JPS61114119A - Method for size measurement and temperature compensation - Google Patents

Abstract

PURPOSE:To measure size speedily and accurately at standard temperature before a temperature sensor and a body to be measured become equal in temperature and when temperature and size are measured at different time by calculating the temperature of the object body from the variation rate of the output of the temperature sensor and correcting the size measured value. CONSTITUTION:The temperature sensor 32 is brought into contact with the body 13 to be measured to obtain the output of the sensor at the 1st time and the 2nd time and the size of the body 13 at the 3rd time within a section where the output of the sensor 32 attains to the temperature of the body 13. The variation rate of the sensor 32 between the 1st time and the 2nd time is calculated to calculate the temperature of the body 13, and the temperature of the body 13 at the 3rd time is calculated from the temperature difference between the 2nd time and the 3rd time. Then, the size measured value of the body 13 is corrected with the difference between the temperature of the body 13 at the 3rd time and standard temperature. Consequently, the size of the body 13 is at the standard temperature is measured speedily and accurately before the temperature of the sensor 32 attains to that of the body 13 and even if the temperature and size are measured at different time.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to measuring the dimensions of an object to be measured, and more specifically, to measuring the dimensions of an object to be measured and comparing the measured value with the temperature of the object to be measured and a standard temperature. This relates to a dimension measurement and temperature correction method that corrects according to the temperature difference between the two.

Conventional Technology For objects to be measured, such as pistons and gears, whose constituent materials 11 undergo large dimensional changes due to temperature changes and require highly accurate dimensional control, the standard dimensions are predetermined. It is defined as the dimensional value at the reference number=temperature. Therefore, even if the dimensions of a workpiece such as a piston or gear are measured immediately after machining when the temperature of the workpiece is high, it is not possible to accurately measure the dimensions. The dimensions of the object to be measured are measured after cooling the object to a standard temperature using a cooling means such as a workpiece stocker or a cooling device. However, in such a method,
A cooling means is required, which results in high installation costs, and there is also a problem in that dimension measurement cannot be performed until the object to be measured reaches a standard temperature, so dimension measurement takes a long time.

In addition, one method to solve the above-mentioned problems is to measure the temperature of the object at the same time as measuring the dimensions of the object, and the expansion is determined by the measured temperature of the object and the material of the object. A possible method is to calculate the dimension value at the standard temperature of the object to be measured by correcting the dimension measurement value using the coefficient. However, in such a method, the temperature sensor that measures the temperature of the object to be measured generally has a response delay determined by the specific heat, heat capacity, etc. of the temperature sensor itself, and even if the temperature sensor is brought into contact with the object to be measured, the temperature will not change. The temperature of the sensor does not immediately become the same as the temperature of the object to be measured, and it usually takes 10 seconds or more for the humidity difference between the two to reach a practically acceptable value. Therefore, even with the method described above, it is not possible to efficiently measure the dimensions of the object to be measured.

In view of the various problems mentioned above in the conventional methods for measuring the dimensions of objects to be measured, the inventors of the present application filed a joint application with the present applicant and another applicant in Japanese Patent Application Laid-Open No. 58-8640.
In No. 9, the dimensions of the object to be measured are measured, the preparation of the object to be measured is measured using a temperature detector, and the measured dimension value is determined according to the measured temperature of the object to be measured. A temperature correction method for calculating a standard temperature of the object to be measured by correcting the temperature, wherein the temperature sensor horn changes after the temperature sensor is brought into contact with the object to be measured. The rate of change with respect to time is detected as data representing the concentration difference between the object to be measured and the temperature sensor, and the data of the detected rate of change and the magnitude of the output signal of the temperature detector are used to determine the rate of change in the temperature sensor. We have proposed a temperature correction method for dimension-side fixation, which is characterized in that dimensions of the object to be measured at the standard temperature are calculated by correcting the measured dimensions of the object.

