JPS61114199U - - Google Patents

Info

Publication number
JPS61114199U
JPS61114199U JP20193484U JP20193484U JPS61114199U JP S61114199 U JPS61114199 U JP S61114199U JP 20193484 U JP20193484 U JP 20193484U JP 20193484 U JP20193484 U JP 20193484U JP S61114199 U JPS61114199 U JP S61114199U
Authority
JP
Japan
Prior art keywords
gas
cylinder
pipe
removal tube
filled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20193484U
Other languages
Japanese (ja)
Other versions
JPH0517520Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984201934U priority Critical patent/JPH0517520Y2/ja
Publication of JPS61114199U publication Critical patent/JPS61114199U/ja
Application granted granted Critical
Publication of JPH0517520Y2 publication Critical patent/JPH0517520Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はガスボンベと除去筒が収納されたボン
ベボツクスの内部を示す概略図であり、第２図は
従来のボンベボツクスの代表的な使用例の概念を
示す図である。 図において、１……ボンベボツクス、２……リ
アクター、３……ガスボンベ、４……ガス出口、
５……ガス供給管、６……パージ配管、７……不
活性ガス配管、８……排ガス処理装回、９……排
気ダクト、１０……希釈ガス配管、１１……鎖、
１２，１６および１７……弁、１３および１４…
…フイルター、１５……減圧弁、１８……除去筒
、１９……フード。 FIG. 1 is a schematic diagram showing the inside of a cylinder box in which a gas cylinder and a removal tube are housed, and FIG. 2 is a conceptual diagram showing a typical usage example of a conventional cylinder box. In the figure, 1... cylinder box, 2... reactor, 3... gas cylinder, 4... gas outlet,
5... Gas supply pipe, 6... Purge pipe, 7... Inert gas pipe, 8... Exhaust gas treatment system, 9... Exhaust duct, 10... Dilution gas pipe, 11... Chain,
12, 16 and 17... valves, 13 and 14...
... Filter, 15 ... Pressure reducing valve, 18 ... Removal cylinder, 19 ... Hood.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 有害ガスが充填され、外部プロセスへのガス供
給配管が接続されたガスボンベが収納されたボン
ベボツクスにおいて、有害ガスの除去剤が充填さ
れた除去筒が収納され、該除去筒のガス入口にガ
ス供給配管から分岐したパージ配管が接続された
ことを特徴とするボンベボツクス。 In a cylinder box containing a gas cylinder filled with harmful gas and connected to a gas supply pipe to an external process, a removal tube filled with a harmful gas remover is stored, and gas is supplied to the gas inlet of the removal tube. A cylinder box characterized by having a purge pipe connected to it that branches off from the pipe.
JP1984201934U 1984-12-27 1984-12-27 Expired - Lifetime JPH0517520Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984201934U JPH0517520Y2 (en) 1984-12-27 1984-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984201934U JPH0517520Y2 (en) 1984-12-27 1984-12-27

Publications (2)

Publication Number Publication Date
JPS61114199U true JPS61114199U (en) 1986-07-18
JPH0517520Y2 JPH0517520Y2 (en) 1993-05-11

Family

ID=30764182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984201934U Expired - Lifetime JPH0517520Y2 (en) 1984-12-27 1984-12-27

Country Status (1)

Country Link
JP (1) JPH0517520Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02146400A (en) * 1988-11-28 1990-06-05 Hitachi Ltd Cylinder cabinet
JP2016530453A (en) * 2013-05-17 2016-09-29 インテグリス・インコーポレーテッド Production of high-pressure BF3 / H2 mixture

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990697U (en) * 1982-12-09 1984-06-19 日本酸素株式会社 Storage box for toxic gas containers
JPS59153799U (en) * 1983-03-31 1984-10-15 株式会社ほくさん gas container storage box

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990697U (en) * 1982-12-09 1984-06-19 日本酸素株式会社 Storage box for toxic gas containers
JPS59153799U (en) * 1983-03-31 1984-10-15 株式会社ほくさん gas container storage box

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02146400A (en) * 1988-11-28 1990-06-05 Hitachi Ltd Cylinder cabinet
JP2016530453A (en) * 2013-05-17 2016-09-29 インテグリス・インコーポレーテッド Production of high-pressure BF3 / H2 mixture

Also Published As

Publication number Publication date
JPH0517520Y2 (en) 1993-05-11

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