=30756939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19817384U Pending JPS61115918U (enExample) | 1984-12-31 | 1984-12-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61115918U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005514613A (ja) * | 2001-12-21 | 2005-05-19 | エムケーエス インスツルメント，インコーポレーテッド | 質量流量制御装置の熱管理のための装置及び方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59162415A (ja) * | 1983-02-16 | 1984-09-13 | エマ−ソン・エレクトリツク・カンパニ− | 熱的質量流量計 |
-
1984
- 1984-12-31 JP JP19817384U patent/JPS61115918U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59162415A (ja) * | 1983-02-16 | 1984-09-13 | エマ−ソン・エレクトリツク・カンパニ− | 熱的質量流量計 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005514613A (ja) * | 2001-12-21 | 2005-05-19 | エムケーエス インスツルメント，インコーポレーテッド | 質量流量制御装置の熱管理のための装置及び方法 |