JPS61115102U - - Google Patents

Info

Publication number
JPS61115102U
JPS61115102U JP20077084U JP20077084U JPS61115102U JP S61115102 U JPS61115102 U JP S61115102U JP 20077084 U JP20077084 U JP 20077084U JP 20077084 U JP20077084 U JP 20077084U JP S61115102 U JPS61115102 U JP S61115102U
Authority
JP
Japan
Prior art keywords
ultra
high vacuum
equipment
adsorption
vacuum equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20077084U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20077084U priority Critical patent/JPS61115102U/ja
Publication of JPS61115102U publication Critical patent/JPS61115102U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP20077084U 1984-12-27 1984-12-27 Pending JPS61115102U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20077084U JPS61115102U (enrdf_load_stackoverflow) 1984-12-27 1984-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20077084U JPS61115102U (enrdf_load_stackoverflow) 1984-12-27 1984-12-27

Publications (1)

Publication Number Publication Date
JPS61115102U true JPS61115102U (enrdf_load_stackoverflow) 1986-07-21

Family

ID=30761930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20077084U Pending JPS61115102U (enrdf_load_stackoverflow) 1984-12-27 1984-12-27

Country Status (1)

Country Link
JP (1) JPS61115102U (enrdf_load_stackoverflow)

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