Problems to be Solved by the Invention According to the method proposed in the previous two series, the temperature from when the furniture detector is brought into contact with the object to be measured until the temperature of the temperature sensor becomes equal to the temperature of the object to be measured is Since the dimensions of the object to be measured can be measured even within a time interval, the dimensions at the target temperature of the object can be measured more accurately in a shorter time than with conventional dimension measurement methods and temperature correction methods. can be found. However, in this method, if the process of detecting the rate of change of the temperature sensor over elapsed time and the process of measuring the dimensions of the object to be measured are not performed at the same time, the measured values of the dimensions of the object to be measured will not be accurate. Since it is not possible to correct the temperature at the time of measuring the dimensions of the object to be measured, 19! There is a problem in that dimensions at quasi-temperature cannot be determined accurately. In particular, when the object to be measured is a gear, for example, the change in the distance between the axes of both gears is measured while rotating the gear to be inspected as the object to be measured while meshing with the master gear, and the overflow is determined based on the measurement result. In gear meshing tests that detect ball diameter, m-groove runout, meshing errors, etc., it is not possible to accurately measure the temperature of the gear being tested by contact while rotating it, so the above-mentioned proposal is not suitable. Depending on the method described above, it is not possible to accurately correct the dimensional measurements obtained in gear meshing tests.

51 In view of the above-mentioned problems in conventional dimension measurement methods and temperature correction methods, the present invention provides a method in which the Ii degree of the temperature sensor becomes equal to the temperature of the object to be measured after the temperature sensor is brought into contact with the object to be measured. Even if the dimension measurement of the measured object and the temperature measurement of the measured object are not performed at the same time,
It is an object of the present invention to provide an improved dimension measurement and temperature correction method that can accurately and quickly determine dimensions at 91 quasi-dryness.

Means for Solving the Problems According to the present invention, the above object is achieved by bringing a temperature sensor that measures the temperature of the object by contacting the object to be measured into contact with the object to be measured. Obtain the output of the temperature sensor at the first and second times in the interval until the output reaches the temperature of the measured object, and calculate the output at the third time in the interval. Measure the dimensions of the object to be measured, calculate the rate of change in the output of the temperature sensor between the first time and the second time, and calculate the rate of change in the output of the temperature sensor at the second time from the rate of change. Calculate the temperature of the object to be measured, and calculate the temperature at the third time from the temperature of the object at the second time and the time difference between the second time and the third time. The temperature of the measured object at the third time is calculated, and the temperature difference between the temperature of the measured object at the third time and the temperature of the camphor tree is calculated, and the temperature difference is calculated at the third time. This is achieved by a dimension measurement and temperature correction method that includes correcting the dimension measurement values of the object to be measured.

Effects and Effects of the Invention According to the present invention, a temperature sensor that measures the temperature of a measured object by contacting the measured object is brought into contact with the measured object until the output of the temperature sensor reaches the temperature of the measured object. The output of the temperature sensor at a first time and a second time within the interval is determined, the dimensions of the object to be measured are measured at a third time within the interval, and The rate of change in the output of the temperature sensor between the two times is calculated, and the rate of change in the output of the temperature sensor at the second time is calculated by multiplying the rate of change by, for example, an experimentally determined coefficient. The temperature of the measured object at the second time is calculated, and from the temperature of the measured object at the second time and the time difference between the second time and the third time, for example, the temperature of the measured object at the second time is calculated. The temperature of the object to be measured at the third time is calculated by means such as multiplying the time difference between the second time and the third time by an experimentally determined coefficient, and the temperature of the object at the third time is calculated. The temperature difference between the temperature of the object to be measured and the standard temperature is determined, and the measured value of the dimensions of the object at a third time, that is, the time when the dimensions of the object to be measured are measured, is calculated based on the temperature difference. is corrected, it is possible to obtain the dimensions of the object to be measured at the standard temperature in a shorter time than with conventional dimension measurement methods and temperature correction methods. It is possible to more accurately determine the dimensions of the object to be measured at a reference temperature than with the conventional method, and it is also possible to measure the dimensions of the object in its dynamic state, such as in a gear meshing test. Even when a! of the measured object is performed, a! Dimensions at semi-hot water temperature can be determined.

