JPS61115127U - - Google Patents
Info
- Publication number
- JPS61115127U JPS61115127U JP19956784U JP19956784U JPS61115127U JP S61115127 U JPS61115127 U JP S61115127U JP 19956784 U JP19956784 U JP 19956784U JP 19956784 U JP19956784 U JP 19956784U JP S61115127 U JPS61115127 U JP S61115127U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- phase synthesis
- synthesis apparatus
- dust collector
- dust removal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000003786 synthesis reaction Methods 0.000 claims description 7
- 239000012808 vapor phase Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims 2
- 230000005587 bubbling Effects 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Separation Of Particles Using Liquids (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19956784U JPS61115127U (enExample) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19956784U JPS61115127U (enExample) | 1984-12-27 | 1984-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61115127U true JPS61115127U (enExample) | 1986-07-21 |
Family
ID=30759609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19956784U Pending JPS61115127U (enExample) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61115127U (enExample) |
-
1984
- 1984-12-27 JP JP19956784U patent/JPS61115127U/ja active Pending
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