JPS6111142A - パ−ジ用不活性ガス - Google Patents
パ−ジ用不活性ガスInfo
- Publication number
- JPS6111142A JPS6111142A JP13225084A JP13225084A JPS6111142A JP S6111142 A JPS6111142 A JP S6111142A JP 13225084 A JP13225084 A JP 13225084A JP 13225084 A JP13225084 A JP 13225084A JP S6111142 A JPS6111142 A JP S6111142A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- gas
- reactor
- purge
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/14—Production of inert gas mixtures; Use of inert gases in general
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13225084A JPS6111142A (ja) | 1984-06-26 | 1984-06-26 | パ−ジ用不活性ガス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13225084A JPS6111142A (ja) | 1984-06-26 | 1984-06-26 | パ−ジ用不活性ガス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6111142A true JPS6111142A (ja) | 1986-01-18 |
| JPS635132B2 JPS635132B2 (enExample) | 1988-02-02 |
Family
ID=15076876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13225084A Granted JPS6111142A (ja) | 1984-06-26 | 1984-06-26 | パ−ジ用不活性ガス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6111142A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2712599A1 (fr) * | 1993-11-19 | 1995-05-24 | Air Liquide | Composition comprenant un gaz inerte. |
| US6682585B2 (en) * | 2000-02-07 | 2004-01-27 | Air Products And Chemicals, Inc. | Refining nonferrous metals and alloys with gases having reduced global warming potential |
| CN115586314A (zh) * | 2022-08-24 | 2023-01-10 | 合肥正帆电子材料有限公司 | 磷烷中水分的采样分析装置 |
-
1984
- 1984-06-26 JP JP13225084A patent/JPS6111142A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2712599A1 (fr) * | 1993-11-19 | 1995-05-24 | Air Liquide | Composition comprenant un gaz inerte. |
| US6682585B2 (en) * | 2000-02-07 | 2004-01-27 | Air Products And Chemicals, Inc. | Refining nonferrous metals and alloys with gases having reduced global warming potential |
| CN115586314A (zh) * | 2022-08-24 | 2023-01-10 | 合肥正帆电子材料有限公司 | 磷烷中水分的采样分析装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS635132B2 (enExample) | 1988-02-02 |
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