Further, according to the present invention, the dimensions of each part of the object to be measured are measured at minute intervals, such as the dimension measurement by a gear meshing test,
Therefore, even if it takes a certain amount of time to measure the dimensions of an object to be measured, the measured values of each part of the object are calculated based on the temperature of the object at the time when each dimension measurement value was obtained (third time). Since it is possible to correct by the temperature difference between and the standard temperature, 1! It is possible to accurately determine the dimensions of each part of the object to be measured at a quasi-temperature.

In the method of the present invention, the first to third times do not need to be in this order, and the process of determining the output of the temperature sensor at the first time and the second time is the first time. From the process of calculating the rate of change in the output of the temperature sensor between the second time and the second time to the process of calculating the temperature difference between the temperature of the object to be measured by rAG and the standard temperature at the third time. The process of measuring the dimensions of the object to be measured at the third time is carried out before each step of The steps of the method of the present invention may be performed in any order as long as they are performed before the step of correcting the dimensional measurements of the object at time .

The present invention will now be described in detail with reference to the accompanying drawings. This will be explained in detail.

Embodiment First, the principle of the one-method measurement and temperature correction method of the present invention will be explained with reference to FIG.

Figure 1 shows the relationship between the change in temperature Tw of the workpiece after machining and the change in temperature (output > Ts) of the temperature sensor that is in contact with the workpiece at time to immediately after machining. The temperature Tw of the object to be measured decreases slowly from the temperature Two immediately after processing due to natural cooling, and the TS of the temperature sensor rapidly decreases near the time to angle when the temperature difference between the temperature sensor and the object to be measured is large. As the temperature difference between the two becomes smaller, the amount of temperature increase per unit time gradually becomes smaller.

After time t6 when both temperatures become equal,
The temperature TS of the temperature sensor slowly decreases following the temperature Tw of the object to be measured.

As is clear from FIG. 1, the time t when the temperature difference Td between the temperature sensor and the object to be measured is large.

In the vicinity, the boundary temperature of the temperature sensor per unit time is large, and as the temperature difference between the two becomes smaller, the amount of temperature rise of the temperature sensor per unit time becomes smaller, and the temperature increases. It can be seen that the amount of temperature rise of the sensor per unit time is approximately proportional to the temperature difference between the temperature sensor and the object to be measured at that time. Therefore, the proportionality constant between the amount of temperature rise per unit time of the temperature sensor and the amount temperature difference between the temperature sensor and the measured object at that time is experimentally determined, and the proportionality constant is set to 1. Time of 1. and the temperature of the temperature sensor at the second time t2, respectively, TSI and TS! Then, ΔT=TS 2 TS + T (1- to TXK+ holds, so the temperature TW of the measured object at time t2
+ is obtained as TWI-ΔTXKI +Ts 2 (1).

Furthermore, assuming that the dimensions of the object to be measured are measured at the third time t8, the temperature Tw of the object to be measured decreases substantially linearly from time t2 to time [3]. Therefore, if the temperature change rate of the measured object in the interval from time t2 to time [8] is experimentally determined and the coefficient of change is set to 2, then the temperature change rate of the measured object at the third time t3 is The temperature TWt is TV2 = TW+ [1-(jg jz >XK2
]...(2) Calculated as follows.

Therefore, the reference t\temperature is Tr, and the dimension correction constant of the object to be measured (substantially equal to the coefficient of linear expansion of the material constituting the object to be measured)
If α is the dimension value of the object to be measured measured at time t8, then Dw is the dimension value of the object to be measured at 4M semi-degree Tr. Ru.

[)wr-Dw [1(X (Tw 2-'T'r
]...(3) By performing temperature correction on the dimension measurement values using the above formula (3), even when the temperature measurement time of the object to be measured and the dimension measurement time of the object to be measured are different, all standards can be achieved. The dimensions of the object to be measured at different temperatures can be determined accurately.

Note that when the dimensions of each part of the object to be measured are measured and it takes a relatively long time to measure the dimensions, for example from time t8 to time t4, time t8 in equation (2) above is replaced by time. By setting each time t at every predetermined minute time from t8 to time t4, 81! The dimensions Dwx of each part of the measured object at I Tw and standard temperature Tr can be calculated using the following equations (2') and (3').
It can be calculated as follows.

