JPS61115127U - - Google Patents

Info

Publication number
JPS61115127U
JPS61115127U JP19956784U JP19956784U JPS61115127U JP S61115127 U JPS61115127 U JP S61115127U JP 19956784 U JP19956784 U JP 19956784U JP 19956784 U JP19956784 U JP 19956784U JP S61115127 U JPS61115127 U JP S61115127U
Authority
JP
Japan
Prior art keywords
gas
phase synthesis
synthesis apparatus
dust collector
dust removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19956784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19956784U priority Critical patent/JPS61115127U/ja
Publication of JPS61115127U publication Critical patent/JPS61115127U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation Of Particles Using Liquids (AREA)
  • Chemical Vapour Deposition (AREA)
JP19956784U 1984-12-27 1984-12-27 Pending JPS61115127U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19956784U JPS61115127U (enrdf_load_stackoverflow) 1984-12-27 1984-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19956784U JPS61115127U (enrdf_load_stackoverflow) 1984-12-27 1984-12-27

Publications (1)

Publication Number Publication Date
JPS61115127U true JPS61115127U (enrdf_load_stackoverflow) 1986-07-21

Family

ID=30759609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19956784U Pending JPS61115127U (enrdf_load_stackoverflow) 1984-12-27 1984-12-27

Country Status (1)

Country Link
JP (1) JPS61115127U (enrdf_load_stackoverflow)

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