JPS61114797U - - Google Patents

Info

Publication number

JPS61114797U

JPS61114797U JP19689384U JP19689384U JPS61114797U JP S61114797 U JPS61114797 U JP S61114797U JP 19689384 U JP19689384 U JP 19689384U JP 19689384 U JP19689384 U JP 19689384U JP S61114797 U JPS61114797 U JP S61114797U

Authority

JP

Japan

Prior art keywords

electrode

transparent electrode

thin film

dielectric layer

oxide

Prior art date

1984-12-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
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• 239000010409 thin film Substances 0.000 claims description 7
• 229910052782 aluminium Inorganic materials 0.000 claims 2
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
• 229910003437 indium oxide Inorganic materials 0.000 claims 2
• PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims 2
• 229910052751 metal Inorganic materials 0.000 claims 2
• 239000002184 metal Substances 0.000 claims 2
• 239000000758 substrate Substances 0.000 claims 2
• XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 2
• 229910001887 tin oxide Inorganic materials 0.000 claims 2
• 239000000956 alloy Substances 0.000 claims 1
• 229910045601 alloy Inorganic materials 0.000 claims 1
• 230000006866 deterioration Effects 0.000 claims 1
• 239000010408 film Substances 0.000 claims 1
• 238000007789 sealing Methods 0.000 claims 1
• 239000000853 adhesive Substances 0.000 description 1
• 230000001070 adhesive effect Effects 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 125000006850 spacer group Chemical group 0.000 description 1

Cited By (1)