Twx-Tw I (1-N-tg)XK2)・
...(2') 1)wx=[)w (1-(1(TV t -Tr)
)...(3') Next, one embodiment of the dimension measurement and temperature correction method of the present invention based on the principle as described above was applied to temperature correction of the overball diameter of a gear measured by a meshing test. An example will be explained.

2 and 3 are a plan view and a simplified front view, respectively, showing one embodiment of a gear meshing test device to which the dimension measurement and temperature correction method according to the present invention is applied, and FIG. It is a sectional view along mrv-rv of a figure. In these figures, 1 indicates a base, and a support base 2 is mounted on the base.
~5 is fixed. A support member 6 is fixed on the support base 2, and the support member supports a center 8 rotatably around an axis 9 at a center stock portion 7 via a bearing (not shown). There is. There is a support part 0 on the support stand 3.
10 is mounted so as to be reciprocally movable along the axis 9, and can be fixed at a predetermined position with respect to the support base 3 as required. The support member 10 rotatably supports the center 12 around the axis 9 at the center stock portion 11 via a bearing (not shown). Center 8 and 12
The gear shafts 14 having the gears 13 to be inspected are rotatably supported around the axis 9 in cooperation with each other.

The gear shaft 14 is rotatably driven around the axis 9 by a motor 15 fixed to the support base 3 via a drive gear 17 that meshes with another gear 16 on the gear shaft.

A pivot lever member 18 in the shape of a letter 1 is attached to the support base 4 along an axis 9.
It is pivotably supported about an axis 19 parallel to .

A mask gear support member 21 is fixed to the tip of one arm 20 of the lever member 18 . The mask gear support member 21 is adapted to rotatably support a mask gear 22 that meshes with the gear to be inspected 13 without backlash around an axis 23 parallel to the axis 9. In this case, when the mask gear 22 and the gear to be inspected 13 are meshed with each other with no backlash, as shown in FIG. The straight line 20a passing through 23 is orthogonal to the straight line 20a.

In addition, the mask gear support member 21 has a rotation angle (
A rotary encoder 24 is attached to detect the rotational phase. The rotary encoder 24 photoelectrically detects the rotation angle of the mask gear and outputs an electric signal corresponding to the rotation angle to an arithmetic and control device 40, which will be described later. Also, a compression coil spring 26 is interposed between the other arm 25 of the lever member 18 and the base 21, which biases the lever member 18 in a counterclockwise direction around the axis 19 when viewed in FIG. The lever member 18 is placed in the first position shown, where the mask gear 22 meshes with the gear to be inspected 13 with no backlash, and in the first position shown, where the mask gear disengages from the tooth width to be inspected. is installed on the support base 3 between the second position (not shown)
The positioning device 27 is provided for selective positioning.

A displacement sensor 28 is attached to the support base 5. The displacement sensor 28 is a type of sensor such as a differential transformer that converts linear displacement into an electrical quantity, and its measuring point 29 is connected to the arm 2.
A straight line 25(
), and extends along the axis 30 perpendicular to the axis 30, and comes into contact with the tip of the arm 25 to detect the displacement of the tip of the arm 25 along the axis 30 due to pivoting of the lever part +118. It has become. The displacement of the tip of the arm 25 is inspected i.
! Since it is proportional to the amount of change in the distance between the liI width 13 and the mask gear 22, that is, the distance between the axis 19 and the axis 23,
The displacement sensor 28 essentially measures the amount of change in the distance between the axes. The electric signal generated by the displacement sensor 28 is output to the arithmetic and control unit 40 .

Further, a temperature measuring unit 31 is installed on the support base 2 at a position close to the support member 7. The temperature measurement unit 31 includes a temperature sensor 32 and an actuator 33, and the temperature sensor is moved by the actuator to a first position shown in the figure where it comes into contact with the gear to be inspected 13 to measure the temperature of the gear to be inspected, and a position away from the gear to be inspected. It is configured to be selectively positioned at a second position, not shown in the drawings, which does not inhibit the rotation of the gear to be inspected. The temperature sensor outputs a signal indicating the temperature of the gear to be inspected to the arithmetic and control unit 40, and is selectively positioned at the first position by a command signal from the arithmetic and control unit, and is normally positioned at the second position. It is designed to be maintained.

Further, the support member 6 has a rotary encoder 31 on the side opposite to the center 8! I is attached, and the rotary encoder photoelectrically detects the rotation angle of the center 8 and, therefore, the rotation angle of the gear 13 to be inspected, and outputs a corresponding signal to the arithmetic and control unit 40. There is.

FIG. 5 is a block diagram showing the electric circuit of the meshing test device shown in FIGS. 2 to 4. Arithmetic control]! ! The i-position 40 includes an AC amplifier circuit 41, and the output signal (AM signal) generated by the displacement sensor 28 is input to the AC amplifier circuit. The output signal of the AC amplifier circuit 41 is output to a synchronous rectifier circuit 42, rectified by the circuit, and input to a DC amplifier circuit 43 and a bandpass filter 44. Also performance I
The F 11 control device @40 includes an AC amplifier circuit 45, into which the output signal generated by the temperature sensor 32 is input. The output signals of the DC amplifier circuit 43, bandpass filter 44, and AC amplifier circuit 45 are input to different input terminals of the A/D converter 46, respectively. converter 4
6 has a multiplexer therein, and the multiplexer controls switching of signals input to the converter.

The output signal of the DC amplifier circuit 43 is used to evaluate the overball diameter of the gear and the runout of the tooth space, and the output signal of the bandpass filter 44 is used to evaluate the mesh wA difference of the gears. The output signals of are used for temperature correction of these output signals.

The output signal of the A/D converter 46 is input to a central processing unit (CPU) 48 via a common bus 47. The central processing unit 48 processes the signals according to the program stored in the read-only memory 49, and processes the signals as necessary.
The signal from the /D converter 46 is transferred to a random access memory (
RAM) 50.

The arithmetic control W device 40 includes a digital input/output circuit 51, and the output signals of the O-tary encoders 24 and 34 are input to the digital input/output circuit. Signals from the rotary encoders 24 and 34 that are input to the digital input/output circuit 51 are input to the central processing unit 48 via the common bus 47. Further, the digital input/output circuit 51 is connected to a sequence control device @52. Signals generated by the sequence control device 52 are input from the digital input/output circuit 51 to the central processing unit 48 via the common bus 47. Sequence control device 5
2 generates a command force signal through a switch operation by an operator, and controls the operation of a program stored in a read-only memory 49 in response to the command force signal.

The read-only memory 49 is based on the above formula (1) and formula (2').
and (3″) coefficient + and 2, constant α, standard temperature T
The value of r is memorized. Also random access memory 5
0 corresponds to the output signal of the row encoder 34, in other words, the rotation angle of the gear 13 to be inspected? ? The output signal of the A/D converter 46 is stored using J@ as an address.

The central processing unit executes equations (1), (2') and (3) according to the program stored in the read-only memory 49.
'), and outputs a signal representing the dimension DW× of the measured object at standard temperature from the digital input/output circuit 55 to the display 56 of the judgment display device 53 via the common bus 47. , and the judgment display device 1r53
Compare the comparison reference value generated by the setting device 54 and input as a comparison reference signal from the digital input/output circuit 55 via the common bus 47 with the value [)WX of the calculation result,
A signal representing the comparative unity is outputted from the digital input/output circuit 55 to the display 56 via the common bus 47.

Next, referring to chart 70 in FIGS. 6 and 7 showing the routine of the control system of the meshing test device shown in FIGS. 2 to 5, one of the dimension measurement and temperature correction methods of the present invention will be explained. Two embodiments will be described.

First, the gear shaft 14 is mounted between the centers 8 and 12 so as to be rotatable around the axis 9 with the gear 16 meshing with the drive gear 17, and then the lever member 18 is moved by the positioning device 27 as shown in the figure. By being brought into the first position,
The gear to be inspected 13 and the master gear 22 are meshed with each other in a normal crash. The steps shown in FIG. 6 are then sequentially executed in response to command input signals from the sequence RIlI 111 device 52.

In the first step 1, at time to, the temperature sensor 32 of the temperature measuring unit 31 is driven to its first position. In the next step 2, the soft timer sets time 1. In the next step 3, the output TSI of the temperature sensor 28 at time t1 is read, and the output is stored in the random access memory 50.

In the next step 4, a predetermined period of time is waited until time t2, and in the next step 5, the output cuff s2 of the temperature sensor 28 at time t2 is read, and the output is Stored in random access memory. In the next step 6, temperature sensor 28 is returned to its second position.

In the next step 7, the motor 15 is energized at time t8, so that the drive m wheel 17 starts rotating the gear shaft 14, and thus the gear 13 to be inspected. In the next step 8, information on the rotation angle and the displacement amount of the tip of the arm 25 of the lever member 18 is read for each minute rotation angle of the gear 13 to be inspected, and the 8 values are stored in the random access memory 50. be remembered. In the next step 9,
Whether or not reading of the rotation angle of the gear 13 to be inspected and the amount of displacement of the tip of the arm 25 has been completed, that is, the tooth 1' (13
A determination is made as to whether or not the point has rotated by 360 degrees and reached time t4. If it is determined in this step that the gear 13 to be inspected has rotated less than 360 degrees, the process returns to step 8, and the rotation angle of the tooth width to be inspected and the rotation angle of the arm 25 are determined.
The reading of the displacement amount of the tip of is repeated. If it is determined in step 9 that the gear 13 to be inspected has rotated 360 degrees, the process proceeds to step 10.

In step 10, the power supply to the motor 15 is stopped, thereby stopping the rotation of the gear 13 to be inspected. In the next step 11, based on the data stored in the random access memory 50, a change m1 in the distance between the shafts between the gear to be inspected 13 and the master gear 22 for each minute rotation angle of the gear to be inspected, that is, The overball diameter [)W is calculated,
The value of each [)W is stored in the random access memory 50 with time t as the address. This calculation result is visually represented as shown in FIG. In addition, in Figure 7,
DW, FW) EV respectively indicate the A-baball diameter, tooth space runout, and meshing error of the gear to be inspected before temperature correction.

In the next step 12, the random access memory 5
From the data of temperature TS2 and temperature TSI stored in 0, the temperature difference between them ΔT=T! i t Ts l is calculated, and the value of T for the temperature difference is stored in the random access memory 50. In the next step 13, the random access memory 50 calculates the temperature difference 6 and +% temperature T for the coefficient.
The value of S2 is successively obtained, and the temperature TWI of the gear to be inspected at time t2 is calculated using equation (1), and the temperature value is stored in the random access memory 50.

In the next step 111, the temperature TI"+ is read out from the random access memory at time [2 and tχ, a value of 2 is read out for the coefficient, and the gear to be inspected at time t is read out according to the above equation (2'). The temperature Twx is calculated, and the temperature value is stored in the random access memory.In the next step 15, the A-Pa ball diameter DW1 constant α of the gear to be inspected before temperature correction is stored in the random access memory. The values of Twx and Tr are read out, and the overball diameter after temperature correction of the tooth width to be inspected, that is, the overball diameter DWX at standard *i degrees of the gear to be inspected, is calculated according to the above formula (3'). In the next step 16, a signal indicating the overball diameter Dwx after temperature correction calculated in step 15 is output from the digital input/output circuit 55 to the display 56, so that the overball diameter [ ) The value of WX is displayed on the display 56.
will be displayed. In the next step 17, step 1
A-Baboor diameter after temperature correction calculated in 5 [)W
A comparison is made between X and a comparison reference value of the overball diameter inputted from the setting device 54, and the pass/fail result is displayed on the display 5.
6, and a correction command signal is output to the gear machining process as necessary.

From the above explanation, according to the present invention, even before the temperatures of the temperature sensor and the object to be measured become equal, and even when the time of measuring the temperature of the object to be measured and the time of measuring the dimensions of the object to be measured are different, It will be understood that the dimensions of the object to be measured at standard temperature can be determined quickly and accurately.

In the above meshing test, a substitute mask gear may be used as the mask gear, as disclosed in Japanese Patent Application No. 55-99091 filed by the same applicant as the present applicant. Furthermore, in the method of the present invention, when the measurement of the dimensions of the object to be measured is instantaneously performed at time t8 or when the interval from time t8 to time t4 is short, the dimension measurement value [)W is the temperature of the measured object at time t8 1"w2 or time t8
The temperature of the object to be measured may be corrected at an intermediate time between the time t4 and the time t4. Furthermore, in the method of the present invention, the time to
to time t5, preferably time 1. At time LIst2.1.1 in the interval from to time t8, the outputs TS+, TSt, and Ts2' of the temperature sensor 28 are determined, and ΔT=”rs 2−Ts 1 ΔT1.TS21 TS2 TW+ −8TXK+ +Ts 2 TW, l −ΔT' XK+ +TS 2' to 2 −
(TV I Tw Goose')/(t+≧'-
A coefficient of 2 may be calculated based on L.

Although the present invention has been described above in detail with reference to specific embodiments, the present invention is not limited to such embodiments, and various embodiments are possible within the scope of the present invention. This will be obvious to those skilled in the art.

[Brief explanation of drawings]

Figure 1 is a graph showing the relationship between the temperature change of the workpiece immediately after machining and the change in the temperature ratio of the temperature sensor that is in contact with the workpiece immediately after machining. A plan view and a simplified front view showing one embodiment of the gear mesh test device according to the invention, FIG. 4 is a sectional view taken along line IV-IV in FIG. 2, and FIG. 5 is a cross-sectional view taken along line IV-IV in FIG. Fig. 4 is a block diagram showing the electric circuit of the meshing test device shown in Fig. 6, a flowchart showing the routine of the control system of the meshing testing device shown in Figs. 2 to 4, and Fig. 7 shows the temperature It is a graph showing the relationship between the value of the inter-axle distance between the gear to be inspected and the mask gear before correction and the rotation angle of the gear to be inspected. DESCRIPTION OF SYMBOLS 1... Base, 2-5... Support stand, 6... Supporting member, 7... Center stud vine part, 8... Center, 9...
... Axis line, 10... Support member, 11... Center stock part, 12... Center, 13... Gear to be inspected, 1
4...6! i1 axle, 15... motor, 16...
Gear, 17... Drive gear, 18... Pivoting lever member, 19... Axis line, 20... Arm, 21... Master gear support member, 22... Mask gear, 23...・Axis line, 24...Rotary encoder, 25...Arm, 26...Compression coil spring, 27...Positioning device, 28...Displacement sensor, 29...Measuring head, 30...
- Axis line, 31...Temperature measurement unit, 32...Nurimaro sensor, 33...Actuator, 34...Rotary encoder, 40...Calculation l1I1111 device, 4
1... AC amplifier circuit, 42... Synchronous rectifier circuit, 43
...DC amplifier circuit, 44...Band pass filter,
45... AC amplifier circuit, 46... A/D converter, 4
7... Common path, 48... Central processing unit 1-(
CPU), 49...Read-only memory (ROM>
, 50...Random access memory (RAM), 51
... Digital input/output circuit, 52 ... Sequence control device, 53 ... Judgment display device, 54 ... Setting device,
55...Digital input/output circuit, 56...Display device JP-A-6L-114119 (11) Fig. 6

Claims (1)

[Claims] (1) A temperature sensor that measures the temperature of the object by contacting the object to be measured is placed in contact with the object to be measured until the output of the temperature sensor reaches the temperature of the object to be measured. Obtain the output of the temperature sensor at a first time and a second time, measure the dimensions of the object at a third time within the section, and measure the output of the temperature sensor at a third time within the section. Calculate the rate of change in the output of the humidity sensor between the two times, calculate the temperature of the object at the second time from the rate of change, and calculate the temperature of the object at the second time. The temperature of the object to be measured at the third time is calculated from the temperature of the object to be measured and the time difference between the second time and the third time, and the temperature of the object at the third time is calculated. A dimension measurement and temperature correction method comprising calculating a temperature difference between a temperature of an object to be measured and a standard temperature, and correcting a dimension measurement value of the object to be measured at the third time using the temperature difference.